Semiconductor structure including a varactor

Patent metadata

Field	Value
Publication number	US-9960284-B2
Application number	US-201514928595-A
Country	US
Kind code	B2
Filing date	Oct 30, 2015
Priority date	Oct 30, 2015
Publication date	May 1, 2018
Grant date	May 1, 2018

Abstract

A semiconductor structure includes a varactor and a field effect transistor. The varactor includes a body region that includes a semiconductor material and a first gate structure over the body region. The body region is doped to have a first conductivity type. The first gate structure includes a first gate insulation layer and a first work function adjustment metal layer. The field effect transistor includes a source region, a channel region, a drain region and a second gate structure over the channel region. The source region and the drain region are doped to have a second conductivity type that is opposite to the first conductivity type. The second gate structure includes a second gate insulation layer and a second work function adjustment metal layer. The first work function adjustment metal layer and the second work function adjustment metal layer include substantially the same metal.

First claim

What is claimed:

1. A semiconductor structure, comprising:
a varactor comprising a body region comprising a semiconductor material and a first gate structure over said body region, wherein said body region is doped to have a first conductivity type and wherein said first gate structure comprises a first gate insulation layer and a first work function adjustment metal layer over said first gate insulation layer; and
a field effect transistor comprising a source region, a channel region, a drain region and a second gate structure over said channel region, wherein said source region and said drain region are doped to have a second conductivity type opposite to said first conductivity type and wherein said second gate structure comprises a second gate insulation layer and a second work function adjustment metal layer over said second gate insulation layer;
wherein said first work function adjustment metal layer and said second work function adjustment metal layer comprise substantially the same metal.

2. The semiconductor structure of claim 1 , wherein said first gate structure further comprises a semiconductor layer over said first work function adjustment metal layer, wherein said semiconductor layer is doped to have said first conductivity type.

3. The semiconductor structure of claim 2 , wherein said varactor further comprises a first highly doped semiconductor region and a second highly doped semiconductor region adjacent said body region, wherein said first and said second highly doped semiconductor regions are doped to have said first conductivity type and have a higher dopant concentration than said body region.

4. The semiconductor structure of claim 3 , wherein said first highly doped semiconductor region and said second highly doped semiconductor region are contiguous with said body region directly below a sidewall of said first gate structure.

5. The semiconductor structure of claim 4 , wherein said first conductivity type is an N-type conductivity and said second conductivity type is a P-type conductivity.

6. The semiconductor structure of claim 5 , wherein said body region comprises silicon germanium.

7. The semiconductor structure of claim 5 , wherein each of said first work function adjustment metal and said second work function adjustment metal comprises at least one of aluminum and titanium nitride.

8. The semiconductor structure of claim 4 , wherein said first conductivity type is a P-type conductivity and said second conductivity type is an N-type conductivity.

9. The semiconductor structure of claim 8 , wherein each of said first work function adjustment metal and said second work function adjustment metal comprises at least one of lanthanum, lanthanum nitride and titanium nitride.

10. A varactor, comprising:
a body region comprising an N-doped semiconductor material;
a gate structure formed over said body region, said gate structure comprising a gate insulation layer and a work function adjustment metal layer over said gate insulation layer;
wherein said semiconductor material has an electron affinity and a bandgap;
wherein said work function adjustment metal layer comprises a metal having a work function; and
wherein an absolute value of a difference between said work function of said metal and a sum of said electron affinity and said bandgap of said semiconductor material is smaller than an absolute value of an energy difference between said work function of said metal and said electron affinity of said semiconductor material.

11. The varactor of claim 10 , wherein said semiconductor material comprises silicon and said work function of said metal is in a range from about 5.3 eV to about 4.7 eV.

12. The varactor of claim 10 , wherein said semiconductor material comprises at least one of silicon and silicon germanium and said metal comprises at least one of aluminum and titanium nitride.

13. A varactor, comprising:
a body region comprising a P-doped semiconductor material;
a gate structure formed over said body region, said gate structure comprising a gate insulation layer and a work function adjustment metal layer over said gate insulation layer;
wherein said semiconductor material has an electron affinity and a bandgap;
wherein said work function adjustment metal layer comprises a metal having a work function; and
wherein an absolute value of a difference between said work function of said metal and said electron affinity of said semiconductor material is smaller than an absolute value of a difference between said work function of said metal and a sum of said electron affinity and said bandgap of said semiconductor material.

14. The varactor of claim 13 , wherein said semiconductor material comprises silicon and said work function of said metal is in a range from about 4.4 eV to about 3.8 eV.

15. The varactor of claim 13 , wherein said semiconductor material comprises at least one of silicon and silicon germanium and said metal comprises at least one of lanthanum, lanthanum nitride and titanium nitride.

16. A device, comprising:
a body region comprising a silicon germanium layer, wherein said silicon germanium layer in said body region is doped to have a first conductivity type;
a gate insulation layer over said body region;
a gate electrode over said gate insulation layer, said gate electrode comprising a conductive work function metal layer over said gate insulation layer and a conductive material formed above said conductive work function metal layer; and
first and second highly doped semiconductor regions adjacent said body region, wherein said first and said second highly doped semiconductor regions are doped to have said first conductivity type and have a higher dopant concentration than said body region, said first and second highly doped semiconductor regions each have a first portion immediately adjacent said gate electrode and a second portion adjacent said first portion and having a first depth greater than a second depth of a lowermost portion of said first portion, and a third depth of said silicon germanium is greater than said second depth, and wherein said body region, said gate insulation layer, said gate electrode, and said first and second highly doped semiconductor regions define a varactor.

17. The device of claim 16 , wherein said gate insulation layer comprises a high-k material having a greater dielectric constant than silicon and said gate electrode comprises a metal.

18. The device of claim 16 , wherein a depth of said first and second highly doped semiconductor regions is greater than a depth of said silicon germanium layer in said body region.

19. The device of claim 18 , wherein said gate insulation layer and said gate electrode define a first gate structure, and said first highly doped semiconductor region and said second highly doped semiconductor region are contiguous with said body region directly below a sidewall of said first gate structure.

20. The device of claim 16 , wherein said first conductivity type comprises an N-type conductivity type.

21. The device of claim 16 , wherein said conductive material comprises a semiconductor material.

Assignees

• Globalfoundries Inc

Inventors

• Romanescu Alexandru
• Schippel Christian
• Sassiat Nicolas

Classifications

• H01L29/4966

  Electricity · mapped topic

• H01L29/66537

  Electricity · mapped topic

• H01L29/1095

  Electricity · mapped topic

• H01L27/0629

  Electricity · mapped topic

• H01L29/93 Primary

  Electricity · mapped topic