Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light

Patent metadata

Field	Value
Publication number	US-9920993-B2
Application number	US-201213468381-A
Country	US
Kind code	B2
Filing date	May 10, 2012
Priority date	May 13, 2011
Publication date	Mar 20, 2018
Grant date	Mar 20, 2018

Abstract

A photodetector element for receiving radiated light from a surface of a semiconductor wafer loses a detection function because the intensity of the received light exceeds a detection limit while a flash lamp emits light. Measurement is not performed during the above-mentioned period, and the intensity of the radiated light from the surface of the semiconductor wafer is measured after the flash lamp stops emitting light and the photodetector element restores the detection function. Then, the temperature of the surface of the semiconductor wafer heated by irradiation with a flash of light is calculated based on the measured intensity of the radiated light. Accordingly, even in a case where intense irradiation is performed in an extremely short period of time, such as flash irradiation, the flash of light does not act as ambient light, which enables to obtain the surface temperature of the semiconductor wafer.

First claim

What is claimed is:

1. A method for a heat treatment apparatus heating a substrate by irradiating the substrate with light, comprising the steps of:
(a) irradiating a substrate with light from a plurality of halogen lamps, to thereby preheat the substrate;
(b) irradiating the substrate with light from a plurality of flash lamps after said step (a);
(c) measuring an intensity of radiated light from a surface of said substrate, the radiated light being received by a photodetector element after the irradiation in said step (b) is stopped and said photodetector element recovers a detection function thereof, and an output signal from said photodetector element becomes lower than a level of saturation;
(d) calculating, using a controller having a CPU, a ROM and a RAM, a temperature of the surface of said substrate heated in said step (b) based on the intensity of the radiated light from the surface of said substrate, the intensity being measured in said step (c), wherein
in said step (c), a plurality of intensities of the radiated light from the surface of said substrate are measured in chronological order after the irradiation in said step (b) is stopped, and
in said step (d), an exponentially approximate equation approximated by least square method indicating changes in time of the intensity of the radiated light is obtained from said plurality of intensities of the radiated light measured in chronological order in said step (c), to thereby calculate a maximum temperature reached by the surface of said substrate from said exponentially approximate equation, said equation being in the form of f(t−a)=b t +c, wherein “t” represents time and “a”, “b”, “c”, are coefficients determined so as to obtain a smallest sum of square of differences between levels of output signals V 1 , V 2 , V 3 ,. . . V n , at times of measurement t 21 , t 22 , t 23 , . . . tn, respectively, and f(t−a); and
using said calculating step (d) to control said flash lamps to activate implanted impurities in said substrate to join metal and silicon, or to crystalize polysilicon, or to recover crystal defects caused by the implanted impurities.

2. The method according to claim 1 , wherein
in said step (c), said plurality of intensities of the radiated light are measured until the temperature of the surface of said substrate decreases to the temperature near the preheating temperature in said step (a).

Assignees

• Hashimoto Kazuyuki
• Kusuda Tatsufumi
• Screen Holdings Co Ltd

Inventors

• Hashimoto Kazuyuki
• Kusuda Tatsufumi

Classifications

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0436

  mainly by radiation · CPC title

• F27D5/0037

  Supports specially adapted for semi-conductors · CPC title

• F27B17/0025 Primary

  specially adapted for treating semiconductor wafers · CPC title

• H01L21/67115

  Electricity · mapped topic