Gas laser device and control method therefor

Patent metadata

Field	Value
Publication number	US-9853410-B2
Application number	US-201615240162-A
Country	US
Kind code	B2
Filing date	Aug 18, 2016
Priority date	Mar 18, 2014
Publication date	Dec 26, 2017
Grant date	Dec 26, 2017

Abstract

A gas laser apparatus includes a chamber containing a laser gas, a pair of electrodes disposed within the chamber, a fan disposed within the chamber, a motor connected to a rotating shaft of the fan, and a rotating speed control unit configured to control a rotating speed of the fan based on a wear-out parameter of the pair of electrodes.

First claim

The invention claimed is:

1. A gas laser apparatus comprising:
a chamber containing a laser gas;
a pair of electrodes disposed within the chamber;
a fan disposed within the chamber;
a motor connected to a rotating shaft of the fan; and
a rotating speed control unit configured to control a rotating speed of the fan based on a wear-out parameter of the pair of electrodes to increase the rotating speed as the pair of electrodes wear out.

2. The gas laser apparatus according to claim 1 , further comprising an electrode moving mechanism configured to move a first one of the pair of electrodes toward a second one of the pair of electrodes,
wherein the rotating speed control unit controls the rotating speed of the fan based on the wear-out parameter of the pair of electrodes and an amount of movement of the first one of the pair of electrodes by the electrode moving mechanism.

3. The gas laser apparatus according to claim 1 , further comprising a distance measurement unit configured to measure a distance between the pair of electrodes,
wherein the wear-out parameter includes the distance between the pair of electrodes, and
a degree of wearing out of the pair of electrodes is determined by the distance between the pair of electrodes.

4. The gas laser apparatus according to claim 1 , wherein the wear-out parameter includes a total number indicating how many pulses of a pulse voltage have been supplied between the pair of electrodes since the pair of electrodes were installed within the chamber, and
a degree of wearing out of the pair of electrodes is determined by the total number indicating how many pulses of a pulse voltage have been supplied.

5. The gas laser apparatus according to claim 1 , wherein the wear-out parameter includes an integrated value of input energy having been inputted between the pair of electrodes since the pair of electrodes were installed within the chamber, and
a degree of wearing out of the pair of electrodes is determined by the integrated value of input energy.

6. The gas laser apparatus according to claim 1 , wherein the wear-out parameter includes a stability of pulse energy of a laser beam that is outputted from the chamber, and
a degree of wearing out of the pair of electrodes is determined by the stability of pulse energy.

7. The gas laser apparatus according to claim 1 , wherein the wear-out parameter includes a proximity with a target value of pulse energy of the laser beam that is outputted from the chamber, and
a degree of wearing out of the pair of electrodes is determined by the proximity with the target value.

8. The gas laser apparatus according to claim 1 , wherein the wear-out parameter includes a pressure of the laser gas in the chamber, and
a degree of wearing out of the pair of electrodes is determined by the pressure of the laser gas in the chamber.

9. The gas laser apparatus according to claim 1 , wherein the wear-out parameter includes a charging voltage of a charger configured to supply a pulse voltage between the pair of electrodes, and
a degree of wearing out of the pair of electrodes is determined by the charging voltage of the charger.

10. The gas laser apparatus according to claim 1 , wherein the rotating speed control unit sets a target value of the rotating speed substantially proportional to the wear-out parameter.

11. The gas laser apparatus according to claim 1 , wherein
the wear-out parameter increases as the pair of electrodes wear-out, and
the rotating speed control unit sets a target value of the rotating speed calculated using a function whose derivative value becomes larger as the wear-out parameter becomes larger.

12. The gas laser apparatus according to claim 1 , wherein the rotating speed control unit sets a first target value of the rotating speed when the wear-out parameter is in a first range and sets a second target value of the rotating speed greater than the first target value when the wear-out parameter is in a second range higher than the first range.

13. A gas laser apparatus comprising:
a chamber containing a laser gas;
a pair of electrodes disposed within the chamber;
a fan disposed within the chamber;
a motor connected to a rotating shaft of the fan;
an electrode moving mechanism configured to move a first one of the pair of electrodes toward a second one of the pair of electrodes; and
a rotating speed control unit configured to control a rotating speed of the fan based on a distance between the pair of electrodes calculated after the first one of the pair or electrodes is moved by the electrode moving mechanism to increase the rotating speed as the distance between the pair of electrodes increases.

14. A method for controlling a gas laser apparatus, the gas laser apparatus including a chamber containing a laser gas, a pair of electrodes disposed within the chamber, a fan disposed within the chamber, and a motor connected to a rotating shaft of the fan,
the method comprising:
calculating a distance between the pair of electrodes based on a wear-out parameter of the pair of electrodes; and
controlling a rotating speed of the fan based on the distance between the pair of electrodes to increase the rotating speed as the distance between the pair of electrodes increases.

Assignees

• Gigaphoton Inc

Inventors

• Asayama Takeshi
• Tsushima Hiroaki
• Kakizaki Kouji
• Wakabayashi Osamu

Classifications

• H01S3/0014

  Monitoring arrangements not otherwise provided for (photometry G01J1/00, e.g. G01J1/4257; radiation pyrometry G01J5/00; measuring coherence of light G01J9/00; measuring wavelength of light G01J9/00, e.g. G01J9/0246; measuring optical pulses G01J11/00; calorimetrically measuring power of laser beams G01K17/003) · CPC title

• H01S3/036

  Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube {(H01S3/031 takes precedence)} · CPC title

• H01S3/0971

  transversely excited (H01S3/0975 takes precedence) · CPC title

• H01S3/09705

  with particular means for stabilising the discharge · CPC title

• H01S3/225

  comprising an excimer or exciplex · CPC title