Arrangement for X-Ray tomography

Patent metadata

Field	Value
Publication number	US-9958403-B1
Application number	US-201715728252-A
Country	US
Kind code	B1
Filing date	Oct 9, 2017
Priority date	Oct 11, 2016
Publication date	May 1, 2018
Grant date	May 1, 2018

Abstract

A method of investigating a specimen using X-ray tomography, comprising (a) mounting the specimen to a specimen holder, (b) irradiating the specimen with a beam of X-rays along a first line of sight through the specimen, and (c) detecting a flux of X-rays transmitted through the specimen and forming a first image. Then (d) repeating the steps (b) and (c) for a series of different lines of sight through the specimen, thereby producing a corresponding series of images. The method further comprises (e) performing a mathematical reconstruction on said series of images, so as produce a tomogram of at least part of the specimen, wherein the specimen is disposed within a substantially cylindrical metallic shell with an associated cylindrical axis, the beam of X-rays is produced by directing a beam of charged particles onto a zone of said metallic shell, so as to produce a confined X-ray source at said zone, and the series of different lines of sight is achieved by rotating said shell about said cylindrical axis, thereby causing relative motion of said zone relative to the specimen.

First claim

We claim:

1. A method of investigating a specimen using X-ray tomography, comprising:
(a) mounting a specimen to a specimen holder;
(b) irradiating the specimen with a beam of X-rays along a first line of sight through the specimen;
(c) detecting a flux of X-rays transmitted through the specimen and forming a first image;
(d) repeating steps (b) and (c) for a series of different lines of sight through the specimen, thereby producing a corresponding series of images; and
(e) performing a mathematical reconstruction on the series of images, so as produce a tomogram of at least part of the specimen;
wherein the specimen is disposed within a substantially cylindrical metallic shell with an associated cylindrical axis and the beam of X-rays is produced by directing a beam of charged particles onto a zone of the metallic shell so as to produce a confined X-ray source at the zone; and
wherein the series of different lines of sight is achieved by rotating the metallic shell about the cylindrical axis, thereby causing relative motion of said zone relative to the specimen.

2. The method of claim 1 , wherein the metallic shell comprises a pre-existing cylindrical tube into which the specimen is inserted.

3. The method of claim 2 , wherein the specimen is disposed within the pre-existing cylindrical tube using a technique selected from the group comprising: (a) drawing a liquid containing the specimen into the tube, and sealing the liquid within the tube; (b) embedding the specimen within a body of matrix material within the tube wherein the matrix material is selected from the group comprising resins, gums, gels, pastes, thermosetting fluids, congealing fluids, and combinations thereof; (c) adhering part of the specimen to an adhesive layer on an inner surface of the tube; (d) wedging the specimen between opposed inner walls of the tube, and combinations thereof.

4. The method of claim 2 , wherein the metallic shell has an outer diameter less than 1.5 mm.

5. The method of claim 2 , wherein the metallic shell has an outer diameter less than 500 μm.

6. The method of claim 2 , wherein the metallic shell has an outer diameter in the range 50-150 μm.

7. The method of claim 1 , wherein the specimen is substantially cylindrical in form and wherein the metallic shell is deposited as a skin upon a cylindrical surface of the specimen.

8. The method of claim 7 , wherein the metallic shell has an outer diameter less than 500 μm.

9. The method of claim 7 , wherein the metallic shell has an outer diameter in the range 50-150 μm.

10. The method of claim 1 , wherein the metallic shell comprises a composite structure in which a metallic stratum overlies a sub-stratum of non-metallic material.

11. The method of claim 10 , wherein the sub-stratum comprises a material selected from the group comprising vitreous material, ceramic material, dielectric material, plastic material, carbon, and combinations thereof.

12. The method of claim 10 , wherein the metallic shell has an outer diameter less than 500 μm.

13. The method of claim 10 , wherein the metallic shell has an outer diameter in the range 50-150 μm.

14. The method of claim 1 , wherein the metallic shell has an outer diameter less than 1.5 mm.

15. The method of claim 1 , wherein the metallic shell has an outer diameter less than 500 μm.

16. The method of claim 1 , wherein the metallic shell has an outer diameter in the range 50-150 μm.

17. The method of claim 1 , wherein the step of rotating the metallic shell about the cylindrical axis further comprises moving the charged particle beam with respect to the metallic shell in a direction parallel to the cylindrical axis.

18. The method of claim 1 , wherein the rotation of the metallic shell is achieved by mounting the shell to a rotatable chuck having a jaw that closes upon and clamps an extremity of the shell such that the cylindrical axis coincides with a rotational axis of the chuck.

19. The method of claim 1 , wherein the charged particle beam is directed onto the metallic shell at a non-perpendicular angle.

20. The method of claim 1 , in which the metallic shell is patterned.

Assignees

• Fei Co

Inventors

• Stejskal Pavel
• Un{hacek over (c)}ovský Marek
• Vystav{Hacek Over (E)}L Tomá{Hacek Over (S)}
• De Jong Alan Frank
• Buijsse Bart
• Bleuet Pierre

Classifications

• G21K7/00

  Gamma- or X-ray microscopes · CPC title

• G01N23/046 Primary

  using tomography, e.g. computed tomography [CT] · CPC title

• G01N2223/401

  image processing · CPC title

• G01N2223/419

  computed tomograph · CPC title

• G01N2223/417

  recording with co-ordinate markings · CPC title