Semiconductor substrate treatment liquid, treatment method, and method for manufacturing semiconductor-substrate product using these
US-2016254139-A1 · Sep 1, 2016 · US
US9944889B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9944889-B2 |
| Application number | US-201715403355-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 11, 2017 |
| Priority date | Oct 26, 2012 |
| Publication date | Apr 17, 2018 |
| Grant date | Apr 17, 2018 |
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Caustic-free detergent compositions are provided. Detergent compositions including an aminocarboxylate, water conditioning agent, non-caustic source of alkalinity and water beneficially do not require the use of additional surfactants and/or polymers to provide suitable detergency and prevent scale build-up on treated surfaces. The detergent compositions are used with a sanitizer to employ the caustic-free detergent compositions are particularly suitable for use as low temperature ware wash detergents that beneficially reduce scale build-up. Methods of employing the caustic-free detergent compositions are also provided.
Opening claim text (preview).
What is claimed is: 1. A method of cleaning using a caustic-free ware wash detergent comprising: providing a caustic-free alkaline detergent use composition, wherein the composition comprises from about 1 ppm to about 250 aminocarboxylate, from about 1 ppm to about 250 water conditioning polymer, from about 1 ppm to about 250 sequestrant, from about 10 ppm to about 1,000 non-caustic alkalinity source, and water, wherein the composition is caustic-free, does not contain surfactants and reduces or eliminates scale build-up on said surfaces; washing a surface or article with the detergent use composition having a pH between about 8 and about 11.5; employing a sanitizer with the detergent wash solution or a sanitizer formulated in the caustic-free alkaline detergent; employing a rinse aid; wherein the temperature of the detergent use solution in the washing step is not heated above about 140° F., and wherein the detergent use solution contains sufficient use levels of the aminocarboxylate, water conditioning agent and sequestrant to prevent the formation of precipitates in hard water sources. 2. The method of claim 1 , wherein the method further comprises rinsing said surface with an initial rinse solution prior to washing with said detergent use solution. 3. The method of claim 1 , wherein the aminocarboxylate is methylglycinediacetic acid or a sodium salt of the methylglycinediacetic acid. 4. The method of claim 1 , wherein the water conditioning polymer is a polycarboxylic acid, and wherein the sequestrant is a 2-phosphonobutane-1,2,4-tricarboxylic acid. 5. The method of claim 1 , further comprising rinsing said surface with a rinse solution. 6. The method of claim 1 , further comprising first diluting a concentrated caustic-free alkaline detergent comprising from about 0.1-15 wt-% of an aminocarboxylate, from about 0.1-15 wt-% of a water conditioning polymer, from about 0.1-15 wt-% of a sequestrant, from about 10-60 wt-% of a non-caustic alkalinity source, and from about 20-80 wt-% of water to form said use solution, wherein the concentrated detergent is diluted at a dilution ratio of between about 1:10 to about 1:10,000. 7. The method of claim 1 , wherein said caustic-free alkaline detergent use composition further comprises an additional sequestrant, wherein said additional sequestrant is a phosphonic acid. 8. The method claim 7 , wherein the phosphonic acid comprises 1-diphosphonic acid, CH2C(OH)[PO(OH)2]2; aminotri(methylenephosphonic acid), N[CH2 PO(OH)2]3; aminotri(methylenephosphonate), sodium salt (ATMP), N[CH2PO(ONa)2]3; 2-hydroxyethyliminobis(methylenephosphonic acid), HOCH2CH2N[CH2PO(OH)2]2; diethylenetriaminepenta(methylenephosphonic acid), (HO)2POCH2N[CH2N[CH2 PO(OH)2]2]2; diethylenetriaminepenta(methylenephosphonate), sodium salt (DTPMP), C9H(28-x) N3 NaxO15P5 (x=7); hexamethylenediamine(tetramethylenephosphonate), potassium salt, C10H (28-x) N2Kx O12P4 (x=6); bis(hexamethylene)triamine(pentamethylenephosphonic acid), or combinations thereof. 9. The method of claim 1 , wherein the non-caustic alkalinity source comprises alkali metal silicate, metasilicate, or combinations thereof. 10. The method of claim 1 , wherein said caustic-free alkaline detergent use composition further comprises at least one additional functional ingredient, and wherein the additional functional ingredient is a defoaming agent, anti-redeposition agent, bleaching agent, solubility modifier, dispersant, rinse aid, metal protecting agent, stabilizing agent, sequestrant, corrosion inhibitor, sanitizing agent or antimicrobial agent, additional sequestrant or chelating agent, fragrance, dye, rheology modifier or thickener, hydrotrope or coupler, buffer, solvent, and combinations thereof. 11. A method of cleaning using a caustic-free ware wash detergent comprising: providing a concentrated caustic-free alkaline detergent composition, wherein the composition comprises an aminocarboxylate, a water conditioning polymer, a sequestrant, a non-caustic alkalinity source, and water, wherein the composition is caustic-free, does not contain surfactants and reduces or eliminates scale build-up on said surfaces; diluting said concentrated detergent composition to form a detergent use composition; washing a surface or article with the detergent use composition having a pH between about 8 and about 11.5; employing a sanitizer with the detergent wash solution or a sanitizer formulated in the caustic-free alkaline detergent; employing a rinse aid; wherein the temperature of the detergent use solution in the washing step is not heated above about 140° F., and wherein the detergent use solution contains sufficient use levels of the aminocarboxylate, water conditioning agent and sequestrant to prevent the formation of precipitates in hard water sources. 12. The method of claim 11 , wherein said concentrated caustic-free alkaline detergent composition comprises from about 0.1-15 wt-% of an aminocarboxylate, from about 0.1-15 wt-% of a water conditioning polymer, from about 0.1-15 wt-% of a sequestrant, from about 10-60 wt-% of a non-caustic alkalinity source, and from about 20-80 wt-% of water. 13. The method of claim 11 , wherein the aminocarboxylate is methylglycinediactic acid or a sodium salt of the methylglycinediacetic acid. 14. The method of claim 11 , wherein the water conditioning polymer is a polycarboxylic acid, and wherein the sequestrant is a 2-phosphonobutane-1,2,4-tricarboxylic acid. 15. The method of claim 11 , further comprising rinsing said surface with a rinse solution. 16. The method of claim 11 , wherein the concentrated detergent is diluted at a dilution ratio of between about 1:10 to about 1:10,000. 17. The method of claim 11 , wherein the concentrated caustic-free alkaline detergent composition further comprises an additional sequestrant, wherein said additional sequestrant is a phosphonic acid. 18. The method claim 17 , wherein the phosphonic acid comprises 1-diphosphonic acid, CH2C(OH)[PO(OH)2]2; aminotri(methylenephosphonic acid), N[CH2 PO(OH)2]3; aminotri(methylenephosphonate), sodium salt (ATMP), N[CH2PO(ONa)2]3; 2-hydroxyethyliminobis(methylenephosphonic acid), HOCH2CH2N[CH2PO(OH)2]2; diethylenetriaminepenta(methylenephosphonic acid), (HO)2POCH2N[CH2N[CH2 PO(OH)2]2]2; diethylenetriaminepenta(methylenephosphonate), sodium salt (DTPMP), C9H(28-x) N3 NaxO15P5 (x=7); hexamethylenediamine(tetramethylenephosphonate), potassium salt, C10H (28-x) N2Kx O12P4 (x=6); bis(hexamethylene)triamine(pentamethylenephosphonic acid), or combinations thereof. 19. The method of claim 11 , wherein the non-caustic alkalinity source comprises alkali metal silicate, metasilicate, or combinations thereof. 20. The method of claim 11 , wherein said concentrated caustic-free alkaline detergent composition further comprises at least one additional functional ingredient, and wherein the additional functional ingredient is defoaming agent, anti-redeposition agent, bleaching agent, solubility modifier, dispersant, rinse aid, metal protecting agent, stabilizing agent, sequestrant, corrosion inhibitor, sanitizing agent or antimicrobial agent, additional sequestrant or chelating agent, fragrance, dye, rheology modifier or thickener, hydrotrope or coupler, buffer, solvent, and combinations thereof.
Phosphates including polyphosphates · CPC title
containing phosphorus · CPC title
Aminoacids · CPC title
Carboxylic acids or salts thereof · CPC title
Hydroxides · CPC title
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