Coated probe and method of fabricating the same

Patent metadata

Field	Value
Publication number	US-9970959-B2
Application number	US-201414494597-A
Country	US
Kind code	B2
Filing date	Sep 24, 2014
Priority date	Nov 22, 2013
Publication date	May 15, 2018
Grant date	May 15, 2018

Abstract

A coated probe is provided. The probe includes a probe body and a cladding layer. The probe body has a terminal. The cladding layer covers the surface of the terminal of the probe body, wherein the cladding layer includes a carbon nano-material layer, and the carbon nano-material layer includes a carbon nano-material.

First claim

What is claimed is:

1. A coated probe, comprising:
a probe body having a terminal; and
a cladding layer covering a surface of the terminal of the probe body, wherein the cladding layer comprises a carbon nano-material layer and a hydrophobic layer, and wherein the carbon nano-material layer comprises a carbon nano-material and the hydrophobic layer comprises a fluorosilane group, and the fluorosilane group is represented by —Si(CHF) n F, wherein n is an integer, and 1≤n≤10, and the carbon nano-material layer is located between the terminal of the probe body and the hydrophobic layer.

2. The coated probe of claim 1 , wherein a material of the probe body comprises a metal, an alloy, or a combination thereof.

3. The coated probe of claim 2 , wherein the metal is selected from the group consisting of Cu, Pd, Ag, Au, Re, and W.

4. The coated probe of claim 1 , wherein a thickness of the cladding layer is 50 nm to 1 μm.

5. The coated probe of claim 1 , wherein the carbon nano-material comprises carbon nano-capsules, carbon nanotubes, graphene, or diamond like carbon.

6. The coated probe of claim 5 , wherein a particle size of the carbon nano-capsules is 100 nm to 10 nm.

7. The coated probe of claim 1 , wherein the carbon nano-material layer comprises:
a linking group comprising an amide bond and a mercapto group; and
the carbon nano-material bonded to the terminal of the probe body through the mercapto group of the linking group.

8. The coated probe of claim 7 , wherein the carbon nano-material comprises carbon nano-capsules, carbon nanotubes, graphene, or diamond like carbon.

9. The coated probe of claim 8 , wherein a particle size of the carbon nano-capsules is 100 nm to 10 nm.

10. The coated probe of claim 1 , wherein the cladding layer further comprises a reactive cross-linking substance, the reactive cross-linking substance crosslinks the terminal of the probe body and the carbon nano-material together, or crosslinks molecules of the carbon nano-material together, such that the reactive cross-linking substance and the carbon nano-material form a network structure.

11. The coated probe of claim 10 , wherein the reactive cross-linking substance comprises 1,2-bis(trichlorosilyl) ethane or 1,6-bis(trichlorosilyl) hexane.

12. The coated probe of claim 10 , wherein the reactive cross-linking substance comprises two or more reactive functional groups.

13. The coated probe of claim 12 , wherein the reactive functional groups are selected from the group consisting of —OH, —SH, —COOH, —SiH, —SiOR, and —NH 2 .

14. A coated probe, comprising:
a probe body having a terminal; and
a cladding layer covering a surface of the terminal of the probe body, wherein the cladding layer comprises a metal nitride layer and a hydrophobic layer, and wherein the metal nitride layer comprises a metal nitride compound and the hydrophobic layer comprises a fluorosilane group, and the fluorosilane group is represented by —Si(CHF) n F, wherein n is an integer, and 1≤n≤10, and the metal nitride layer is located between the terminal of the probe body and the hydrophobic layer.

15. The coated probe of claim 14 , wherein a material of the probe body comprises a metal, an alloy, or a combination thereof.

16. The coated probe of claim 15 , wherein the metal is selected from the group consisting of Cu, Pd, Ag, Au, Re, and W.

17. The coated probe of claim 14 , wherein a thickness of the cladding layer is 50 nm to 1 μm.

18. The coated probe of claim 14 , wherein the metal nitride compound comprises TiN or CrN.

19. The coated probe of claim 14 , wherein the cladding layer further comprises a reactive cross-linking substance, the reactive cross-linking substance crosslinks the terminal of the probe body and the metal nitride compound together, or crosslinks molecules of the metal nitride compound together, such that the reactive cross-linking substance and the metal nitride compound form a network structure.

20. The coated probe of claim 19 , wherein the reactive cross-linking substance comprises 1,2-bis(trichlorosilyl) ethane or 1,6-bis(trichlorosilyl) hexane.

21. The coated probe of claim 19 , wherein the reactive cross-linking substance comprises two or more reactive functional groups.

22. The coated probe of claim 21 , wherein the reactive functional groups are selected from the group consisting of —OH, —SH, —COOH, —SiH, —SiOR, and —NH 2 .

Assignees

• Ind Tech Res Inst

Inventors

• Tseng Shih-Chun
• Wu Ren-Jye
• Yang Ping-Hsing
• Tsai Li-Duan
• Wu Jin-Bao

Classifications

• G01R1/06755 Primary

  Material aspects · CPC title

• C23C14/0605

  Carbon · CPC title

• G01R3/00

  Apparatus or processes specially adapted for the manufacture {or maintenance} of measuring instruments {, e.g. of probe tips} · CPC title

• C23C14/5846

  Reactive treatment · CPC title