Double backplate MEMS microphone with a single-ended amplifier input port
US-9516415-B2 · Dec 6, 2016 · US
US9948250B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9948250-B2 |
| Application number | US-201514933068-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 5, 2015 |
| Priority date | Apr 4, 2012 |
| Publication date | Apr 17, 2018 |
| Grant date | Apr 17, 2018 |
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A sensor amplifier arrangement includes an amplifier having a signal input to receive a sensor signal and a signal output to provide an amplified sensor signal, and a feedback path that couples the signal output to the signal input and provides a feedback current that is an attenuated signal of the amplified sensor signal and is inverted with respect to the sensor signal.
Opening claim text (preview).
The invention claimed is: 1. A sensor amplifier arrangement comprising: an amplifier having a signal input to receive a sensor signal and a signal output to provide an amplified sensor signal, and a feedback path comprising an anti-parallel circuit of diodes and a capacitor having a first terminal connected to a cathode of a first diode of the anti-parallel circuit of diodes and to an anode of a second diode of the antiaparallel circuit of diodes, wherein a second terminal of the capacitor is connected to an anode of the first diode and a cathode of the second diode, and wherein the feedback path couples the signal output to the signal input and provides a feedback current that is an attenuated signal of the amplified sensor signal and is inverted with respect to the sensor signal, a capacitive sensor implemented as a micro-electro-mechanical system microphone, and a biasing voltage source connected to the signal input of the amplifier via the capacitive sensor, wherein the feedback path provides a low-pass characteristic, and the low-pass characteristic has a corner frequency that increases with a value of the amplified sensor signal. 2. The sensor amplifier arrangement according to claim 1 , wherein the amplifier and the feedback path are configured such that the amplified sensor signal is non-inverted with respect to the sensor signal and the feedback current is inverted with respect to the amplified sensor signal. 3. The sensor amplifier arrangement according to claim 1 , wherein the feedback path is configured such that the feedback current depends on the amplified sensor signal in a non-linear fashion. 4. The sensor amplifier arrangement according to claim 1 , wherein the feedback path is an analog circuit. 5. The sensor amplifier arrangement according to claim 1 , wherein the feedback path comprises a transconductance amplifier having an input coupled to the signal output and an output coupled to the anti-parallel circuit of diodes. 6. The sensor amplifier arrangement according to claim 5 , wherein the feedback path comprises an integration capacitor having a first terminal connected to the output of the transconductance amplifier. 7. The sensor amplifier arrangement according to claim 1 , wherein the feedback path comprises a feedback amplifier that couples the signal output to the anti-parallel circuit of diodes. 8. The sensor amplifier arrangement according to claim 7 , wherein the transconductance amplifier comprises an input stage and a current mirror having a current reduction factor. 9. A method of amplifying a sensor signal comprising: receiving a sensor signal at a signal input of an amplifier and providing a biasing voltage source connected to the signal input of the amplifier via a capacitive sensor, wherein the capacitive sensor is implemented as a micro-electro-mechanical system microphone, amplifying the sensor signal and providing an amplified sensor signal at a signal output of the amplifier, and feeding back a feedback current by a feedback path comprising an anti-parallel circuit of diodes and a capacitor having a first terminal connected to a cathode of a first diode of the anti-parallel circuit of diodes and to an anode of a second diode of the anti- parallel circuit of diodes, wherein a second terminal of the capacitor is connected to an anode of the first diode and a cathode of the second diode, and wherein the feedback path couples the signal output to the signal input such that the feedback current is an attenuated signal of the amplified sensor signal and is inverted with respect to the sensor signal, wherein the feedback path provides a low-pass characteristic, and the low-pass characteristic has a corner frequency that increases with a value of the amplified sensor signal. 10. The method according to claim 9 , wherein the amplified sensor signal is non-inverted with respect to the sensor signal and the feedback current is inverted with respect to the amplified sensor signal. 11. The method according to claim 9 , wherein the feedback current depends on the amplified sensor signal in a non-linear fashion. 12. The method according to claim 9 , wherein the feedback path provides a bootstrapping loop between the signal output and the signal input. 13. The method according to claim 9 , wherein the feedback path comprises a transconductance amplifier having an input coupled to the signal output and an output coupled to the anti-parallel circuit of diodes. 14. The method according to claim 9 , wherein the feedback path comprises a feedback amplifier having an input coupled to the signal output and an output coupled to the signal input via the anti-parallel circuit of diodes. 15. The method according to claim 9 , wherein the microphone generates the sensor signal and is coupled to the signal input of the amplifier. 16. A sensor amplifier arrangement comprising: an amplifier having a signal input to receive a sensor signal and a signal output to provide an amplified sensor signal, a feedback path comprising an integrator, a capacitor and an anti-parallel circuit of diodes and providing a feedback current that is an attenuated signal of the amplified sensor signal and is inverted with respect to the sensor signal, wherein the capacitor is arranged parallel to the anti-parallel circuit of diodes, and wherein an input of the integrator is coupled to an output side of the amplifier and an output of the integrator is coupled via the anti-parallel circuit of diodes to the signal input, a capacitive sensor implemented as a micro-electro-mechanical system microphone, and a biasing voltage source connected to the signal input of the amplifier via the capacitive sensor. 17. A sensor amplifier arrangement comprising: an amplifier having a signal input to receive a sensor signal and a signal output to provide an amplified sensor signal, a feedback path comprising a capacitor arranged parallel to an anti-parallel circuit of diodes that couples the signal output to the signal input and provides a feedback current that is an attenuated signal of the amplified sensor signal and is inverted with respect to the sensor signal, a capacitive sensor implemented as a micro-electro-mechanical system microphone, and a biasing voltage source connected to the signal input of the amplifier via the capacitive sensor.
in integrated circuits · CPC title
A diode being coupled in a feedback path of an amplifier stage, e.g. active or passive diode · CPC title
there being a feedback over the complete amplifier · CPC title
with semiconductor devices only · CPC title
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