Micro/nano multiaxial inertial sensor of movements

Patent metadata

Field	Value
Publication number	US-9176166-B2
Application number	US-201213722427-A
Country	US
Kind code	B2
Filing date	Dec 20, 2012
Priority date	Dec 22, 2011
Publication date	Nov 3, 2015
Grant date	Nov 3, 2015

Abstract

The multiaxial inertial sensor of movements is a micro/nano sensor that makes it possible to couple at least one accelerometer with other structures, either accelerometers or gyroscopes, by an oscillating disk structure. The oscillating disk also forms an inertial sensor such as a gyrometer. This single-chip structure associating both gyroscopes and accelerometers makes it possible to achieve detections and measurements in up to 6 axes, in other words 3 accelerometer axes and 3 gyroscope axes, and to exert control by a single and unique electronic unit, thus permitting a single automatic control loop in excitation and a single electronic reading chip.
Application to technologies known as MEMS.

First claim

The invention claimed is:

1. A multiaxial inertial sensor of movements, comprising:
a first sensor;
a second sensor;
a coupling structure coupled in rotation around a Z axis and configured to induce transmission of movement between, respectively:
the first sensor with a first excitation mass having a first degree of freedom in translation along a first excitation axis in a plane XY perpendicular to the Z axis, and
the second sensor with a second excitation mass having a sec…

Assignees

• Commissariat Energie Atomique
• Commissariat Energie Atomique

Inventors

• Walther Arnaud

Classifications

• G01C19/5712 Primary

  Physics · mapped topic

• G01P15/18

  Physics · mapped topic

• G01P15/123

  Physics · mapped topic

• G01P15/097

  Physics · mapped topic

• G01P15/14 Primary

  Physics · mapped topic