Ion source cathode shield

Patent metadata

Field	Value
Publication number	US-9941087-B2
Application number	US-201715410711-A
Country	US
Kind code	B2
Filing date	Jan 19, 2017
Priority date	Jan 19, 2016
Publication date	Apr 10, 2018
Grant date	Apr 10, 2018

Abstract

An ion source has an arc chamber having an arc chamber body. An electrode extends into an interior region of the arc chamber body, and a cathode shield has a body that is cylindrical having an axial hole. The axial hole is configured to pass the electrode therethrough. First and second ends of the body have respective first and second gas conductance limiters. The first gas conductance limiter extends from an outer diameter of the body and has a U-shaped lip. The second gas conductance limiter has a recess for a seal to protect the seal from corrosive gases and maintain an integrity of the seal. A gas source introduces a gas to the arc chamber body. A liner has an opening configured to pass the cathode shield therethrough, where the liner has a recess. A gap is defined between the U-shaped lip and the liner, wherein the U-shaped lip reduces a conductance of gas into the gap and the recess further reduces conductance of gas into the region.

First claim

The invention claimed is:

1. A cathode shield for an ion source, the cathode shield comprising:
a body, wherein the body is generally cylindrical and has an axial hole defined therethrough, wherein the axial hole is configured to pass an electrode therethrough;
a first gas conductance limiter associated with a first end of the body, wherein the first gas conductance limiter extends radially outward from a first outer diameter of the body, wherein the first gas conductance limiter comprises a U-shaped lip extending axially from the first end of the body toward a second end of the body; and
a second gas conductance limiter associated with the second end of the body, wherein the second gas conductance limiter extends radially inward from the first outer diameter of the body, and wherein the second gas conductance limiter has a surface configured to accept a seal, wherein the surface is configured to generally surround at least a portion of the seal.

2. The cathode shield of claim 1 , wherein the U-shaped lip is configured to mate to a recess in a liner of the ion source, wherein a gap is defined between the U-shaped lip and the liner, and wherein the U-shaped lip substantially reduces a conductance of gas into the gap.

3. The cathode shield of claim 2 , wherein the gap is further defined between the cathode shield and a hole in an arc chamber body.

4. The cathode shield of claim 1 , wherein the second gas conductance limiter comprises a labyrinth seal generally defined by a second outer diameter of the body, wherein the seal comprises a boron nitride seal, and wherein the labyrinth seal is configured to accept the boron nitride seal.

5. The cathode shield of claim 4 , wherein the labyrinth seal generally protects a sealing surface associated with the boron nitride seal from corrosive gases associated with the ion source by reducing a gas conductance of the corrosive gases into an area associated with the labyrinth seal.

6. An arc chamber for an ion source, the arc chamber, comprising:
an arc chamber body;
an electrode extending into an interior region of the arc chamber body;
a cathode shield comprising:
a body, wherein the body is generally cylindrical and has an axial hole defined therethrough, wherein the axial hole is configured to pass the electrode therethrough;
a first gas conductance limiter associated with a first end of the body, wherein the first gas conductance limiter extends radially outward from a first outer diameter of the body, wherein the first gas conductance limiter comprises a U-shaped lip extending axially from the first end of the body toward a second end of the body; and
a second gas conductance limiter associated with the second end of the body, wherein the second gas conductance limiter extends radially inward from the first outer diameter of the body, and wherein the second gas conductance limiter has a surface configured to accept a seal, wherein the surface is configured to generally surround at least a portion of the seal; and

a liner associated with the arc chamber body, wherein the liner has an opening configured to pass the cathode shield therethrough, wherein the liner has a recess defined therein, and wherein a gap is defined between the U-shaped lip and the liner, wherein the U-shaped lip substantially reduces a conductance of gas into the gap.

7. The arc chamber of claim 6 , wherein the gap is further defined between the cathode shield and a hole in an arc chamber body.

8. The arc chamber of claim 7 , wherein the second gas conductance limiter comprises a labyrinth seal defined by a second outer diameter of the body.

9. The arc chamber of claim 8 , wherein the seal comprises a boron nitride seal disposed between the labyrinth seal and the arc chamber body, wherein the boron nitride seal electrically insulates the electrode from the arc chamber body.

10. The arc chamber of claim 9 , wherein the labyrinth seal generally protects a sealing surface associated with the boron nitride seal from corrosive gases associated with the ion source by reducing a gas conductance of the corrosive gases into an area associated with the labyrinth seal.

11. An ion source, comprising:
an arc chamber having an arc chamber body;
an electrode extending into an interior region of the arc chamber body;
a cathode shield comprising:
a body, wherein the body is generally cylindrical and has an axial hole defined therethrough, wherein the axial hole is configured to pass the electrode therethrough;
a first gas conductance limiter associated with a first end of the body, wherein the first gas conductance limiter extends radially outward from a first outer diameter of the body, wherein the first gas conductance limiter comprises a U-shaped lip extending axially from the first end of the body toward a second end of the body; and
a second gas conductance limiter associated with the second end of the body, wherein the second gas conductance limiter extends radially inward from the first outer diameter of the body, and wherein the second gas conductance limiter has a surface configured to accept a seal, wherein the surface is configured to generally surround at least a portion of the seal;

a gas source configured to introduce a gas to the interior region of the arc chamber body; and
a liner associated with the arc chamber body, wherein the liner has an opening configured to pass the cathode shield therethrough, wherein the liner has a recess defined therein, and wherein a gap is defined between the U-shaped lip and the liner, wherein the U-shaped lip substantially reduces a conductance of gas into the gap.

12. The ion source of claim 11 , wherein the gap is further defined between the cathode shield and a hole in the arc chamber body.

13. The ion source of claim 12 , wherein the second gas conductance limiter comprises a labyrinth seal defined by a second outer diameter of the body.

14. The ion source of claim 13 , wherein the seal comprises a boron nitride seal disposed between the labyrinth seal and the arc chamber body, wherein the boron nitride seal electrically insulates the electrode from the arc chamber body.

15. The ion source of claim 14 , wherein the labyrinth seal generally protects a sealing surface associated with the boron nitride seal from corrosive gases associated with the ion source by reducing a gas conductance of the corrosive gases into an area associated with the labyrinth seal.

16. The ion source of claim 11 , further comprising:
a repeller; and
an arc slit.

Assignees

• Axcelis Tech Inc
• Axcells Tech Inc

Inventors

• Colvin Neil K
• Hsieh Tseh-Jen
• Silverstein Paul B

Classifications

• H01J27/022 Primary

  Details · CPC title

• H01J17/186

  Seals between leading-in conductors and vessel · CPC title

• H01J27/08

  using arc discharge · CPC title

• H01J17/06 Primary

  Cathodes · CPC title

• H01J2237/061

  Construction · CPC title