Magnetic sensor calibration and servo for planar motor stage

Patent metadata

Field	Value
Publication number	US-9921495-B2
Application number	US-201414158563-A
Country	US
Kind code	B2
Filing date	Jan 17, 2014
Priority date	Jan 23, 2013
Publication date	Mar 20, 2018
Grant date	Mar 20, 2018

Abstract

A stage assembly for positioning a device includes: (i) a stage that retains the device; (ii) a base; (iii) a mover assembly that moves the stage along a first axis, along a second axis, and along a third axis relative to the base; (iv) a magnetic sensor system that monitors the movement of the stage along the first, second and third axes, the magnetic sensor system generating a magnetic sensor signal; (v) a second sensor system that monitors the movement of the stage along the first, second and third axes, the second sensor system generating a second sensor signal; and (vi) a control system that controls the mover assembly using at least one of the magnetic sensor signal and the second sensor signal.

First claim

What is claimed is:

1. A stage assembly for positioning a device along a first axis, along a second axis, and along a third axis, the stage assembly comprising:
a stage that is adapted to retain the device;
a base;
a mover assembly that moves the stage along the first, second and third axes relative to the base;
a magnetic sensor system that monitors the movement of the stage along at least one of the first, second and third axes, the magnetic sensor system generating a magnetic sensor signal;
a second sensor system that monitors the movement of the stage along the first, second and third axes, the second sensor system generating a second sensor signal; and
a control system that controls the mover assembly using at least one of the magnetic sensor signal and the second sensor signal; wherein the control system uses the magnetic sensor signal to control the mover assembly during initialization and during a loss of the second sensor signal.

2. The stage assembly of claim 1 wherein the second sensor system is an interferometer system.

3. The stage assembly of claim 1 wherein the second sensor system is an encoder system.

4. The stage assembly of claim 1 wherein the control system utilizes the second sensor signal to calibrate the magnetic sensor signal.

5. The stage assembly of claim 1 wherein the magnetic sensor system is calibrated using at least one of the following calibrations: (i) sensor decoupling from the coil flux; (ii) sensor offset removal and gain equalization; (iii) Quadrant Z gain calibrations; and (iv) correction maps for XZ and YZ quadrant positions.

6. The stage assembly of claim 1 wherein the mover assembly is a planar motor that includes a magnet assembly that is secured to the stage and a conductor assembly that is secured to the base.

7. The stage assembly of claim 6 wherein the conductor assembly includes a plurality of coils and wherein the magnetic sensors are positioned below the coils.

8. The stage assembly of claim 7 wherein each magnetic sensor is positioned below one of the coils, offset from a center of the coil.

9. An exposure apparatus including an illumination source, and the stage assembly of claim 1 that moves the stage relative to the illumination system.

10. A process for manufacturing a device that includes the steps of providing a substrate and forming an image to the substrate with the exposure apparatus of claim 9 .

11. The stage assembly of claim 1 wherein the magnetic sensor system includes a plurality of hall sensors.

12. A method for positioning a device along a first axis, along a second axis, and along a third axis, the method comprising the steps of:
providing a base;
retaining the device with a stage;
moving the stage along the first, second and third axes relative to the base with a mover assembly;
monitoring the movement of the stage along at least one of the first, second and third axes with a magnetic sensor system that generates a magnetic sensor signal;
monitoring the movement of the stage along the first, second and third axes with a second sensor system that generates a second sensor signal; and
controlling the mover assembly with a control system that uses at least one of the magnetic sensor signal and the second sensor signal; wherein the step of controlling includes the control system utilizing the magnetic sensor signal to control the mover assembly during initialization and during a loss of the second sensor signal.

13. The method of claim 12 wherein the step of controlling includes the control system utilizing the second sensor signal to calibrate the magnetic sensor signal.

14. The method of claim 13 wherein the step of controlling includes the control system calibrating the magnetic sensor using at least one of the following calibrations: (i) sensor decoupling from the coil flux; (ii) sensor offset removal and gain equalization; (iii) Quadrant Z gain calibrations; and (iv) correction maps for XZ and YZ quadrant positions.

15. The method of claim 12 wherein the step of moving includes the mover assembly having a magnet assembly that is secured to the stage and a conductor assembly that is secured to the base.

16. The method of claim 15 wherein the conductor assembly includes a plurality of coils and wherein the magnetic sensor system includes a plurality of magnetic sensors that are positioned below the coils.

17. The method of claim 16 wherein each magnetic sensor is positioned below one of the coils, offset from a center of the coil.

18. A stage assembly for positioning a device along a first axis, along a second axis, and along a third axis, the stage assembly comprising:
a stage that is adapted to retain the device;
a base;
a mover assembly that moves the stage along the first, second and third axes relative to the base;
a magnetic sensor system that monitors the movement of the stage along at least one of the first, second and third axes, the magnetic sensor system generating a magnetic sensor signal;
a second sensor system that monitors the movement of the stage along the first, second and third axes, the second sensor system generating a second sensor signal; and
a control system that controls the mover assembly using at least one of the magnetic sensor signal and the second sensor signal; and
wherein the magnetic sensor system is calibrated using at least one of the following calibrations: (i) sensor decoupling from the coil flux; (ii) sensor offset removal and gain equalization; (iii) Quadrant Z gain calibrations; and (iv) correction maps for XZ and YZ quadrant positions.

19. A method for positioning a device along a first axis, along a second axis, and along a third axis, the method comprising the steps of:
providing a base;
retaining the device with a stage;
moving the stage along the first, second and third axes relative to the base with a mover assembly;
monitoring the movement of the stage along at least one of the first, second and third axes with a magnetic sensor system that generates a magnetic sensor signal;
monitoring the movement of the stage along the first, second and third axes with a second sensor system that generates a second sensor signal; and
controlling the mover assembly with a control system that uses at least one of the magnetic sensor signal and the second sensor signal; wherein the step of controlling includes the control system calibrating the magnetic sensor system using at least one of the following calibrations: (i) sensor decoupling from the coil flux; (ii) sensor offset removal and gain equalization; (iii) Quadrant Z gain calibrations; and (iv) correction maps for XZ and YZ quadrant positions.

20. A method for positioning a device along a first axis, along a second axis, and along a third axis, the method comprising the steps of:
providing a base;
retaining the device with a stage;
moving the stage along the first, second and third axes relative to the base with a mover assembly;
monitoring the movement of the stage along each of the first, second and third axes with a magnetic sensor system that generates a magnetic sensor signal;
monitoring the movement of the stage along the first, second and third axes with a second sensor system that generates a second sensor signal; and
controlling the mover assembly with a control system that uses at least one of the magnetic sensor signal and the second sensor signal; wherein the step of controlling includes the control system utilizing the magnetic sensor signal to control the mover assembly during at least one of initializatio

Assignees

• Nikon Corp

Inventors

• Yang Pai-Hsueh
• Binnard Michael
• Wells J Kyle
• Mahadeswaraswamy Chetan
• Ogiwara Tsutomu

Classifications

• G03F7/70775 Primary

  Position control, e.g. interferometers or encoders for determining the stage position · CPC title

• G03F7/70758

  Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving · CPC title

• G03F7/7085

  Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load · CPC title

• H02K41/031

  of the permanent magnet type · CPC title

• H02K2201/18

  Machines moving with multiple degrees of freedom · CPC title