Piezoelectric element, method of manufacturing piezoelectric element, piezoelectric actuator, and electronic apparatus

Patent metadata

Field	Value
Publication number	US-9917245-B2
Application number	US-201615354349-A
Country	US
Kind code	B2
Filing date	Nov 17, 2016
Priority date	Nov 27, 2015
Publication date	Mar 13, 2018
Grant date	Mar 13, 2018

Abstract

Provided is a piezoelectric element including a substrate, electrodes, and a piezoelectric film, the piezoelectric film including an oxide including Ba, Ca, Ti, and Zr, and at least one element of Mn and Bi in which: 0.09≦x≦0.30 is satisfied, where x is a mole ratio of Ca to a sum of Ba and Ca; 0.025≦y≦0.085 is satisfied, where y is a mole ratio of Zr to a sum of Ti, Zr, and Sn; and 0≦z≦0.02 is satisfied, where z is a mole ratio of Sn to the sum of Ti, Zr, and Sn; a total content S ave of Mn and Bi is 0.0020 moles or more and 0.0150 moles or less for 1 mole of the oxide; and a total content S bou of Mn and Bi in a region of the piezoelectric film adjacent to one of the electrodes is smaller than S ave .

First claim

What is claimed is:

1. A piezoelectric element comprising:
a substrate;
electrodes; and
a piezoelectric film,
wherein the piezoelectric film comprises an oxide including Ba, Ca, Ti, and Zr, and at least one element of Mn and Bi,
wherein 0.09≦x≦0.30, where x is a mole ratio of Ca to a sum of Ba and Ca,
wherein 0.025≦y≦0.085, where y is a mole ratio of Zr to a sum of Ti, Zr, and Sn,
wherein 0≦z≦0.02, where z is a mole ratio of Sn to the sum of Ti, Zr, and Sn,
wherein a total content S ave of the at least one element of Mn and Bi is 0.0020 moles to 0.0150 moles for 1 mole of the oxide, and
wherein a total content S bou of the at least one element of Mn and Bi in a region of the piezoelectric film adjacent to one of the electrodes is smaller than S ave .

2. The piezoelectric element according to claim 1 , wherein the piezoelectric film comprises a perovskite-type metal oxide expressed by general formula (1):
(Ba 1-x Ca x )(Ti 1-y-z Zr y Sn z )O 3   (1),

provided that 0.09≦x≦0.30, 0.025≦y≦0.085, and 0≦z≦0.02.

3. The piezoelectric element according to claim 1 , wherein the electrodes comprise any one of Au, Ag, Pd, Pt, Ni, and Ru.

4. The piezoelectric element according to claim 1 , wherein the total content S bou of the at least one element of Mn and Bi in a region that is 5% or less of a thickness of the piezoelectric film is smaller than S ave .

5. The piezoelectric element according to claim 1 , wherein S bou and S ave are such that 0%≦S bou /S ave ≦10%.

6. The piezoelectric element according to claim 1 , wherein, in the region of the piezoelectric film adjacent to the one of the electrodes, |x-x′|≦0.02, |y-y′|≦0.01, and |z-z′|≦0.01 when a local composition of Ba, Ca, Ti, Zr, and Sn is expressed by general formula (2):
(Ba 1-x′ Ca x′ )(Ti 1-y′-z′ Zr y′ Sn z′ )O 3   (2).

7. The piezoelectric element according to claim 1 , further comprising an adhesion component comprising a metal of Group 4 elements and/or Group 5 elements, and existing between the one of the electrodes and the substrate.

8. The piezoelectric element according to claim 1 , wherein the piezoelectric film has an aggregate structure comprising a grain having a columnar structure.

9. A piezoelectric actuator comprising:
the piezoelectric element of claim 1 ; and
a diaphragm provided to the piezoelectric element.

10. A vibration correction mechanism comprising two or more piezoelectric actuators of claim 9 ,
wherein the two or more piezoelectric actuators are arranged such that, when a voltage is applied thereto, the two or more piezoelectric actuators expand and contract in two or more directions.

11. An optical device comprising:
the vibration correction mechanism of claim 10 ; and
an optical member held by the vibration correction mechanism.

12. An image pickup apparatus comprising:
the vibration correction mechanism of claim 10 ; and
an image pickup element unit held by the vibration correction mechanism.

13. A variable optical member comprising:
the piezoelectric actuator of claim 9 ;
an optical member dynamically connected to the piezoelectric actuator; and
a mechanism for changing a shape of the optical member through deformation of the piezoelectric actuator.

14. An optical device comprising the variable optical member of claim 13 .

15. An optical switch comprising the variable optical member of claim 13 .

16. A sound component comprising the piezoelectric actuator of claim 15 and being configured to perform one of sending and receiving sound through driving of the piezoelectric actuator.

17. A movable optical member comprising:
the piezoelectric actuator of claim 9 ;
an optical member dynamically connected to the piezoelectric actuator; and
a mechanism for moving and/or rotating the optical member through deformation of the piezoelectric actuator.

18. An optical device comprising the movable optical member of claim 17 .

19. An optical switch comprising the movable optical member of claim 17 .

20. A micromirror device comprising:
a plurality of micromirrors; and
a plurality of piezoelectric actuators dynamically connected to the plurality of micromirrors, respectively,
wherein each of the plurality of piezoelectric actuators is the piezoelectric actuator of claim 9 .

21. An ultrasonic wave probe comprising the piezoelectric actuator of claim 9 , the ultrasonic wave probe having a function of oscillating an ultrasonic wave and a function of receiving a reflected wave.

22. An ultrasonograph comprising:
the ultrasonic wave probe of claim 21 ;
a signal processing unit; and
an image generating unit.

23. A liquid ejection head comprising:
a liquid chamber comprising a vibration portion comprising the piezoelectric element of claim 1 ; and
an ejection orifice communicating with the liquid chamber.

24. A liquid ejection apparatus comprising:
a placing portion for a transfer target; and
the liquid ejection head of claim 23 .

25. An angular velocity sensor comprising the piezoelectric element of claim 1 and being configured to convert change in shape of the piezoelectric element into angular velocity information.

26. A vibration power generator comprising the piezoelectric element of claim 1 and being configured to convert vibrational energy into electric energy.

27. An electronic apparatus comprising:
an electronic component; and
the piezoelectric element of claim 1 , the piezoelectric element being provided to the member.

28. A piezoelectric element comprising:
a substrate;
a piezoelectric film; and
a plurality of comb electrodes,
wherein the piezoelectric film comprises an oxide including Ba, Ca, Ti, and Zr, and at least one element of Mn and Bi,
wherein 0.09≦x≦0.30, where x is a mole ratio of Ca to a sum of Ba and Ca,
wherein 0.025≦y≦0.085, where y is a mole ratio of Zr to a sum of Ti, Zr, and Sn,
wherein 0≦z≦0.02, where z is a mole ratio of Sn to the sum of Ti, Zr, and Sn,
wherein a total content S ave of the at least one element of Mn and Bi is 0.0020 moles to 0.0150 moles for 1 mole of the oxide, and
wherein a total content S bou of the at least one element of Mn and Bi in a region of the piezoelectric film adjacent to one of the plurality of comb electrodes is smaller than S ave .

29. The piezoelectric element according to claim 28 , wherein the piezoelectric film comprises a perovskite-type metal oxide expressed by general formula (1):
(Ba 1-x Ca x )(Ti 1-y-z Zr y Sn z )O 3   (1),

provided that 0.09≦x≦0.30, 0.025≦y≦0.085, and 0≦z≦0.02.

30. A surface acoustic wave generator, comprising the piezoelectric element of claim 28 .

31. A piezoelectric shutter, comprising:
the surface acoustic wave generator of claim 30 ; and
a light-shielding component configured to move through driving of the surface acoustic wave generator.

32. An electronic apparatus comprising:
an electronic component; and
the piezoelectric element of claim 28 , the piezoelectric element being provided to the member.

33. A method of manufacturing a piezoelectric element, comprising:
(a) applying a first raw material liquid onto a substrate having a first electrode layer formed on a surface thereof to form an applied layer;
(b) firing the applied layer every time the applied layer is formed to form a piezoele

Assignees

• Canon Kk

Inventors

• Kubota Makoto
• Matsuda Takanori
• Miura Kaoru

Classifications

• H01L41/0471

  Electricity · mapped topic

• G01C19/56

  Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces · CPC title

• H01L41/1871 Primary

  Electricity · mapped topic

• H01L41/0986

  Electricity · mapped topic

• G02B26/04 Primary

  by periodically varying the intensity of light, e.g. using choppers (shutters, diaphragms for cameras G03B9/00; devices for eliminating or reducing the effect of flicker in projection systems G03B21/40) · CPC title