Ion assisted deposition top coat of rare-earth oxide

Patent metadata

Field	Value
Publication number	US-9970095-B2
Application number	US-201615211921-A
Country	US
Kind code	B2
Filing date	Jul 15, 2016
Priority date	Apr 25, 2014
Publication date	May 15, 2018
Grant date	May 15, 2018

Abstract

A method of manufacturing an article comprises providing an article. An ion assisted deposition (IAD) process is performed to deposit a second protective layer over a first protective layer. The second protective layer is a plasma resistant rare earth oxide having a thickness of less than 50 microns and a porosity of less than 1%. The second protective layer seals a plurality of cracks and pores of the first protective layer.

First claim

What is claimed is:

1. A method comprising:
performing an ion assisted deposition (IAD) process at a first deposition rate of 0.25-1.0 Angstroms per second to deposit a bottom portion of a second protective layer on at least a region of a first protective layer that is on a surface of an article, wherein the first deposition rate achieves improved conformance and better adherence of the second protective layer to the first protective layer than a higher deposition rate; and
continuing the IAD process at a second deposition rate of 2-10 Angstroms per second to deposit a top portion of the second protective layer on the bottom portion of the second protective layer to reduce process time and cost for the IAD process as compared to continuing the IAD process at the first deposition rate;
wherein the first protective layer consists of Er 3 Al 5 O 12 and has an amorphous structure, and wherein the second protective layer consists of Er 2 O 3 and has a crystalline or nano-crystalline structure, wherein the second protective layer has a thickness of less than or approximately 50 microns and seals a plurality of cracks and pores of the first protective layer.

2. The method of claim 1 , further comprising:
cooling the article during deposition of the second protective layer to maintain the article at a temperature of below approximately 150° C.

3. The method of claim 1 , wherein the article is a chamber liner of an etch reactor, the chamber liner having a hollow cylindrical shape comprising an inner wall and an outer wall, and wherein performing IAD to deposit the second protective layer comprises:
positioning a target at a first opening of the article;
coating a first portion of the inner wall of the article;
subsequently positioning the target at a second opening of the article; and
coating a second portion of the inner wall of the article.

4. The method of claim 1 , further comprising performing the following prior to depositing the second protective layer:
identifying one or more regions of the article that will exhibit a high erosion rate due to exposure to plasma relative to other regions of the article; and
masking the article with a mask so that the mask leaves the identified one or more regions of the article exposed during the IAD, wherein the second protective layer is deposited on the identified one or more regions of the article.

5. The method of claim 1 , wherein performing the IAD comprises:
setting a working distance between a target material and the article to less than 1 meter.

6. The method of claim 1 , further comprising:
performing a plasma spraying process to deposit the first protective layer on the surface of the article, wherein the first protective layer has a thickness of greater than or approximately 50 microns.

7. The method of claim 6 , wherein a surface roughness of the first protective layer is 0.5-180 micro-inches.

8. The method of claim 1 , further comprising:
performing IAD to deposit a third protective layer on the second protective layer, wherein the third protective layer has a thickness of less than or approximately 50 microns and comprises an oxide selected from the group consisting of: Y 3 Al 5 O 12 , Y 4 Al 2 O 9 , Er 2 O 3 , Gd 2 O 3 , Er 3 Al 5 O 12 , Gd 3 Al 5 O 12 and a ceramic compound comprising Y 4 Al 2 O 9 and a solid-solution of Y 2 O 3 —ZrO 2 .

9. The method of claim 1 , further comprising:
using oxygen ions to burn organic surface contamination from the first protective layer and disperse surface particles on the first protective layer prior to performing the IAD.

10. The method of claim 1 , wherein the IAD is performed without first roughening the first protective layer.

11. The method of claim 1 , wherein the second protective layer has a thickness of 0.5-7.0 microns.

12. The method of claim 1 , further comprising:
performing IAD to deposit the first protective layer prior to depositing the bottom portion of the second layer.

13. A method comprising:
performing an ion assisted deposition (IAD) process at a first deposition rate of 0.25-1.0 Angstroms per second to deposit a bottom portion of a first protective layer on a surface of an article, wherein the first deposition rate achieves improved conformance and better adherence of the first protective layer to the surface of the article than a higher deposition rate;
continuing the IAD process at a second deposition rate of 2-10 Angstroms per second to deposit a top portion of the first protective layer on the bottom portion of the first protective layer to reduce process time and cost for the IAD process as compared to continuing the IAD process at the first deposition rate, wherein the first protective layer consists of Er 3 Al 5 O 12 and has an amorphous structure; and
performing IAD to deposit a second protective layer on the first protective layer, wherein the second protective layer consists of Er 2 O 3 , has a crystalline or nano-crystalline structure, and has a thickness of less than or approximately 50 microns.

14. The method of claim 13 , further comprising:
performing IAD to deposit a third protective layer on the second protective layer, wherein the third protective layer consists of Er 3 Al 5 O 12 and has an amorphous structure; and
performing IAD to deposit a fourth protective layer on the third protective layer, wherein the fourth protective layer consists of Er 2 O 3 and has a crystalline or nano-crystalline structure.

15. A method comprising:
performing ion assisted deposition (IAD) process at a first deposition rate of 0.25-1.0 Angstroms per second to deposit a bottom portion of a second protective layer on at least a region of a first protective layer that is on a surface of an article, wherein the first deposition rate achieves improved conformance and better adherence of the second protective layer to the first protective layer than a higher deposition rate; and
continuing the IAD process at a second deposition rate of 2-10 Angstroms per second to deposit a top portion of the second protective layer on the bottom portion of the second protective layer to reduce process time and cost for the IAD process as compared to continuing the IAD process at the first deposition rate, wherein the second protective layer consists of Er 3 Al 5 O 12 , has an amorphous structure, has a thickness of less than or approximately 50 microns and seals a plurality of cracks and pores of the first protective layer; and
performing IAD to deposit a third protective layer on the second protective layer, wherein the third protective layer consists of Er 2 O 3 , has a crystalline or nano-crystalline structure and has a thickness of less than or approximately 50 microns.

16. The method of claim 15 , further comprising:
performing a plasma spraying process to deposit the first protective layer on the surface of the article, wherein the first protective layer has a thickness of greater than or approximately 50 microns.

17. The method of claim 15 , further comprising:
using oxygen ions to burn organic surface contamination from the first protective layer and disperse surface particles on the first protective layer prior to performing the IAD.

18. The method of claim 15 , wherein the second protective layer has a thickness of 0.5-7.0 microns.

Assignees

• Applied Materials Inc

Inventors

• Sun Jennifer Y
• Kanungo Biraja P
• Firouzdor Vahid

Classifications

• Y10T428/24942

  including components having same physical characteristic in differing degree · CPC title

• B32B2255/06

  on metal layer · CPC title

• C23C14/221 Primary

  Ion beam deposition (C23C14/46, C23C14/48 take precedence) · CPC title

• H01J37/32477

  characterised by the means for protecting vessels or internal parts, e.g. coatings · CPC title

• B32B2255/20

  Inorganic coating · CPC title