Structure for controlling flashover in MEMS devices

Patent metadata

Field	Value
Publication number	US-9969611-B1
Application number	US-201715829325-A
Country	US
Kind code	B1
Filing date	Dec 1, 2017
Priority date	Dec 1, 2017
Publication date	May 15, 2018
Grant date	May 15, 2018

Abstract

An improved microelectromechanical device includes an upper plate, a lower plate, and a spacing structure. The upper plate includes a first surface and an opposite second surface. The lower plate is spaced from the upper plate. The lower plate includes a third surface that faces the first surface of the upper plate and a fourth surface that is opposite of the third surface. The lower plate also includes a series of structures disposed with the third surface of the lower plate. The spacing structure is coupled to the upper and lower plate. The spacing structure includes a base portion that is sealed to the first surface of the upper plate and the third surface of the lower plate. The spacing structure further includes a protrusion that extends from the base portion between the upper and lower plates.

First claim

What is claimed:

1. A microelectromechanical device, comprising:
an upper plate with a first surface and opposite second surface;
a lower plate spaced from the upper plate, the lower plate comprising:
a third surface facing the first surface of the upper plate,
a fourth surface opposite of the third surface, and
a series of trenches disposed within the third surface; and

a spacing structure sealed annularly to the first surface of the upper plate and the third surface of the lower plate such that the upper plate, the lower plate, and the spacing structure define a space, the spacing structure having a base portion extending between the upper plate and the lower plate and a protruding portion that extends inwardly from the base portion into the space.

2. The microelectromechanical device of claim 1 , wherein a dielectric material covers the series of trenches and the spacing structure.

3. The microelectromechanical device of claim 1 , wherein the space is a vacuum.

4. The microelectromechanical device of claim 1 , wherein the protruding portion is spaced from the upper plate and the lower plate.

5. The microelectromechanical device of claim 4 , wherein the series of trenches are disposed under the protruding portion of the spacing structure.

6. The microelectromechanical device of claim 1 , wherein the first surface of the upper plate and the third surface of the lower plate are spaced apart a first length, and wherein the spacing structure, the protruding portion, and the series of trenches collectively form a continuous inner surface having a second length, the second length being at least six times larger than the first length.

7. The microelectromechanical device of claim 1 , wherein the protruding portion of the spacing structure may include a series of fins extending downwardly from the protruding portion.

8. The microelectromechanical device of claim 7 , wherein the fins taper in length along the protruding portion such that the fins disposed proximate to the base portion are longer in length than the fins disposed proximate a free end of the protruding portion that extends into the space.

9. The microelectromechanical device of claim 1 , wherein a phosphor screen is disposed on the third surface of the lower plate.

10. The microelectromechanical device of claim 1 , wherein the upper plate is a cathode and the lower plate is an anode.

11. A microelectromechanical device comprising:
an upper plate with a first surface and opposite second surface;
a lower plate spaced from the upper plate, the lower plate including a third surface facing the first surface of the upper plate, and a fourth surface opposite of the third surface; and
a spacing structure coupled to the upper plate and the lower plate, the spacing structure comprising:
a base portion sealed to the first surface of the upper plate and the third surface of the lower plate,
a protruding portion extending from the base portion between the upper plate and the lower plate,
a series of fins extending downwardly from the protruding portion, and
a series of trenches disposed between each of the fins.

12. The microelectromechanical device of claim 11 , wherein the spacing structure is sealed annularly to the upper and lower plates such that the upper plate, the lower plate, and the spacing structure collectively define a space that is evacuated.

13. The microelectromechanical device of claim 12 , wherein the protruding portion includes a free end that extends into the space.

14. The microelectromechanical device of claim 13 , wherein the fins taper in length along the protruding portion such that the fins disposed proximate to the base portion are longer in length than the fins disposed proximate the free end of the protruding portion.

15. The microelectromechanical device of claim 11 , wherein the protruding portion collectively forms a channel with the first surface of the upper plate, an upper triple junction being disposed within the channel.

16. The microelectromechanical device of claim 11 , wherein the first surface of the upper plate and the third surface of the lower plate are spaced apart by first length, and the base portion, the protruding portion, the series of fins, and the series of trenches collectively form a continuous inner surface having a second length that is at least six times longer than the first length.

17. A microelectromechanical device comprising:
an upper plate with a first surface and opposite second surface;
a lower plate spaced from the upper plate, the lower plate including a third surface facing the first surface of the upper plate, and a fourth surface opposite of the third surface; and
a spacing structure coupled to the upper plate and the lower plate, the spacing structure comprising:
a base portion sealed to the first surface of the upper plate and the third surface of the lower plate, and
a protruding portion extending from the base portion between the upper plate and the lower plate.

18. The microelectromechanical device of claim 17 , wherein a series of structures are disposed within the third surface of the lower plate such that the series of structures are disposed under the protruding portion of the spacing structure.

19. The microelectromechanical device of claim 18 , wherein the first surface of the upper plate and the third surface of the lower plate are spaced apart by first length, and the base portion, the protruding portion, and the series of structures collectively form a second length that is at least six times longer than the first length.

20. The microelectromechanical device of claim 18 , wherein a dielectric material covers the series of structures.

Assignees

• Eagle Tech Llc

Inventors

• Smith Arlynn W
• Chilcott Dan

Classifications

• H01J31/12 Primary

  with luminescent screen · CPC title

• H01J29/18

  Luminescent screens · CPC title

• H01J29/003

  Arrangements for eliminating unwanted electromagnetic effects, e.g. demagnetisation arrangements, shielding coils (H01J29/06, H01J29/867 take precedence; demagnetisation in general H01F13/00; circuit arrangements therefor H04N9/29; screening of apparatus against electric or magnetic fields H05K9/00) · CPC title

• B81B7/0064 Primary

  for protecting against electromagnetic or electrostatic interferences · CPC title

• B81B7/0038

  using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters · CPC title