X-Y table with a position-measuring device

Patent metadata

Field	Value
Publication number	US-9921468-B2
Application number	US-201615291088-A
Country	US
Kind code	B2
Filing date	Oct 12, 2016
Priority date	Oct 13, 2015
Publication date	Mar 20, 2018
Grant date	Mar 20, 2018

Abstract

An X-Y table with a position-measuring device includes a table which is disposed on a support and is movable on the support so that altogether the table is positionable in a plane parallel to an underlying stationary base. Two groups of scanning heads are disposed on the support. For position measurement in two directions, a respective one of the scanning heads directs light through a respective transmissive scale attached along an edge of the table such that a respective reflective scale, which is stationary relative to a processing tool disposed above the table, reflects the light through the respective transmissive scale back to the respective scanning head. In a central position of the table, the two groups are in positional correspondence with the transmissive scales, and, in either of two edge positions of the table, only one of the two groups is in positional correspondence with the transmissive scales.

First claim

What is claimed is:

1. An X-Y table with a position-measuring device, comprising:
a table which is disposed on a support that is movable relative to a underlying stationary base in one of two orthogonal directions of a plane of the table, the table being movable on the support in the other of the two directions so that altogether the table is positionable in a plane parallel to the underlying stationary base; and
two groups of scanning heads disposed on the support, each of the two groups of scanning heads including at least two scanning heads, wherein, for position measurement in each of the two directions, a respective one of the scanning heads is configured to direct light through a respective transmissive scale attached along an edge of the table such that a respective reflective scale, which is stationary relative to a processing tool disposed above the table, reflects the light through the respective transmissive scale back to the respective scanning head,
wherein, in a central position of the table, the at least two scanning heads of each of the two groups of scanning heads are in positional correspondence with the transmissive scales, and, in either of two edge positions of the table, only the at least two scanning heads of one of the two groups of scanning heads is in positional correspondence with the transmissive scales.

2. The device as recited in claim 1 , wherein each respective one of the transmissive scales scanned by the respective one of the scanning heads, and an associated one of the reflective scales are orthogonal to one another and extend parallel to the two directions of movement of the table.

3. The device as recited in claim 1 , wherein each of the two groups of scanning heads includes at least three scanning heads.

4. The device as recited in claim 1 , wherein the two groups of scanning heads, including the scanning heads therein, are arranged symmetrically with respect to each other relative to an axis of symmetry.

5. The device as recited in claim 4 , wherein the axis of symmetry runs through a center of the processing tool.

6. The device as recited in claim 1 , wherein the scanning heads are configured to sense a distance between the respective transmissive scale being scanned and an associated one of the reflective scales in a direction normal to the plane of the table.

7. The device as recited in claim 1 , wherein the X-Y table is configured to perform line-by-line processing of an object placed on the table, the processing of a line being performed during a scanning movement of the table in a first direction, followed by a line-feed movement in a second direction perpendicular to the first direction.

8. The device as recited in claim 7 , wherein the support carrying the table is configured to perform the scanning movement relative to the underlying base, carrying the table along with it, and wherein the table is configured to perform the line-feed movement relative to the support.

9. The device as recited in claim 8 , wherein the two groups of scanning heads, including the scanning heads therein, are arranged in such a way that the scanning movement of the table is performable without switching between the two groups.

10. The device as recited in claim 7 , wherein the table is configured to perform the scanning movement relative to the support, and wherein the support is configured to perform the line-feed movement relative to the underlying base, carrying the table along with it.

11. The device as recited in claim 10 , wherein the two groups of scanning heads, including the scanning heads therein, are arranged in such a way that, during each scanning movement of the table, it is necessary to switch between the groups for the position measurement.

Assignees

• Heidenhain Gmbh Dr Johannes

Inventors

• Holzapfel Wolfgang
• Drescher Joerg
• Meissner Markus
• Joerger Ralph
• Musch Bernhard
• Kaelberer Thomas

Classifications

• H10P74/203

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• H10P72/04 Primary

  Apparatus for manufacture or treatment · CPC title

• G01D5/30

  the beams of light being detected by photocells · CPC title

• G03F7/00 Primary

  Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (using photoresist structures for special production processes, see the relevant places, e.g. B44C, H10P76/00, H05K) · CPC title

• G01D5/266 Primary

  by interferometric means (G01D5/353 takes precedence) · CPC title