Cooling system for processing chamber
US-2024393018-A1 · Nov 28, 2024 · US
US9909786B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9909786-B2 |
| Application number | US-201113576051-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 7, 2011 |
| Priority date | Mar 8, 2010 |
| Publication date | Mar 6, 2018 |
| Grant date | Mar 6, 2018 |
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A method for distributing a refrigerant charge level in a refrigerant vapor compression system includes restarting a stopped refrigerant compression device in a first mode; operating a primary expansion device independent of refrigerant heat absorption heat exchanger superheat; comparing a condition at a refrigerant reservoir to a prescribed condition; wherein when the condition is below the prescribed condition for a prescribed interval, operating the primary expansion device to control the refrigerant heat absorption heat exchanger superheat; and transitioning the refrigerant vapor compression system to a second mode.
Opening claim text (preview).
We claim: 1. A method for distributing a refrigerant charge level in a refrigerant vapor compression system, the refrigerant vapor compression system having a refrigerant circuit including a refrigerant compression device, a refrigerant heat rejection heat exchanger downstream of said compression device, a refrigerant reservoir downstream of the heat rejection heat exchanger, a refrigerant heat absorption heat exchanger downstream of said refrigerant reservoir, and a primary expansion device disposed in the refrigerant circuit downstream of said refrigerant heat rejection heat exchanger and upstream of said refrigerant heat absorption heat exchanger, said method comprising: operating the refrigerant compression device at a speed; stopping the refrigerant compression device; after the refrigerant compression device has stopped, restarting the refrigerant compression device in a first mode; in the first mode, setting the primary expansion device to a prescribed degree of opening; in the first mode, comparing a condition at the refrigerant reservoir to a prescribed condition; in the first mode, in response to the condition being below the prescribed condition for a prescribed time interval transitioning the refrigerant vapor compression system to a second mode, the second mode comprising operating the primary expansion device to control the refrigerant heat absorption heat exchanger superheat; wherein the condition is a pressure condition and the prescribed condition is a prescribed pressure threshold; wherein the prescribed pressure threshold is a critical refrigerant pressure. 2. The method of claim 1 , wherein, in the first mode, in response to the condition being above the prescribed condition: pulsing an economizer solenoid valve in a refrigerant vapor line coupling the refrigerant reservoir to an intermediate port of the refrigerant compression device. 3. The method of claim 1 , wherein, in the first mode, in response to the condition being above the prescribed condition: pulsing a liquid injection valve in a liquid injection line between the refrigerant reservoir and an inlet port of the refrigerant compression device. 4. The method of claim 1 , wherein the refrigerant vapor compression system is configured to use C0 2 refrigerant. 5. The method of claim 1 , wherein setting the primary expansion device to a prescribed degree of opening includes increasing an opening of the primary expansion device by a set amount. 6. The method of claim 1 , wherein the second mode is an economized mode. 7. A method for distributing a refrigerant charge level in a refrigerant vapor compression system, the refrigerant vapor compression system having a refrigerant circuit including a refrigerant compression device, a refrigerant heat rejection heat exchanger downstream of said compression device, a refrigerant reservoir downstream of the heat rejection heat exchanger, a refrigerant heat absorption heat exchanger downstream of said refrigerant reservoir, and a primary expansion device disposed in the refrigerant circuit downstream of said refrigerant heat rejection heat exchanger and upstream of said refrigerant heat absorption heat exchanger, said method comprising: operating the refrigerant compression device at a speed; stopping the refrigerant compression device; after the refrigerant compression device has stopped, restarting the refrigerant compression device in a first mode; in the first mode, setting the primary expansion device to a prescribed degree of opening; in the first mode, comparing a condition at the refrigerant reservoir to a prescribed condition; in the first mode, in response to the condition being below the prescribed condition for a prescribed time interval transitioning the refrigerant vapor compression system to a second mode, the second mode comprising operating the primary expansion device to control the refrigerant heat absorption heat exchanger superheat; further comprising sensing pressure at the refrigerant reservoir using a sensor, wherein the condition is a supercritical condition of the refrigerant in the refrigerant reservoir, wherein the refrigerant vapor compression system is configured to use C0 2 refrigerant. 8. The method of claim 7 , wherein the second mode is an economized mode. 9. The method of claim 7 , wherein prior to operating in the first mode, operating the refrigerant compression device with an unload service valve open; and draining refrigerant from the refrigerant reservoir using a downstream refrigerant flow control device. 10. The method of claim 7 , wherein setting the primary expansion device to a prescribed degree of opening includes increasing an opening of the primary expansion device by a set amount.
characterised by refrigerant circuit configurations · CPC title
Pressures · CPC title
characterised by the startup of the refrigeration cycle · CPC title
at the outlet · CPC title
external to the compressor · CPC title
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