Substrate holding device, exposure apparatus, and device manufacturing method

Patent metadata

Field	Value
Publication number	US-9921490-B2
Application number	US-201415033327-A
Country	US
Kind code	B2
Filing date	Oct 29, 2014
Priority date	Oct 30, 2013
Publication date	Mar 20, 2018
Grant date	Mar 20, 2018

Abstract

A substrate holding device is equipped with a substrate holder that adsorbs and holds a substrate, and a plurality of vertical movement pin units that each have, at one end, an adsorption section to adsorb a rear surface of the substrate, and are movable relative to the substrate holder in a state of adsorbing the rear surface of the substrate with the adsorption section. The plurality of vertical movement pin units each have at least part including the adsorption section that is displaced in at least one direction, by an action of a force received from the adsorbed substrate.

First claim

The invention claimed is:

1. A substrate holding device that holds a substrate, the device comprising:
a substrate holding section on which the substrate is adsorbed and held; and
a plurality of movable members that each have an adsorption section to adsorb a rear surface of the substrate, at one end, the plurality of movable members being movable relative to the substrate holding section in a state of adsorbing the rear surface of the substrate with the adsorption sections, wherein
at least one movable member of the plurality of movable members has at least part that is displaceable in at least one direction, by an action of a force received from the adsorbed substrate, the at least part including the adsorption section, the at least one direction including a direction for moving closer to a center of a substrate holding area of the substrate holding section.

2. A substrate holding device that holds a substrate, the device comprising:
a substrate holding section on which the substrate is adsorbed and held; and
a plurality of movable members that each have one end including an adsorption section to adsorb a rear surface of the substrate and the other end on an opposite side to the one end, the plurality of movable members being each movable relative to the substrate holding section in a state of adsorbing the rear surface of the substrate with the one end, wherein
at least one movable member of the plurality of movable members is provided with a displacement section that is disposed between the one end and the other end and is displaceable in at least one direction by an action of a force received from the substrate, the at least one direction including a direction for moving closer to a center of a substrate holding area of the substrate holding section.

3. The substrate holding device according to claim 1 , wherein
at least three of the movable members are provided.

4. The substrate holding device according to claim 3 , wherein
each of the at least three movable members has at least part including the adsorption section that is displaced by the action of the force, and
the at least part of the at least one movable member is displaced in a direction different from a direction in which the at least part of another movable members is displaced.

5. The substrate holding device according to claim 4 , wherein
at least respective parts of the plurality of movable members are displaced in directions different from each other by the action of the force, the at least respective parts each including the adsorption section.

6. The substrate holding device according to claim 1 , wherein
the respective movable members are disposed at positions of vertices of a regular polygon in a substrate holding area of the substrate holding section.

7. The substrate holding device according to claim 6 , wherein
at least part of each of the movable members is displaced in a radial direction of a circumcircle of the regular polygon by the action of the force, the at least part including the adsorption section.

8. The substrate holding device according to claim 7 , wherein
three of the movable members are provided.

9. The substrate holding device according to claim 7 , wherein
six of the movable members are provided, and
of the six movable members, each of three movable members that are not adjacent to each other has at least part including the adsorption section that is displaced in a radial direction of the circumcircle by the action of the force, and each of the remaining three movable members has at least part including the adsorption section that is displaced in at least the radial direction and a tangential direction of the circumcircle.

10. The substrate holding device according to claim 1 , wherein
in the movable member that has at least part including the adsorption section displaced by the action of the force, the at least part is further turned around an axis that is orthogonal to an axis in a direction in which the at least part is displaced, by the action of the force.

11. The substrate holding device according to claim 1 , wherein
the plurality of movable members each have at least part that is displaced by receiving the action of the force, the at least part including the adsorption section, and
the at least one direction further includes a direction for moving away from the center of the substrate holding area of the substrate section.

12. The substrate holding device according to claim 1 , further comprising:
a base member to which the other end of each of the plurality of movable members is fixed, and which moves integrally with the plurality of movable members, wherein
the movable member having at least part including the adsorption section that is displaced by the action of the force includes
the adsorption section,
a spring member that has one end portion provided with the adsorption section and the other end portion fixed to the base member, and
an annular member that is bendable freely and surrounds the spring member entirely along a longitudinal direction of the spring member.

13. The substrate holding device according to claim 8 , further comprising:
a base member to which the other end of each of the three movable members is fixed, and which moves integrally with the three movable members, wherein
the three movable members each include
(i) a bar-shaped spring member having one end portion provided with the adsorption section and the other end portion fixed to the base member,
(ii) a plate spring member having one end portion provided with the adsorption section and the other end portion fixed to the base member, and
(iii) a bar-shaped member having one end portion provided with the adsorption section that is displaceable and the other end portion fixed to the base member.

14. The substrate holding device according to claim 1 , wherein
the at least part that includes the adsorption section adsorbing the substrate is displaceable in the at least one direction so that a change in shape of the substrate is not prevented, the change in shape occurring when the substrate is mounted on a substrate holding area of the substrate holding section.

15. An exposure apparatus that exposes a substrate with an energy beam, the apparatus comprising:
the substrate holding device according to claim 1 , that holds the substrate on the substrate holding section; and
a pattern generating device that generates a pattern on the substrate by exposing the substrate with the energy beam.

16. A device manufacturing method, including:
exposing a substrate using the exposure apparatus according to claim 15 ; and
developing the substrate that has been exposed.

17. The substrate holding device according to claim 2 , wherein
at least three of the movable members are provided.

18. The substrate holding device according to claim 17 , wherein
each of the at least three movable members has at least part including the adsorption section that is displaced by the action of the force, and
at least part of the at least one movable member is displaced in a direction different from a direction in which the at least part of another movable members is displaced.

19. The substrate holding device according to claim 18 , wherein
at least respective parts of the plurality of movable members are displaced in directions different from each other by the action of the force, the at least respective parts each including the adsorption section.

20. The substrate holding device according to claim 2 , wherein
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Assignees

• Nikon Corp

Inventors

• Shibazaki Yuichi

Classifications

• H10P72/7612 Primary

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H01L21/68742

  Electricity · mapped topic

• G03F7/70733

  Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask · CPC title

• G03F7/70716 Primary

  Stages · CPC title

• G03F7/707

  Chucks, e.g. chucking or un-chucking operations or structural details · CPC title