Composition for forming liquid immersion upper layer film, and polymer

Patent metadata

Field	Value
Publication number	US-9926462-B2
Application number	US-201615358250-A
Country	US
Kind code	B2
Filing date	Nov 22, 2016
Priority date	Sep 29, 2010
Publication date	Mar 27, 2018
Grant date	Mar 27, 2018

Abstract

An immersion upper layer film-forming composition includes [A] a polymer component that includes a polymer (A1), and [B] a solvent, the polymer (A1) including a structural unit (I) that includes a group represented by the following formula (i). The structural unit (I) is preferably a structural unit (I-1) represented by the following formula (1). The polymer component [A] preferably further includes a structural unit (II-1) represented by the following formula (2), the structural unit (II-1) being included in the polymer (A1) or a polymer other than the polymer (A1). The polymer component [A] preferably further includes a structural unit (III) that includes a carboxyl group, the structural unit (III) being included in the polymer (A1) or a polymer other than the polymer (A1).

First claim

The invention claimed is:

1. An immersion upper layer film-forming composition comprising:
[A] a polymer component that comprises:
a structural unit (I-1) represented by formula (1), the structural unit (I-1) being included in a polymer (A1);
a structural unit (II-1-2) represented by formula (2-2); and
optionally a structural unit (II-1-1) represented by formula (2-1), the structural unit (II-1-1) and the structural unit (II-1-2) being included in the polymer (A1) or a polymer other than the polymer (A1); and

[B] a solvent,
wherein a content of the structural unit (I-1) in the polymer component [A] is from 0.5 to 50 mol % based on total structural units included in the polymer component [A],

wherein
R 1 is a hydrogen atom,
R 2 is —C(═O)—R 3f , —S(═O) 2 —R 4 , or —R 6 —NO 2 , wherein R 3f is a fluoroalkyl group, R 4 is a hydrogen atom, an alkyl group, a fluoroalkyl group, a monovalent alicyclic hydrocarbon group, an alkoxy group, a cyano group, a cyanomethyl group, an aralkyl group, or an aryl group, or R 4 and R 1 taken together represent a cyclic structure, and R 6 is a single bond, a methylene group, or an alkylene group having 2 to 5 carbon atoms,
n is an integer from 1 to 3, in a case where R 1 is present in a plurality of number, the plurality of R 1 s are each identical or different, and in a case where R 2 is present in a plurality of number, the plurality of R 2 s are each identical or different,
L 1 is an (n+1)-valent linking group, and
R is a hydrogen atom, a methyl group, a fluorine atom, or a trifluoromethyl group,

wherein R′ is a hydrogen atom, a methyl group, a fluorine atom, or a trifluoromethyl group, R f1 is a divalent linking group, and R f2 is a linear or branched monovalent fluorohydrocarbon group having 2 to 8 carbon atoms or a monovalent alicyclic fluorohydrocarbon group having 4 to 8 carbon atoms.

2. The immersion upper layer film-forming composition according to claim 1 , wherein the polymer component [A] further comprises a structural unit (III) that comprises a carboxyl group, the structural unit (III) being included in the polymer (A1) or a polymer other than the polymer (A1).

3. The immersion upper layer film-forming composition according to claim 1 , wherein the polymer component [A] further comprises a structural unit (IV) that comprises a sulfo group, the structural unit (IV) being included in the polymer (A1) or a polymer other than the polymer (A1).

4. The immersion upper layer film-forming composition according to claim 1 , wherein the solvent [B] comprises an ether solvent.

5. The immersion upper layer film-forming composition according to claim 1 , wherein the content of the structural unit (I-1) in the polymer component [A] is from 1 to 45 mol % based on total structural units included in the polymer component [A].

6. The immersion upper layer film-forming composition according to claim 1 , wherein the content of the structural unit (I-1) in the polymer component [A] is from 3 to 40 mol % based on total structural units included in the polymer component [A].

7. The immersion upper layer film-forming composition according to claim 1 , wherein a total content of the structural unit (II-1-1) and the structural unit (II-1-2) in the polymer component [A] is from 10 to 99 mol % based on total structural units included in the polymer component [A].

8. The immersion upper layer film-forming composition according to claim 1 , wherein a total content of the structural unit (II-1-1) and the structural unit (II-1-2) in the polymer component [A] is from 20 to 97 mol % based on total structural units included in the polymer component [A].

9. A polymer comprising:
a structural unit (I-1) represented by formula (1);
a structural unit (II-1-2) represented by formula (2-2); and
optionally a structural unit (II-1-1) represented by formula (2-1),
wherein a content of the structural unit (I-1) in the polymer is from 0.5 to 50 mol % based on total structural units included in the polymer,

wherein R 1 is a hydrogen atom, R 2 is —C(═O)—R 3f , —S(═O) 2 —R 4 , or —R 6 —NO 2 , wherein R 3f is a fluoroalkyl group, R 4 is a hydrogen atom, an alkyl group, a fluoroalkyl group, a monovalent alicyclic hydrocarbon group, an alkoxy group, a cyano group, a cyanomethyl group, an aralkyl group, or an aryl group, or R 4 and R 1 taken together represent a cyclic structure, and R 6 is a single bond, a methylene group, or an alkylene group having 2 to 5 carbon atoms, n is an integer from 1 to 3, in a case where R 1 is present in a plurality of number, the plurality of R 1 s are each identical or different, and in a case where R 2 is present in a plurality of number, the plurality of R 2 s are each identical or different, L 1 is an (n+1)-valent linking group, and R is a hydrogen atom, a methyl group, a fluorine atom, or a trifluoromethyl group,

wherein R′ is a hydrogen atom, a methyl group, a fluorine atom, or a trifluoromethyl group, R f1 is a divalent linking group, and R f2 is a linear or branched monovalent fluorohydrocarbon group having 2 to 8 carbon atoms or a monovalent alicyclic fluorohydrocarbon group having 4 to 8 carbon atoms.

10. The polymer according to claim 9 , further comprising a structural unit (III) that comprises a carboxyl group.

11. The polymer according to claim 9 , further comprising a structural unit (IV) that comprises a sulfo group.

12. The polymer according to claim 9 , wherein the content of the structural unit (I-1) in the polymer is from 1 to 45 mol % based on total structural units included in the polymer.

13. The polymer according to claim 9 , wherein the content of the structural unit (I-1) in the polymer is from 3 to 40 mol % based on total structural units included in the polymer.

14. The polymer according to claim 9 , wherein a total content of the structural unit (II-1-1) and the structural unit (II-1-2) in the polymer is from 10 to 99 mol % based on total structural units included in the polymer.

15. The polymer according to claim 9 , wherein a total content of the structural unit (II-1-1) and the structural unit (II-1-2) in the polymer is from 20 to 97 mol % based on total structural units included in the polymer.

Assignees

• Jsr Corp

Inventors

• Tanaka Kiyoshi
• Kusabiraki Kazunori
• Hayama Takahiro
• Shima Motoyuki

Classifications

• C09D133/16

  Homopolymers or copolymers of esters containing halogen atoms · CPC title

• G03F7/2041

  in the presence of a fluid, e.g. immersion; using fluid cooling means · CPC title

• G03F7/11

  having cover layers or intermediate layers, e.g. subbing layers {(G03F7/091 - G03F7/093, B41N3/03 take precedence)} · CPC title

• C08F20/28

  containing no aromatic rings in the alcohol moiety · CPC title

• C08J7/126

  Halogenation · CPC title