High-Q amplified resonator

Patent metadata

Field	Value
Publication number	US-9948056-B2
Application number	US-201715407966-A
Country	US
Kind code	B2
Filing date	Jan 17, 2017
Priority date	Sep 22, 2016
Publication date	Apr 17, 2018
Grant date	Apr 17, 2018

Abstract

Ring resonators and methods of making and using the same are disclosed. In certain embodiments, a ring resonator may include a waveguide comprising a pump bus and a signal bus disposed adjacent a ring guide, the pump bus and signal bus configured to couple electromagnetic signals to and from ring guide, wherein at least a portion of the waveguide comprises erbium-doped silica and a cladding material disposed adjacent the waveguide, wherein the cladding material exhibits an index of refraction that is lower than an index of refraction of the waveguide, wherein the ring resonator exhibits a propagation loss of less than 2 dB/m.

First claim

What is claimed is:

1. A ring resonator comprising:
a waveguide comprising a pump bus and a signal bus disposed adjacent a ring guide, the pump bus and signal bus configured to couple electromagnetic signals to and from ring guide, wherein at least a portion of the waveguide comprises erbium-doped silica; and
a cladding material disposed adjacent the waveguide, wherein the cladding material exhibits an index of refraction that is lower than an index of refraction of the waveguide,
wherein the power coupling of κ 1 (λ s ), κ 2 (λ s ), and/or κ 1 (λ p ), κ 2 (λ p ) are configured such that the ring resonator exhibits a quality factor (Q) of greater than 10 5 for the signal and/or pump, where (λ p ) is a pump wavelength, (λ s ) is a signal wavelength, and (k 1 ) is a coupling coefficient of one of the signal bus and the pump bus and the ring guide, and where (k 2 ) is a pump coefficient of the other bus and the ring guide,
wherein the ring resonator exhibits a propagation loss of less than 2 dB/m.

2. The ring resonator of claim 1 , wherein the ring resonator exhibits a propagation loss of less than 1 dB/m.

3. The ring resonator of claim 1 , wherein the ring resonator exhibits a propagation loss of less than 0.02 dB/m.

4. The ring resonator of claim 1 , wherein the ring resonator exhibits a free spectral range (FSR) of greater than 10 GHz.

5. The ring resonator of claim 1 , wherein the ring resonator exhibits an extinction of greater than 30 dB.

6. The ring resonator of claim 1 , wherein pump bus and/or the signal bus is directionally coupled with the ring.

7. The ring resonator of claim 1 , further comprising a thermal film disposed adjacent the cladding layer, the thermal film configured to conduct thermal energy to effect a phase shift in the waveguide.

8. A method of using a ring resonator, the ring resonator comprising a waveguide comprising a pump bus and a signal bus disposed adjacent a ring guide, the pump bus and signal bus configured to couple electromagnetic signals to and from ring guide; and a cladding material disposed adjacent the waveguide, wherein the cladding material exhibits an index of refraction that is lower than an index of refraction of the waveguide, the method comprising:
configuring a pump wavelength (λ p ), a signal wavelength (λ s ), a coupling coefficient (k 1 ) of the signal bus and the ring and a pump coefficient (k 2 ) of the pump bus and the ring such that the net coupling loss and propagation loss in the ring of the signal (λ s ) are balanced upon application of pump (λ p ), achieving critical coupling as represented by:
K 1 =(α− g )+ K 2 ,

where K i (i=1, 2) is the power coupling coefficient, a is the propagation loss round trip in the ring, and g is the optical gain per round trip provided by the pump.

9. The method of claim 8 , wherein at least a portion of the waveguide comprises erbium-doped silica.

10. The method of claim 8 , wherein the ring resonator exhibits a quality factor (Q) of greater than 10 5 .

11. The method of claim 8 , further comprising adjusting a ratio of k 1 (λ s ) and k 2 (λ s ) to modify an extinction of the ring resonator.

12. The method of claim 11 , wherein the ring resonator exhibits an extinction of greater than 30 dB.

13. The method of claim 8 , wherein the ring resonator exhibits a propagation loss of less than 2 dB/m.

14. The method of claim 8 , wherein the ring resonator exhibits a propagation loss of less than 0.02 dB/m.

15. The method of claim 8 , wherein the ring resonator exhibits a free spectral range (FSR) of greater than 10 GHz.

16. A method of manufacturing a ring resonator, the method comprising:
disposing an erbium-doped glass film on a base wafer;
forming a waveguide from the erbium-doped glass film using one or more of contact lithography and etching, wherein the waveguide comprises a pump bus and a signal bus disposed adjacent a ring guide, the pump bus and signal bus configured to couple electromagnetic signals to and from ring guide;
disposing a cladding layer adjacent the waveguide, wherein the cladding material exhibits an index of refraction that is lower than an index of refraction of the waveguide,
wherein the power coupling of κ 1 (λ s ), κ 2 (λ s ), and/or κ 1 (λ p ), κ 2 (λ p ) are configured such that the ring resonator exhibits a quality factor (Q) of greater than 10 5 for the signal and/or pump, where (λ p ) is a pump wavelength, (λ s ) is a signal wavelength, and (k 1 ) is a coupling coefficient of one of the signal bus and the pump bus and the ring guide, and where (k 2 ) is a pump coefficient of the other bus and the ring guide,
wherein the ring resonator exhibits a propagation loss of less than 2 dB/m.

17. The method of claim 16 , wherein the erbium-doped glass film is disposed on the base wafer using Plasma Enhanced Chemical Vapor Deposition (PECVD).

18. The method of claim 16 , wherein the cladding layer is disposed adjacent the waveguide using a LPCVD (Low Pressure CVD).

19. The method of claim 16 , further comprising disposing a thermal film adjacent the cladding layer, wherein the thermal film is configured to conduct thermal energy to effect a phase shift in the waveguide.

Assignees

• LGS Innovations LLC

Inventors

• Kang Inuk

Classifications

• H01S3/1608

  erbium · CPC title

• G02B6/12007

  forming wavelength selective elements, e.g. multiplexer, demultiplexer · CPC title

• H01S3/0637 Primary

  Integrated lateral waveguide, e.g. the active waveguide is integrated on a substrate made by Si on insulator technology (Si/SiO2) · CPC title

• H01S3/10084

  Frequency control by seeding · CPC title

• G02B6/29338

  Loop resonators · CPC title