EUV light source for generating a usable output beam for a projection exposure apparatus

Patent metadata

Field	Value
Publication number	US-9955563-B2
Application number	US-201514636413-A
Country	US
Kind code	B2
Filing date	Mar 3, 2015
Priority date	Oct 31, 2012
Publication date	Apr 24, 2018
Grant date	Apr 24, 2018

Abstract

An EUV light source serves for generating a usable output beam of EUV illumination light for a projection exposure apparatus for projection lithography. The light source has an EUV generation device which generates an EUV raw output beam. The latter is circularly polarized. For the purposes of setting the polarization of the usable output beam and in respect of the polarization direction, a polarization setting device has a linearly polarizing effect on the raw output beam. This results in an EUV light source, which provides an improved output beam for a resolution-optimized illumination.

First claim

The invention claimed is:

1. An EUV light source, comprising:
an EUV generation device configured to generate a first beam of EUV light that is circularly polarized; and
a polarization setting device configured to have a linearly polarizing effect on the first beam of EUV light to provide a second beam of EUV light, wherein the polarization setting device comprises an EUV deflection mirror configured to operate in a region of a Brewster angle of incidence of the first beam on the deflection mirror.

2. The EUV light source of claim 1 , further comprising an electron beam supply device configured to provide an electron beam to the EUV generation device.

3. The EUV light source of claim 1 , wherein:
the EUV deflection mirror is rotatable about an axis that coincides with an axis of incidence of the first beam on the EUV deflection mirror so as to rotate a plane of incidence of the first beam on the EUV deflection mirror.

4. The EUV light source of claim 3 , wherein the polarization setting device comprises exactly three EUV deflection mirrors, and each of the three EUV deflection mirrors is in a region of a Brewster angle of incidence for the first beam.

5. The EUV light source of claim 3 , wherein:
the polarization setting device comprises a first EUV deflection mirror and a second EUV deflection mirror downstream of the first EUV deflection mirror; and
the polarization setting device is configured so that, after deflecting from the second EUV deflection mirror, the second beam propagates in the same direction as the first beam.

6. The EUV light source of claim 5 , wherein the polarization setting device does not include any EUV deflection mirrors in addition to the first and second EUV deflection mirrors.

7. The EUV light source of claim 1 , wherein:
the polarization setting device comprises a first EUV deflection mirror and a second EUV deflection mirror downstream of the first EUV deflection mirror; and
the polarization setting device is configured so that, after deflecting from the second EUV deflection mirror, the second beam propagates in the same direction as the first beam.

8. The EUV light source of claim 7 , wherein the polarization setting device does not include any EUV deflection mirrors in addition to the first and second EUV deflection mirrors.

9. The EUV light source of claim 1 , wherein:
the polarization setting device comprises first, second and third EUV deflection mirrors;
the third EUV deflection mirror is downstream of both the first and second EUV deflection mirrors; and
the polarization setting device is configured so that, after deflecting from the third EUV mirror, the second beam propagates along an axis of incidence of the first beam.

10. The EUV light source of claim 9 , wherein the polarization setting device does not include any EUV deflection mirrors in addition to the first, second and third EUV deflection mirrors.

11. The EUV light source of claim 1 , wherein the polarization setting device comprises an EUV deflection prism comprising two sides surfaces configured as mirror surfaces.

12. The EUV light source of claim 1 , wherein:
immediately upstream of the polarization setting device, the first beam propagates in a first direction; and
immediately downstream of the EUV polarization setting device, the second beam propagates in a second direction which is parallel to the first direction.

13. The EUV light source of claim 1 , wherein:
the EUV light source is configured so that the EUV light source is switchable between first and second modes;
in the first mode, the EUV light source provides the first beam; and
in the second mode, the EUV light source provides the second beam.

14. The EUV light source of claim 1 , wherein:
immediately upstream of the polarization setting device, the first beam propagates along an axis; and
immediately downstream of the EUV polarization setting device, the second beam propagates along the axis.

15. A system, comprising:
an EUV light source according to claim 1 ; and
an illumination optical unit,
wherein the EUV light source is configured to provide the second beam to the illumination optical unit, and the illumination optical unit is configured to illuminate an illumination field.

16. An apparatus, comprising:
an EUV light source according to claim 1 ; and
an illumination optical unit; and
a projection optical unit,
wherein the EUV light source is configured to provide the second beam to the illumination optical unit, the illumination optical unit is configured to illuminate an illumination field, and the projection optical unit is configured to image the illumination field into an image field.

17. A method of using an apparatus which comprises an EUV light source, an illumination optical unit and a projection optical unit, the method comprising:
using the light source to convert a first beam of EUV light to a second beam of EUV light, the light source being a light source according to claim 1 ;
using the illumination optical unit to illuminate at least a portion of a reticle in an illumination field; and
using the projection optical unit to image at least a portion of the illuminated reticle onto a light-sensitive material.

18. A system, comprising:
an EUV generation device configured to generate a first beam of EUV light that is circularly polarized; and
an illumination optical unit, comprising:
a polarization setting device configured to have a linearly polarizing effect on the first beam of EUV light to provide a second beam of EUV light,

wherein the EUV generation device is configured to provide the first beam to the illumination optical unit, the illumination optical unit is configured to illuminate an illumination field, the polarization setting device comprises an EUV deflection mirror configured to operate in a region of a Brewster angle of incidence of the first beam on the deflection mirror.

19. An apparatus, comprising:
the system of claim 18 ; and
a projection optical unit,
wherein the projection optical unit is configured to image the illumination field into an image field.

20. A method of using an apparatus which comprises an EUV light source, an illumination optical unit and a projection optical unit, the method comprising:
using the system according to claim 18 to illuminate a reticle with the second beam of EUV light; and

using the projection optical unit to image at least a portion of the reticle onto a light-sensitive material.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Saenger Ingo
• Maul Manfred
• Hennerkes Christoph
• Ruoff Johannes
• Kraehmer Daniel

Classifications

• G21K1/062

  Devices having a multilayer structure · CPC title

• G02B27/286 Primary

  for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another (G02B5/3083 takes precedence; light guide coupling means utilising polarising elements G02B6/34) · CPC title

• G03F7/70075 Primary

  Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection · CPC title

• G21K1/16

  using polarising devices, e.g. for obtaining a polarised beam {(ion sources, ion guns H01J27/02; polarised targets for producing nuclear reactions H05H6/005)} · CPC title

• G03F7/70308

  Optical correction elements, filters or phase plates for manipulating imaging light, e.g. intensity, wavelength, polarisation, phase or image shift · CPC title