Rotation rate sensor and a method for operating a rotation rate sensor

Patent metadata

Field	Value
Publication number	US-9945669-B2
Application number	US-201414890559-A
Country	US
Kind code	B2
Filing date	May 5, 2014
Priority date	May 14, 2013
Publication date	Apr 17, 2018
Grant date	Apr 17, 2018

Abstract

A rotation rate sensor for detecting a rotational movement of the rotation rate sensor about a rotational axis extending within a drive plane of the rotation rate sensor include: a first rotational element, a second rotational element and a drive structure moveable in parallel to the drive plane, the first rotational element being drivable about a first center of rotation to achieve a first rotational vibration in parallel to the drive plane, the second rotational element being drivable about a second center of rotation to achieve a second rotational vibration in parallel to the drive plane, the drive structure being (i) coupled to the first and second rotational elements, and (ii) configured to generate a drive mode in phase opposition of the first and second rotational vibrations.

First claim

What is claimed is:

1. A rotation rate sensor for detecting a rotational movement of the rotation rate sensor about a rotational axis extending within a drive plane of the rotation rate sensor, comprising:
a first rotational element;
a second rotational element; and
a drive structure moveable in parallel to the drive plane;
wherein the first rotational element is driven about a first center of rotation to achieve a first rotational vibration in parallel to the drive plane, the second rotational element is driven about a second center of rotation to achieve a second rotational vibration in parallel to the drive plane, the drive structure is coupled to the first rotational element and to the second rotational element, and the drive structure is configured to generate a drive mode in phase opposition of the first rotational vibration and the second rotational vibration; and
wherein the drive structure is:
(i) situated linearly moveably along a drive direction;
(ii) configured as a drive frame at least partially surrounding the first rotational element and the second rotational element;
(iii) coupled to the first rotational element and the second rotational element in such a way that the first rotational element and the second rotational element are driven in the opposite direction of one another with the aid of a linear movement of the drive structure along the drive direction.

2. A rotation rate sensor for detecting a rotational movement of the rotation rate sensor about a rotational axis extending within a drive plane of the rotation rate sensor, comprising:
a first rotational element;
a second rotational element; and
a drive structure moveable in parallel to the drive plane;
wherein the first rotational element is driven about a first center of rotation to achieve a first rotational vibration in parallel to the drive plane, the second rotational element is driven about a second center of rotation to achieve a second rotational vibration in parallel to the drive plane, the drive structure is coupled to the first rotational element and to the second rotational element, and the drive structure is configured to generate a drive mode in phase opposition of the first rotational vibration and the second rotational vibration; and
wherein the first rotational element and the second rotational element are coupled to one another via a rocker structure having a rocker rotational axis situated in parallel to the rotational axis.

3. The rotation rate sensor as recited in claim 2 , wherein the first rotational element and the second rotational element are coupled to one another via only one substrate of at least one of the rotation rate sensor, the drive structure, and the rocker structure.

4. The rotation rate sensor as recited in claim 2 , wherein one of (i) the drive direction of the drive structure is situated in parallel to the rotational axis, or (ii) the drive direction includes a crown angle to the rotational axis, the crown angle being between 0 degree and 90 degrees starting from the rotational axis in the direction of the drive direction.

5. A rotation rate sensor system, comprising:
at least two rotation rate sensors, wherein each of the two rotation rate sensors is configured for detecting a rotational movement of the rotation rate sensor about a rotational axis extending within a drive plane of the rotation rate sensor, and wherein each of the two rotation rate sensor includes:
a first rotational element;
a second rotational element; and
a drive structure moveable in parallel to the drive plane;
wherein the first rotational element is driven about a first center of rotation to achieve a first rotational vibration in parallel to the drive plane, the second rotational element is driven about a second center of rotation to achieve a second rotational vibration in parallel to the drive plane, the drive structure is coupled to the first rotational element and to the second rotational element, and the drive structure is configured to generate a drive mode in phase opposition of the first rotational vibration and the second rotational vibration;

wherein the rotation rate sensor system is configured for detecting at least two rotation rates about at least two different rotational axes, and wherein the drive structures of the at least two rotation rate sensors are coupled to one another.

6. A method for operating a rotation rate sensor for detecting a rotational movement of the rotation rate sensor about a rotational axis, the rotational axis being situated within a drive plane of the rotation rate sensor, the method comprising:
coupling a drive structure to a first rotational element and to a second rotational element; and
moving the drive structure in parallel to the drive plane, wherein the first rotational element is driven about a first center of rotation to achieve a first rotational vibration in parallel to the drive plane, and the second rotational element is driven about a second center of rotation to achieve a second rotational vibration in parallel to the drive plane;
wherein a drive mode in phase opposition of the first rotational vibration and the second rotational vibration is generated with the aid of the drive structure; and
wherein the drive structure is moved linearly along a drive direction to generate the drive mode in phase opposition of the first rotational vibration and the second rotational vibration.

7. The method as recited in claim 6 , wherein a recess for anchoring to a substrate of the rotation rate sensor is situated on the first rotational element in the area of the first center of rotation, and a recess for anchoring to a substrate of the rotation rate sensor is situated on the second rotational element in the area of the second center of rotation.

8. The method as recited in claim 6 , wherein the first rotational element and the second rotational element are coupled to one another via a rocker structure having a rocker rotational axis situated in parallel to the rotational axis, and wherein a detection mode in phase opposition of a first detection vibration of the first rotational element and a second detection vibration of the second rotational element is generated with the aid of the rocker structure.

9. The method as recited in claim 6 , wherein the first rotational element and the second rotational element are coupled to one another via only one substrate of at least one of the rotation rate sensor, the drive structure, and the rocker structure.

Assignees

• Bosch Gmbh Robert

Inventors

• Balslink Thorsten
• Scheben Rolf
• Schmidt Benjamin
• Ameling Ralf
• Hattass Mirko
• Kuhlmann Burkhard
• Maul Robert

Classifications

• G01C19/5712 Primary

  the devices involving a micromechanical structure · CPC title