MOSFET termination trench

Patent metadata

Field	Value
Publication number	US-9935193-B2
Application number	US-201514663872-A
Country	US
Kind code	B2
Filing date	Mar 20, 2015
Priority date	Feb 9, 2012
Publication date	Apr 3, 2018
Grant date	Apr 3, 2018

Abstract

A method, in one embodiment, can include forming a core trench and a termination trench in a substrate. The termination trench is wider than the core trench. In addition, a first oxide can be deposited that fills the core trench and lines the sidewalls and bottom of the termination trench. A first polysilicon can be deposited into the termination trench. A second oxide can be deposited above the first polysilicon. A mask can be deposited above the second oxide and the termination trench. The first oxide can be removed from the core trench. A third oxide can be deposited that lines the sidewalls and bottom of the core trench. The first oxide within the termination trench is thicker than the third oxide within the core trench.

First claim

What is claimed is:

1. A method comprising:
forming a core trench and a termination trench in a substrate, said termination trench is wider than said core trench;
depositing a first dielectric into said core trench and that lines the sidewalls and bottom of said termination trench;
depositing a first conductive material into said termination trench;
depositing a second dielectric above said first conductive material;
removing said first dielectric from said core trench;
depositing a third dielectric that lines the sidewalls and bottom of said core trench, said first dielectric within said termination trench is thicker than said third dielectric within said core trench; and
depositing a second conductive material into said core trench, said second conductive material is deeper than said first conductive material.

2. The method of claim 1 , wherein said termination trench is deeper than said core trench.

3. The method of claim 1 , further comprising:
implanting a doped region into a mesa of said substrate located between said core trench and said termination trench.

4. The method of claim 3 , wherein said mesa is formed by said core trench and said termination trench.

5. The method of claim 1 , wherein said first conductive material is wider than said second conductive material.

6. The method of claim 1 , further comprising:
depositing a fourth dielectric above said first and second conductive material.

7. The method of claim 6 , wherein said fourth dielectric further contacts said first and second conductive materials.

8. The method of claim 1 , further comprising:
removing a portion of said first conductive material and a portion of said first dielectric to form a substantially planarized surface.

9. A method comprising:
forming a core trench and a termination trench in a substrate, said terminatioon trench is wider than said core trench;
depositing a first oxide into said core trench and that lines the sidewalls and bottom of said termination trench;
depositing a first polysilicon into said termination trench;
depositing a second oxide above said first polysilicon;
removing said first oxide from said core trench;
deposifing a third oxide that lines the sidewalls and bottom of said core trench, said first oxide within said termination trench is thicker than said third oxide within said core trench; and
depositing a second polysilicon into said core trench, said second polysilicon is deeper than said first polysilicon.

10. The method of claim 9 , further comprising:
depositing a mask above said second oxide and said termination trench.

11. The method of claim 9 , wherein said first oxide fills said core trench.

12. The method of claim 9 , wherein said termination trench is deeper than said core trench.

13. The method of claim 9 , further comprising:
implanting a doped region into a mesa of said substrate located between said core trench and said termination trench.

14. The method of claim 13 , wherein said mesa is formed by said core trench and said termination trench.

15. The method of claim 9 , further comprising:
depositing a fourth dielectric above said first and second polysilicon.

16. A method comprising:
forming a core trench and a termination trench in a substrate, said termination trench is wider than said core trench;
depositing a first oxide layer that fills said core trench and lines the sidewalls is and bottom of said termination trench;
depositing a first polysilicon into said termination trench;
depositing a second oxide layer above said first polysilicon;
depositing a mask above said second oxide layer and said termination trench,
removing said first oxide layer from said core trench;
depositing a third oxide layer that lines the sidewalls and bottom of said core trench, said first oxide layer within said termination trench is thicker than said third oxide layer within said core trench, and
depositing a second polysilicon into said core trench, said second polysilicon is deeper than said first polysilicon.

17. The method of claim 16 , wherein said termination trench is deeper than said core trench.

18. The method of claim 16 , further comprising:
before said depositing a mask, performing an oxide polishing process to planarize said second oxide layer.

19. The method of claim 16 , further comprising:
implanting a doped region into a mesa of said substrate located between said core trench and said termination trench.

20. The method of claim 16 , further comprising:
depositing a fourth dielectric above said first and second polysilicon.

Assignees

• Vishay Siliconix
• Siliconix Tech C V

Inventors

• Azam Misbah Ul
• Terrill Kyle

Classifications

• H10P95/062

  involving a dielectric removal step · CPC title

• H10P30/20

  into semiconductor materials, e.g. for doping · CPC title

• H10P14/3456

  Polycrystalline · CPC title

• H10P14/3411

  Silicon, silicon germanium or germanium · CPC title

• H10W10/0148

  comprising introducing impurities in side walls or bottom walls of trenches, e.g. for forming channel stoppers · CPC title