Composition for forming liquid immersion upper layer film, and polymer

Patent metadata

Field	Value
Publication number	US-9540535-B2
Application number	US-201313852194-A
Country	US
Kind code	B2
Filing date	Mar 28, 2013
Priority date	Sep 29, 2010
Publication date	Jan 10, 2017
Grant date	Jan 10, 2017

Abstract

An immersion upper layer film-forming composition includes [A] a polymer component that includes a polymer (A1), and [B] a solvent, the polymer (A1) including a structural unit (I) that includes a group represented by the following formula (i). The structural unit (I) is preferably a structural unit (I-1) represented by the following formula (1). The polymer component [A] preferably further includes a structural unit (II-1) represented by the following formula (2), the structural unit (II-1) being included in the polymer (A1) or a polymer other than the polymer (A1). The polymer component [A] preferably further includes a structural unit (III) that includes a carboxyl group, the structural unit (III) being included in the polymer (A1) or a polymer other than the polymer (A1).

First claim

The invention claimed is:

1. An immersion upper layer film-forming composition comprising:
[A] a polymer component that comprises:
a structural unit (I-1) represented by formula (1), the structural unit (I-1) being included in a polymer (A1); and
a structural unit (II-1) represented by formula (2-1), formula (2-2) or both thereof, the structural unit (II-1) being included in the polymer (A1) or a polymer other than the polymer (A1); and

[B] a solvent,
wherein a content of the structural unit (I-1) in the polymer component [A] is from 0.5 to 50 mol % based on total structural units included in the polymer component [A],

wherein
R 1 is a halogen atom, a nitro group, a substituted or unsubstituted alkyl group, a substituted or unsubstituted monovalent alicyclic hydrocarbon group, a substituted or unsubstituted alkoxy group, a substituted or unsubstituted acyl group, a substituted or unsubstituted aralkyl group, or a substituted or unsubstituted aryl group,
R 2 is —C(═O)—R 3 , —S(═O) 2 —R 4 , —R 5 —CN, or —R 6 —NO 2 , wherein R 3 and R 4 are each independently a hydrogen atom, an alkyl group, a fluoroalkyl group, a monovalent alicyclic hydrocarbon group, an alkoxy group, a cyano group, a cyanomethyl group, an aralkyl group, or an aryl group, or R 3 or R 4 and R 1 taken together represent a cyclic structure, and R 5 and R 6 are each independently a single bond, a methylene group, or an alkylene group having 2 to 5 carbon atoms,
n is an integer from 1 to 3, in a case where R 1 is present in a plurality of number, the plurality of R 1 s are each identical or different, and in a case where R 2 is present in a plurality of number, the plurality of R 2 s are each identical or different,
L 1 is an (n+1)-valent linking group, and
R is a hydrogen atom, a methyl group, a fluorine atom, or a trifluoromethyl group,

wherein R′ is a hydrogen atom, a methyl group, a fluorine atom, or a trifluoromethyl group, R f1 is a divalent linking group, and R f2 is a linear or branched monovalent fluorohydrocarbon group having 2 to 8 carbon atoms or a monovalent alicyclic fluorohydrocarbon group having 4 to 8 carbon atoms.

2. The immersion upper layer film-forming composition according to claim 1 , wherein the polymer component [A] further comprises a structural unit (III) that comprises a carboxyl group, the structural unit (III) being included in the polymer (A1) or a polymer other than the polymer (A1).

3. The immersion upper layer film-forming composition according to claim 1 , wherein the polymer component [A] further comprises a structural unit (IV) that comprises a sulfo group, the structural unit (IV) being included in the polymer (A1) or a polymer other than the polymer (A1).

4. The immersion upper layer film-forming composition according to claim 1 , wherein the solvent [B] comprises an ether solvent.

5. The immersion upper layer film-forming composition according to claim 1 , wherein R 2 in the group represented by the formula (1) is —C(═O)—R 3f , —S(═O) 2 —R 4 , —R 5 —CN, or —R 6 —NO 2 , wherein R 3f is a fluoroalkyl group, R 4 is a hydrogen atom, an alkyl group, a fluoroalkyl group, a monovalent alicyclic hydrocarbon group, an alkoxy group, an aralkyl group, or an aryl group, and R 5 and R 6 are each independently a single bond, a methylene group, or an alkylene group having 2 to 5 carbon atoms.

6. A polymer comprising:
a structural unit (I-1) represented by formula (1); and
a structural unit (II-1) represented by formula (2-1), formula (2-2) or both thereof,
wherein a content of the structural unit (I-1) in the polymer is from 0.5 to 50 mol % based on total structural units included in the polymer,

wherein R 1 is a halogen atom, a nitro group, a substituted or unsubstituted alkyl group, a substituted or unsubstituted monovalent alicyclic hydrocarbon group, a substituted or unsubstituted alkoxy group, a substituted or unsubstituted acyl group, a substituted or unsubstituted aralkyl group, or a substituted or unsubstituted aryl group, R 2 is —C(═O)—R 3 , —S(═O) 2 —R 4 , —R 5 —CN, or —R 6 —NO 2 , wherein R 3 and R 4 are each independently a hydrogen atom, an alkyl group, a fluoroalkyl group, a monovalent alicyclic hydrocarbon group, an alkoxy group, a cyano group, a cyanomethyl group, an aralkyl group, or an aryl group, or R 3 or R 4 and R 1 taken together represent a cyclic structure, and R 5 and R 6 are each independently a single bond, a methylene group, or an alkylene group having 2 to 5 carbon atoms, n is an integer from 1 to 3, in a case where R 1 is present in a plurality of number, the plurality of R 1 s are each identical or different, and in a case where R 2 is present in a plurality of number, the plurality of R 2 s are each identical or different, L 1 is an (n+1)-valent linking group, and R is a hydrogen atom, a methyl group, a fluorine atom, or a trifluoromethyl group,

wherein R′ is a hydrogen atom, a methyl group, a fluorine atom, or a trifluoromethyl group, R f1 is a divalent linking group, and R f2 is a linear or branched monovalent fluorohydrocarbon group having 2 to 8 carbon atoms or a monovalent alicyclic fluorohydrocarbon group having 4 to 8 carbon atoms.

7. The polymer according to claim 6 , further comprising a structural unit (III) that comprises a carboxyl group.

8. The polymer according to claim 6 , further comprising a structural unit (IV) that comprises a sulfo group.

9. The polymer according to claim 6 , wherein R 2 in the group represented by the formula (1) is —C(═O)—R 3f , —S(═O) 2 —R 4 , —R 5 —CN, or —R 6 —NO 2 , wherein R 3f is a fluoroalkyl group, R 4 is a hydrogen atom, an alkyl group, a fluoroalkyl group, a monovalent alicyclic hydrocarbon group, an alkoxy group, an aralkyl group, or an aryl group, and R 5 and R 6 are each independently a single bond, a methylene group, or an alkylene group having 2 to 5 carbon atoms.

10. The immersion upper layer film-forming composition according to claim 1 , wherein the content of the structural unit (I-1) in the polymer component [A] is from 1 to 45 mol % based on total structural units included in the polymer component [A].

11. The immersion upper layer film-forming composition according to claim 1 , wherein the content of the structural unit (I-1) in the polymer component [A] is from 3 to 40 mol % based on total structural units included in the polymer component [A].

12. The immersion upper layer film-forming composition according to claim 1 , wherein a content of the structural unit (II-1) in the polymer component [A] is from 10 to 99 mol % based on total structural units included in the polymer component [A].

13. The immersion upper layer film-forming composition according to claim 1 , wherein a content of the structural unit (II-1) in the polymer component [A] is from 20 to 97 mol % based on total structural units included in the polymer component [A].

14. The polymer according to claim 6 , wherein the content of the structural unit (I-1) in the polymer is from 1 to 45 mol % based on total structural units included in the polymer.

15. The polymer according to claim 6 , wherein the content of the structural unit (I-1) in the polymer is from 3 to 40 mol % based on total structura

Assignees

• Jsr Corp

Inventors

• Tanaka Kiyoshi
• Kusabiraki Kazunori
• Hayama Takahiro
• Shima Motoyuki

Classifications

• C08F20/28

  containing no aromatic rings in the alcohol moiety · CPC title

• G03F7/2041

  in the presence of a fluid, e.g. immersion; using fluid cooling means · CPC title

• C08F220/281

  and containing only one oxygen, e.g. furfuryl (meth)acrylate or 2-methoxyethyl (meth)acrylate · CPC title

• G03F7/11

  having cover layers or intermediate layers, e.g. subbing layers {(G03F7/091 - G03F7/093, B41N3/03 take precedence)} · CPC title

• C09D133/16 Primary

  Homopolymers or copolymers of esters containing halogen atoms · CPC title