High-temperature isotropic plasma etching process to prevent electrical shorts

Patent metadata

Field	Value
Publication number	US-9939710-B2
Application number	US-201615191569-A
Country	US
Kind code	B2
Filing date	Jun 24, 2016
Priority date	May 22, 2014
Publication date	Apr 10, 2018
Grant date	Apr 10, 2018

Abstract

A method includes placing a device having a titanium nitride layer into a chamber. The device also has a mask that includes a photoresist material and an aluminum copper hardmask. The method also includes performing an ashing process on the mask using the chamber. The method further includes, after the ashing process, performing an etching process using the chamber to etch through portions of the titanium nitride layer. Performing the etching process includes flowing a gas mixture containing tetrafluoromethane (CF 4 ) and oxygen gas (O 2 ) into the chamber at a temperature of at least about 200° C.

First claim

What is claimed is:

1. A method, comprising:
placing a device into a chamber, the device comprising a piezoelectric layer, a moisture barrier layer that includes titanium nitride over the piezoelectric layer, and a metal layer on the moisture barrier layer, the metal layer covered by a photoresist mask and a metal hardmask;
ashing the photoresist mask while the device is inside the chamber without removing the metal layer; and
etching through the metal layer and the moisture barrier layer exposed by the metal hardmask.

2. The method of claim 1 , wherein the metal layer includes a titanium metal.

3. The method of claim 1 , wherein the metal hardmask includes an aluminum copper material.

4. The method of claim 1 , wherein the etching includes flowing a gas mixture containing a tetrafluromethane (CF 4 ) gas and an oxygen (O 2 ) gas into the chamber, and the gas mixture has a CF 4 gas to O 2 gas ratio of 4 to 1.

5. The method of claim 1 , wherein the etching includes setting the chamber to a temperature of at least 200° C.

6. The method of claim 1 , further comprising:
performing a chamber seasoning process within the chamber after the etching.

7. The method of claim 1 , wherein the etching includes etching through a portion of the metal layer between the moisture barrier layer and the metal hardmask.

8. The method of claim 7 , wherein the metal hardmask, unetched portions of the metal layer, and unetched portions of the moisture barrier layer form an electrical contact.

9. A method, comprising:
forming a piezoelectric layer above a substrate of a device;
forming a moisture barrier layer above the piezoelectric layer, wherein the moisture barrier layer includes a titanium nitride material;
forming a metal layer above the moisture barrier layer;
forming a photoresist mask and a hardmask above the metal layer;
ashing the photoresist mask while the device is inside a chamber; and
etching through the metal layer and the moisture barrier layer exposed by the hardmask after the ashing.

10. The method of claim 9 , wherein the metal layer includes a titanium metal.

11. The method of claim 9 , wherein the etching includes etching through a portion of the metal layer between the moisture barrier layer and the hardmask.

12. The method of claim 11 , wherein the hardmask, unetched portions of the metal layer, and unetched portions of the moisture barrier layer form an electrical contact.

13. The method of claim 9 , wherein the hardmask includes an aluminum copper material.

14. The method of claim 9 , wherein the etching includes flowing a gas mixture containing a tetrafluromethane (CF 4 ) gas and an oxygen (O 2 ) gas into the chamber, and the gas mixture has a CF 4 gas to O 2 gas ratio of 4 to 1.

15. The method of claim 9 , wherein the etching includes setting the chamber to a temperature of at least 200° C.

16. The method of claim 9 , further comprising:
performing a chamber seasoning process within the chamber after the etching.

Assignees

• Texas Instruments Inc

Inventors

• Jiang Neng
• Soman Joel
• Lassiter Thomas Warren
• Roby Mary Alyssa Drummond
• Mohammed Nayeemuddin
• Chang Yungshan

Classifications

• H10P50/267

  using plasmas · CPC title

• H10P50/71

  using masks for conductive or resistive materials · CPC title

• H04N23/55

  Optical parts specially adapted for electronic image sensors; Mounting thereof · CPC title

• H04N23/80

  Camera processing pipelines; Components thereof · CPC title

• C23F4/00

  Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00 · CPC title