Photovoltaic device having layer with varying crystallinity

Patent metadata

Field	Value
Publication number	US-9911888-B2
Application number	US-201514976798-A
Country	US
Kind code	B2
Filing date	Dec 21, 2015
Priority date	May 10, 2012
Publication date	Mar 6, 2018
Grant date	Mar 6, 2018

Abstract

A method for forming a photovoltaic device includes providing a substrate. A layer is deposited to form one or more layers of a photovoltaic stack on the substrate. The depositing of the amorphous layer includes performing a high power flash deposition for depositing a first portion of the layer. A low power deposition is performed for depositing a second portion of the layer.

First claim

What is claimed is:

1. A photovoltaic device, comprising:
a transparent conductive oxide (TCO) layer;
a buffer layer of a germanium containing composition on the transparent conductive layer, the buffer layer comprises a p-type dopant comprising B, Ga, In or combinations thereof, the buffer layer being a single material layer including a first portion of the layer and a second portion of the layer, the first and second portions of the layer including different crystallinity levels, the first portion being substantially amorphous and the second portion being substantially microcrystalline;
a semiconductor layer of a p-type conductivity, the semiconductor layer of the p-type conductivity comprised of silicon and having a lesser germanium content than the buffer layer, wherein the different crystallinity levels of the buffer layer being provided adjacent to the transparent conductive layer and the such that use of the different crystallinity levels better transitions band gap energies between the transparent conductive layer, the buffer layer and the semiconductor layer of the p-type conductivity.

2. The photovoltaic device of claim 1 , wherein the buffer layer is deposited using a low power and high power two stage deposition process.

3. The photovoltaic device of claim 2 , wherein the buffer layer includes a first portion in contact with the semiconductor layer of the p-type conductivity formed using a low power deposition to provide a low crystallinity, and the buffer layer includes a second portion in contact with the TCO layer formed using a high power deposition to provide a high crystallinity.

4. The photovoltaic device of claim 3 , wherein the TCO layer comprises a fluorine-doped tin oxide (SnO 2 :F, or “FTO”), doped zinc oxide (e.g., ZnO:Al), indium tin oxide (ITO) or combination thereof.

5. The photovoltaic device of claim 1 , wherein the buffer layer comprises a hydrogenated material.

6. The photovoltaic device of claim 1 , wherein the semiconductor layer of the p-type conductivity comprises an amorphous, microcrystalline, or single-crystalline p-doped silicon-containing material.

7. The photovoltaic device of claim 1 , wherein the semiconductor layer of the p-type conductivity comprises hydrogenated amorphous, microcrystalline, or single-crystalline p-doped silicon-containing material.

8. The photovoltaic device of claim 1 further comprising an intrinsic layer present on the p-type layer.

9. The photovoltaic device of claim 8 , wherein the intrinsic layer comprises an amorphous silicon material.

10. The photovoltaic device of claim 8 further comprising an n-type layer atop the intrinsic layer.

11. The photovoltaic device of claim 10 , wherein the n-type layer comprises hydrogenated microcrystalline (μc-Si:H), single crystalline (Si) or an amorphous (a-Si) layer.

12. The photovoltaic device of claim 1 , wherein the second portion being substantially microcrystalline provides for said better transitions band gap energies to said p-type layer.

Assignees

• IBM

Inventors

• Chen Tze Chiang
• Hong Augustin J
• Kim Jeehwan
• Sadana Devendra K

Classifications

• H10P14/3411

  Silicon, silicon germanium or germanium · CPC title

• H10P14/24

  using chemical vapour deposition [CVD] · CPC title

• C23C16/50

  using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)} · CPC title

• C23C16/515

  using pulsed discharges · CPC title

• Y02E10/52

  PV systems with concentrators · CPC title