Method of making 2,2,4,4-tetrasilylpentasilane

Patent metadata

Field	Value
Publication number	US-9926203-B2
Application number	US-201414915404-A
Country	US
Kind code	B2
Filing date	Sep 3, 2014
Priority date	Sep 5, 2013
Publication date	Mar 27, 2018
Grant date	Mar 27, 2018

Abstract

A compound that is 2,2,4,4-tetrasilylpentasilane, chemical compositions comprising same, methods of making and purifying 2,2,4,4-tetrasilylpentasilane, the purified 2,2,4,4-tetrasilylpentasilane prepared thereby, and methods of forming silicon-containing materials using 2,2,4,4-tetrasilylpentasilane as a precursor.

First claim

What is claimed is:

1. A method of making 2,2,4,4-tetrasilylpentasilane, the method comprising contacting 2,2-disilyltrisilane with a condensation reaction catalyst under condensation reaction conditions so as to synthesize the 2,2,4,4-tetrasilylpentasilane and make a product composition comprising the 2,2,4,4-tetrasilylpentasilane.

2. The method of claim 1 , wherein the product composition further comprises monosilane and 2,2-disilyltrisilane.

3. A method of purifying a mixture comprising 2,2,4,4-tetrasilylpentasilane, monosilane, and 2,2-disilyltrisilane, the method comprising separating the monosilane and 2,2-disilyltrisilane from the 2,2,4,4-tetrasilylpentasilane to give a remainder comprising 2,2,4,4-tetrasilylpentasilane and lacking the separated monosilane and 2,2-disilyltrisilane, wherein concentration of the 2,2,4,4-tetrasilylpentasilane in the remainder is greater than concentration of the 2,2,4,4-tetrasilylpentasilane in the mixture.

4. The method of claim 3 , wherein concentration of the 2,2,4,4-tetrasilylpentasilane in the remainder is at least 70 area percent (area %, gas chromatograph (GC)) based on total GC area of the remainder.

5. The method of claim 3 further comprising distilling the 2,2,4,4-tetrasilylpentasilane from the remainder to give a distillate comprising at least 90 area % 2,2,4,4-tetrasilylpentasilane.

6. The method of claim 3 further comprising distilling any unreacted 2,2-disilyltrisilane to give a recovered 2,2-disilyltrisilane, and contacting the recovered 2,2-disilyltrisilane with a condensation reaction catalyst under condensation reaction conditions so as to synthesize an additional quantity of 2,2,4,4-tetrasilylpentasilane and make a product composition comprising the additional quantity of 2,2,4,4-tetrasilylpentasilane.

7. A method of forming a silicon-containing material on and in contact with a surface of a first substrate or on and in contact with a seed layer disposed on a second substrate, the method comprises contacting an exposed surface of a first substrate lacking a seed layer or contacting a seed layer disposed on a surface of a second substrate, to vapor of a precursor composition comprising 2,2,4,4-tetrasilylpentasilane, wherein the contacting comprises a material deposition method and forms a silicon-containing material on and in contact with the exposed surface of the first substrate or on and in contact with the seed layer disposed on the surface of the second substrate.

8. The method of claim 7 comprising a method of forming a silicon-containing film on and in contact with a surface of a first substrate or on and in contact with a seed layer disposed on a second substrate, the method comprises contacting an exposed surface of a first substrate lacking a seed layer or contacting a seed layer disposed on a surface of a second substrate, to vapor of a precursor composition comprising 2,2,4,4-tetrasilylpentasilane, wherein the contacting comprises a film deposition method and forms a silicon-containing film on and in contact with the exposed surface of the first substrate or on and in contact with the seed layer disposed on the surface of the second substrate.

9. The method of claim 8 , wherein the method comprises forming the silicon-containing film on and in contact with the seed layer disposed on the surface of the second substrate.

10. The method of claim 8 , (a) wherein the precursor composition comprises at least 70 area percent (area %, gas chromatograph (GC)) of 2,2,4,4-tetrasilylpentasilane based on total GC area of the precursor composition; (b) wherein the film deposition method is a chemical vapor deposition method or a solution deposition method; or (c) both (a) and (b).

11. The method of claim 10 , wherein the film deposition method is the chemical vapor deposition method, which is a plasma enhanced chemical vapor deposition method or a thermal chemical vapor deposition method.

12. The method of claim 8 , wherein the silicon-containing film is an elemental silicon film, a silicon carbide film, a silicon oxide film, a silicon nitride film, a silicon carbonitride film, or a silicon oxycarbonitride film; wherein the film deposition method for forming the silicon carbide film, silicon oxide film, silicon nitride film, silicon carbonitride film, or silicon oxycarbonitride film further comprises contacting the exposed surface of the first substrate, or the seed layer disposed on the surface of the second substrate, respectively with a source of carbon comprising a carbon-containing precursor, a source of oxygen comprising an oxygen-containing precursor, a source of nitrogen comprising nitrogen-containing precursor, or a combination of any two or more of the source of carbon comprising a carbon-containing precursor, the source of oxygen comprising an oxygen-containing precursor, and the source of nitrogen comprising nitrogen-containing precursor.

Assignees

• Dow Corning
• Dow Corning Corportion

Inventors

• Zhou Xiaobing

Classifications

• H10P14/69433

  the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz · CPC title

• H10P14/69215

  the material being a silicon oxide, e.g. SiO2 · CPC title

• H10P14/6927

  the material being a silicon oxynitride, e.g. SiON or SiON:H · CPC title

• H10P14/6682

  the compound being a silane, e.g. disilane, methylsilane or chlorosilane · CPC title

• H10P14/6342

  Liquid deposition, e.g. spin-coating, sol-gel techniques or spray coating · CPC title