Method of decontamination of process chamber after in-situ chamber clean

Patent metadata

Field	Value
Publication number	US-9932670-B2
Application number	US-201414149526-A
Country	US
Kind code	B2
Filing date	Jan 7, 2014
Priority date	Aug 27, 2009
Publication date	Apr 3, 2018
Grant date	Apr 3, 2018

Abstract

A method and apparatus for removing deposition products from internal surfaces of a processing chamber, and for preventing or slowing growth of such deposition products. A halogen containing gas is provided to the chamber to etch away deposition products. A halogen scavenging gas is provided to the chamber to remove any residual halogen. The halogen scavenging gas is generally activated by exposure to electromagnetic energy, either inside the processing chamber by thermal energy, or in a remote chamber by electric field, UV, or microwave. A deposition precursor may be added to the halogen scavenging gas to form a deposition resistant film on the internal surfaces of the chamber. Additionally, or alternately, a deposition resistant film may be formed by sputtering a deposition resistant metal onto internal components of the processing chamber in a PVD process.

First claim

What is claimed is:

1. A method of cleaning group III nitride deposits from a chamber component of a processing chamber, comprising:
forming a sacrificial layer on the chamber component prior to depositing group III nitrides;
treating the sacrificial layer and group III nitrides formed on the sacrificial layer to cause conversion of the group III nitrides to group III halides, using a first gas mixture comprising chlorine gas (Cl 2 ) in a carrier gas at a concentration between about 50% and about 80% to the processing chamber at a temperature between about 650° C. and about 750° C. while maintaining a pressure of the processing chamber between about 100 Torr and about 200 Torr;
discontinuing the chlorine gas (Cl 2 ) while maintaining the carrier gas, reducing the pressure to about 50 Torr or below, and increasing the chamber temperature to at least about 1,000° C. to cause evaporation or sublimation of the group III halides;
providing a second gas mixture comprising ammonia (NH 3 ) to the processing chamber at a temperature between about 900° C. and about 1,100° C. for purging residues of the group III halides from the processing chamber while maintaining the pressure of the processing chamber between about 100 Torr and about 200 Torr; and
repeating, at least one time, providing the first gas mixture to the processing chamber, discontinuing the chlorine gas (Cl 2 ), and providing the second gas mixture to the processing chamber.

2. The method of claim 1 , wherein the sacrificial layer is formed using a chemical vapor deposition (CVD) process including providing a precursor mixture comprising silicon, aluminum, or both along with a nitrogen containing gas to the processing chamber and maintaining the chamber temperature above 1000° C. and pressure between about 100 Torr and about 200 Torr.

3. The method of claim 2 , wherein the CVD process further comprises providing a carrier gas of hydrogen or argon along with the precursor mixture and the nitrogen containing gas to the processing chamber.

4. A method of cleaning group III deposits from a chamber component of a processing chamber, comprising:
forming a sacrificial layer on the chamber component prior to depositing group III deposits, wherein the sacrificial layer is formed using a chemical vapor deposition (CVD) process comprising:
providing a precursor mixture comprising silicon, aluminum, or both along with a nitrogen containing gas and a carrier gas of hydrogen or argon to the processing chamber;
maintaining the chamber temperature above 1000° C. and pressure between about 100 Torr and about 200 Torr;
providing a carrier gas of hydrogen or argon along with the precursor mixture and the nitrogen containing gas to the processing chamber; and
discontinuing the silicon, aluminum, or both precursor mixture and providing a metal precursor mixture comprising gallium or other group III metal at a flow rate at about the same rate as the precursor mixture;

treating the sacrificial layer and group III formed on the sacrificial layer using a first gas mixture comprising chlorine gas (Cl 2 ) in a carrier gas at a concentration between about 50% and about 80% to the processing chamber at a temperature between about 650° C. and about 750° C. while maintaining a pressure of the processing chamber between about 100 Torr and about 200 Torr;
discontinuing the chlorine gas (Cl 2 ) while maintaining the carrier gas, reducing the pressure to about 50 Torr or below, and increasing the chamber temperature to at least about 1,000° C.;
providing a second gas mixture comprising ammonia (NH 3 ) in the carrier gas to the processing chamber at a temperature between about 900° C. and about 1,100° C. while maintaining the pressure of the processing chamber between about 100 Torr and about 200 Torr; and
repeating, at least one time, providing the first gas mixture to the processing chamber, discontinuing the chlorine gas (Cl 2 ), and providing the second gas mixture to the processing chamber.

5. A method of cleaning group III deposits from a chamber component of a processing chamber, comprising:
forming a sacrificial layer on the chamber component prior to depositing group III deposits, using a chemical vapor deposition (CVD) process including reacting a mixture of ammonia and hydrogen flowed into the processing chamber at flow rate of about 60 standard liter per minute (slm) with a precursor mixture of trimethyl aluminum (TMA) and hydrogen flowed into the processing chamber at flow rate of about 60 (slm), and maintaining the reaction for a duration of between about 10 minutes and about 30 minutes with the chamber temperature above 1000° C. and pressure between about 100 Torr and about 200 Torr;
treating the sacrificial layer and group III formed on the sacrificial layer using a first gas mixture comprising chlorine gas (Cl 2 ) in a carrier gas at a concentration between about 50% and about 80% to the processing chamber at a temperature between about 650° C. and about 750° C. while maintaining a pressure of the processing chamber between about 100 Torr and about 200 Torr;
discontinuing the chlorine gas (Cl z ) while maintaining the carrier gas, reducing the pressure to about 50 Torr or below, and increasing the chamber temperature to at least about 1,000° C.;
providing a second gas mixture comprising ammonia (NH 3 ) in the carrier gas to the processing chamber at a temperature between about 900° C. and about 1,100° C. while maintaining the pressure of the processing chamber between about 100 Torr and about 200 Torr; and
repeating, at least one time, providing the first gas mixture to the processing chamber, discontinuing the chlorine gas (Cl 2 ), and providing the second gas mixture to the processing chamber.

6. A method of cleaning group III deposits from a chamber component of a processing chamber, comprising:
forming a sacrificial layer on the chamber component prior to depositing group III deposits;
treating the sacrificial layer and group III formed on the sacrificial layer using a first gas mixture comprising chlorine gas (Cl 2 ) in a carrier gas at a concentration between about 50% and about 80% to the processing chamber at a temperature between about 650° C. and about 750° C. while maintaining a pressure of the processing chamber between about 100 Torr and about 200 Torr;
discontinuing the chlorine gas (Cl 2 ) while maintaining the carrier gas, reducing the pressure to about 50 Torr or below, and increasing the chamber temperature to at least about 1,000° C.;
providing a second gas mixture comprising ammonia (NH 3 ) in the carrier gas to the processing chamber at a temperature between about 900° C. and about 1,100° C. while maintaining the pressure of the processing chamber between about 100 Torr and about 200 Torr; and
forming a deposition resistant film by adding a metal or silicon containing gas to the second gas mixture and maintaining activation of the second gas mixture with a temperature between about 600° C. and about 800° C.

7. The method of claim 6 , wherein the deposition resistant film is p-doped or n-doped.

Assignees

• Applied Materials Inc

Inventors

• Su Jie
• Washington Lori D
• Nijhawan Sandeep
• Kryliouk Olga
• Grayson Jacob
• Kang Sang Won
• Lee Dong Hyung
• Chung Hua

Classifications

• H10P72/0436

  mainly by radiation · CPC title

• C23C16/45574

  Nozzles for more than one gas · CPC title

• C23C16/4404

  Coatings or surface treatment on the inside of the reaction chamber or on parts thereof · CPC title

• C23C16/4405 Primary

  Cleaning of reactor or parts inside the reactor by using reactive gases · CPC title

• H01L21/67115

  Electricity · mapped topic