Focused radiation beam induced deposition

Patent metadata

Field	Value
Publication number	US-9915866-B2
Application number	US-201514942893-A
Country	US
Kind code	B2
Filing date	Nov 16, 2015
Priority date	Nov 16, 2015
Publication date	Mar 13, 2018
Grant date	Mar 13, 2018

Abstract

A semiconductor device fabrication method includes irradiating a first surface of a substrate with a radiation beam. While irradiating the first surface of the substrate, a precursor gas is introduced near the first surface to deposit a layer including a first material. The precursor gas is removed from near the first surface after the depositing the layer. After the removing the precursor gas and prior to forming another layer over the layer, while irradiating a second surface of the layer, a cleaning gas is introduced near the second surface of the layer to transform the first material into a second material.

First claim

What is claimed is:

1. A semiconductor device fabrication method, comprising:
irradiating a first surface of a substrate with a radiation beam;
while irradiating the first surface of the substrate, introducing a precursor gas near the first surface to deposit a layer including a first material;
removing the precursor gas from near the first surface after the depositing the layer; and
after the removing the precursor gas and prior to forming another layer over the layer, while irradiating a second surface of the layer, introducing a cleaning gas near the second surface of the layer to transform the first material into a second material.

2. The semiconductor device fabrication method of claim 1 , further comprising:
inducing a reaction between the cleaning gas and impurities in the first material of the layer using the radiation beam.

3. The semiconductor device fabrication method of claim 1 , wherein the second material has a second impurity level less than a first impurity level of the first material.

4. The semiconductor device fabrication method of claim 1 , wherein the cleaning gas is selected from the group consisting of: nitrogen dioxide (NO 2 ), nitrous oxide (N 2 O), nitrosylazide (N 4 O), nitrate radical (NO 3 ), dinitrogen trioxide (N 2 O 3 ), dinitrogen tetroxide (N 2 O 4 ), dinitrogen pentoxide (N 2 O 5 ), trinitramide (N(NO 2 ) 3 ), and oxygen (O 2 ).

5. The semiconductor device fabrication method of claim 1 , further comprising:
while introducing the precursor gas, introducing an assistance gas near the first surface of the substrate.

6. The semiconductor device fabrication method of claim 5 , wherein the assistance gas is different from the cleaning gas.

7. The semiconductor device fabrication method of claim 5 , wherein the assistance gas is the same as the cleaning gas.

8. A method comprising:
irradiating a first surface of a substrate with a radiation beam;
while irradiating the first surface, performing a sequence to form a first cleaned sublayer over the substrate, wherein the sequence includes:
introducing a precursor gas near the first surface of the substrate to deposit a first sublayer;
after the depositing the first sublayer, removing the precursor gas from near the first surface of the substrate; and
after the removing the precursor gas, introducing a cleaning gas near the deposited first sublayer to transform the deposited first sublayer into the first cleaned sublayer.

9. The method of claim 8 , further comprising:
inducing a reaction between the cleaning gas and impurities in the deposited first sublayer using the radiation beam.

10. The method of claim 9 , wherein the impurities include carbon.

11. The method of claim 8 , wherein an impurity level of the first cleaned sublayer is at least less than about 10% of an impurity level of the deposited first sublayer.

12. The method of claim 8 , further comprising:
while introducing the precursor gas, introducing an assistance gas near the first surface of the substrate.

13. The method of claim 12 , wherein the assistance gas is different from the cleaning gas.

14. The method of claim 8 , wherein the removing the precursor gas from near the first surface of the substrate includes:
pumping the precursor gas out of a chamber including the substrate.

15. The method of claim 8 , wherein the first surface includes a repair region of a mask in a chamber, further comprising:
forming a repair feature in the repair region, wherein the repair feature includes the first cleaned sublayer.

16. The method of claim 15 , wherein the forming the repair feature further includes:
while irradiating the repair region and after the transforming the deposited first sublayer into the first cleaned sublayer, injecting the precursor gas into the chamber to form a second film over the first cleaned sublayer;
stopping the injection of the precursor gas after the forming the second film; and
while irradiating the repair region and after forming the second film, injecting the cleaning gas into the chamber, wherein the cleaning gas reacts with an impurity material in the second film to transform the second film into a cleaned second sublayer.

17. The method of claim 15 , wherein the forming the repair feature further includes:
forming a plurality of cleaned sublayers by repeating the steps of injecting the precursor gas, stopping the injection of the precursor gas, and injecting the cleaning gas.

18. The method of claim 15 , wherein the mask is a chromeless phase lithography (CPL) mask.

19. The method of claim 18 , further comprising:
projecting a second radiation beam onto the mask, wherein a first radiation passing through the repair feature disposed in the repair region has a first phase substantially similar to a second phase of a second radiation passing through a second region of the mask.

20. The method of claim 15 , wherein the mask is an extreme ultraviolet (EUV) mask.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Shih Hsun-Chuan
• Chin Sheng-Chi
• Chu Yuan-Chih
• Li Yueh-Hsun

Classifications

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10P14/6529

  by exposure to a gas or vapour · CPC title

• H10P14/6528

  In-situ cleaning after layer formation, e.g. removing process residues · CPC title

• H10P14/6338

  the reactions being activated by other means than plasma or thermal, e.g. photo-CVD · CPC title

• H10P14/43

  Chemical deposition, e.g. chemical vapour deposition [CVD] · CPC title