Apparatus for coating a film in a container and method for coating the film

Patent metadata

Field	Value
Publication number	US-9953809-B2
Application number	US-201514972985-A
Country	US
Kind code	B2
Filing date	Dec 17, 2015
Priority date	Sep 2, 2015
Publication date	Apr 24, 2018
Grant date	Apr 24, 2018

Abstract

An apparatus for coating a film in a container and a method for coating a film are provided. The apparatus includes a cylindrical housing having a containing space penetrating through both ends thereof; a first arc-shaped electrode and a second arc-shaped electrode surrounding and covering an outer side of the cylindrical housing with a gap formed between the first and second arc-shaped electrodes such that the first arc-shaped electrode is free from electrically connected to the second arc-shaped electrode; a first conductive ring and a second conductive ring surrounding on the first and second arc-shaped electrodes, respectively; an upper supporting seat and a lower supporting seat disposed at the both ends of the cylindrical housing, respectively, to form a sealed environment for the containing space; and a valve component furnished at the upper supporting seat and inserted into the container for providing a processing gas in a film-coating process.

First claim

What is claimed is:

1. An apparatus for coating a film in a container, comprising:
a cylindrical housing having a containing space to contain the container, the containing space penetrating through both ends of the cylindrical housing;
a first arc-shaped electrode and a second arc-shaped electrode surrounding and covering an outer side of the cylindrical housing with a gap formed between the first arc-shaped electrode and the second arc-shaped electrode such that the first arc-shaped electrode is free from electrically connecting to the second arc-shaped electrode;
a first conductive ring fixed on the first arc-shaped electrode and a second conductive ring fixed on the second arc-shaped electrode, wherein the first conductive ring and the second conductive ring surround on the first arc-shaped electrode and the second arc-shaped electrode;
an upper supporting seat and a lower supporting seat disposed at the both ends of the cylindrical housing, respectively, to form a sealed environment for the containing space;
an RF power configured to electrify the first arc-shaped electrode,
a first fixture ring and a second fixture ring surrounding and fixed to the first arc-shaped electrode and the second arc-shaped electrode;
a belt pulley surrounding and fixed to the first fixture ring;
a motor connected to the belt pulley through a belt, such that the first arc-shaped electrode and the second arc-shaped electrode rotate simultaneously when the first fixture ring rotates; and
a valve component furnished at the upper supporting seat and inserted into the container for providing a processing gas in a film-coating process,
wherein the valve component comprises a gas duct protruding into the container, and the second arc-shaped electrode is connected to a ground to excite the processing gas to generate plasma between the first arc-shaped electrode and the second arc-shaped electrode, and coat the film on an inner wall of the container to obtain a coated container.

2. The apparatus of claim 1 , wherein the first arc-shaped electrode and the second arc-shaped electrode have a same arc-shaped length.

3. The apparatus of claim 1 , wherein the first arc-shaped electrode has an arc-shaped length greater than an arc-shaped length of the second arc-shaped electrode.

4. The apparatus of claim 1 , further comprising a radio frequency (RF) power supply and a ground electrode, the first conductive ring and the second conductive ring electrically connected to the RF power supply and the ground electrode, respectively.

5. The apparatus of claim 1 , wherein the motor is configured to operate at a minimum rotation speed for the first arc-shaped electrode and the second arc-shaped electrode to rotate one circle within plasma actually stimulating time.

6. The apparatus of claim 1 , further comprising an elevation device configured to drive the lower supporting seat to move upward and configured to push the container disposed on the lower supporting seat into the containing space of the cylindrical housing, such that the lower supporting seat is sealed to one end of the cylindrical housing.

7. The apparatus of claim 1 , further comprising a container fixture disposed in the containing space of the cylindrical housing and configured to fix the container, wherein the container fixture is made of an insulating material, and has an outer shape corresponding to a neck curve of the container to be received in the containing space.

8. The apparatus of claim 1 , wherein the valve component further comprises an exhaust pipe, and wherein the exhaust pipe is connected to a vacuum pump and configured to exhaust gas in the containing space to form a vacuum environment, and the gas duct provides the gas in the film-coating process.

9. The apparatus of claim 1 , wherein the cylindrical housing has an inner radius substantially equal to or slightly greater than an outer radius of the container to be received in the containing space.

10. The apparatus of claim 1 , wherein the cylindrical housing is made of a polymer material or quartz.

11. The apparatus of claim 1 , further comprising a housing configured to cover the cylindrical housing, the first arc-shaped electrode, the second arc-shaped electrode, the first conductive ring, the second conductive ring, the upper supporting seat, the lower supporting seat, and the valve component and to prevent from RF leaking during the film-coating process.

12. The apparatus of claim 11 , wherein the housing is made of a metal material or a conductive material.

13. The apparatus of claim 1 , further comprising a fixture plate, a plurality of first screw bolts, and a first seal washer, wherein the fixture plate is fixed to an upper end of the upper supporting seat through the plurality of the first screw bolts, and the first seal washer is disposed between the upper supporting seat and the fixture plate.

14. The apparatus of claim 13 , wherein the valve component comprises an extraction pipe having an outer screw thread corresponding to an inner threaded hole of the fixture plate.

15. The apparatus of claim 1 , further comprising a plurality of second screw bolts and a second seal washer, wherein a lower end of the upper supporting seat is fixed to the cylindrical housing through the plurality of the second screw bolts, and the second seal washer is disposed between the upper supporting seat and the cylindrical housing.

16. The apparatus of claim 1 , further comprising a first electric brush and a second electric brush connected to the first conductive ring and the second conductive ring, respectively.

Assignees

• Ind Tech Res Inst

Inventors

• Weng Chih-Chiang
• Tsai Chen-Der
• Wang Yu-Ming

Classifications

• H01J37/32834

  Exhausting · CPC title

• C23C16/26

  Deposition of carbon only · CPC title

• B65D25/14

  Linings or internal coatings (of containers made by folding or erecting blanks made of paper B65D5/56 {; linings for domestic water storage heaters F24H1/183}) · CPC title

• C23C16/507

  using external electrodes, e.g. in tunnel type reactors · CPC title

• H01J37/32467

  Material · CPC title