Vacuum container of laser oscillator

Patent metadata

Field	Value
Publication number	US-9948054-B2
Application number	US-201615229533-A
Country	US
Kind code	B2
Filing date	Aug 5, 2016
Priority date	Aug 12, 2015
Publication date	Apr 17, 2018
Grant date	Apr 17, 2018

Abstract

A vacuum container of a laser oscillator includes a first sealing member and a second sealing member that are disposed between a tube and an insertion member. The first sealing member is made of a material having a corrosion resistance higher than the second sealing member, the first sealing member is disposed on a vacuum side relative to the second sealing member, the second sealing member is made of a material having a sealing property higher than the first sealing member, and the first sealing member at least partially includes a deformation portion that deforms in such a manner as to enhance a sealing property thereof.

First claim

The invention claimed is:

1. A vacuum container of a laser oscillator, the vacuum container comprising:
a tube having a cylindrical shape or a polygonal cylindrical shape;
an insertion member into which the tube is inserted; and
a first sealing member and a second sealing member that are disposed between the tube and the insertion member,
wherein the first sealing member is made of a material having a corrosion resistance higher than the second sealing member,
the first sealing member is disposed on a vacuum side relative to the second sealing member,
the second sealing member is made of a material having a sealing property higher than the first sealing member, and
the first sealing member at least partially includes a deformation portion that deforms in such a manner as to enhance a sealing property thereof,
wherein the deformation portion is deformed due to reduction of a pressure around the first sealing member.

2. The vacuum container of the laser oscillator according to claim 1 , wherein the deformation portion holds the first sealing member while a sealing property thereof is enhanced.

3. The vacuum container of the laser oscillator according to claim 1 , wherein the deformation portion is a shape memory metal or a shape memory resin that is contained in the first sealing member.

4. The vacuum container of the laser oscillator according to claim 1 , wherein the deformation portion contains a volatile component and is disposed in a cutout of the first sealing member, and the deformation portion is deformed due to volatilization of the volatile component.

5. The vacuum container of the laser oscillator according to claim 1 , wherein a part of the first sealing member is held between the second sealing member and the insertion member.

6. The vacuum container of the laser oscillator according to claim 1 , wherein at least a part of the first sealing member is made of a fluorine resin.

Assignees

• Fanuc Corp

Inventors

• Sato Takanori
• Takazane Tetsuhisa

Classifications

• H01S3/036

  Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube {(H01S3/031 takes precedence)} · CPC title

• H01S3/2232

  Carbon dioxide (CO2) or monoxide [CO] · CPC title

• H01S3/09705 Primary

  with particular means for stabilising the discharge · CPC title

• H01S3/03 Primary

  of gas laser discharge tubes · CPC title