Multi-electrode electron optics

Patent metadata

Field	Value
Publication number	US-9905322-B2
Application number	US-201414541233-A
Country	US
Kind code	B2
Filing date	Nov 14, 2014
Priority date	Nov 14, 2013
Publication date	Feb 27, 2018
Grant date	Feb 27, 2018

Abstract

The invention relates to a collimator electrode stack ( 70 ), comprising: —at least three collimator electrodes ( 71 - 80 ) for collimating a charged particle beam along an optical axis (A), wherein each collimator electrode comprises an electrode body with an electrode aperture for allowing passage to the charged particle beam, wherein the electrode bodies are spaced along an axial direction (Z) which is substantially parallel with the optical axis, and wherein the electrode apertures are coaxially aligned along the optical axis; and —a plurality of spacing structures ( 89 ) provided between each pair of adjacent collimator electrodes and made of an electrically insulating material, for positioning the collimator electrodes at predetermined distances along the axial direction. Each of the collimator electrodes ( 71 - 80 ) is electrically connected to a separate voltage output ( 151 - 160 ).
The invention further relates to a method of operating a charged particle beam generator.

First claim

The invention claimed is:

1. A collimator electrode stack, comprising:
at least five collimator electrodes for collimating an electron beam along an optical axis, wherein each collimator electrode comprises an electrode body with an electrode aperture for allowing passage to the electron beam, wherein the electrode bodies are spaced along an axial direction which is substantially parallel with the optical axis, and wherein the electrode apertures are coaxially aligned along the optical axis; and
a plurality of spacing structures provided between each pair of adjacent collimator electrodes and made of an electrically insulating material, for positioning the collimator electrodes at predetermined distances along the axial direction, and wherein each of the collimator electrodes is electrically connected to a separate voltage output for providing electric potentials to the collimator electrodes,

wherein each of the collimator electrodes is configured to be kept at a fixed electric potential during operation of the collimator electrode stack, wherein two adjacent collimator electrodes are configured to be kept at different fixed electric potentials during operation of the collimator electrode stack resulting in an electric potential difference between two adjacent collimator electrodes, wherein two adjacent collimator electrodes form a pair of adjacent collimator electrodes, and wherein the at least five collimator electrodes are configured to be kept at the fixed electric potentials during operation of the collimator electrode stack such that the electric potential differences in successive pairs of adjacent collimator electrodes have step-wise varied magnitudes and result in a relatively smoothly varying of an electric field distribution along the axial direction, wherein the electric field distribution acts as a lens on the electron beam.

2. The collimator electrode stack according to claim 1 , wherein the electric field distribution comprises a plurality of negative electric field minima and a plurality of positive electric field maxima.

3. The collimator electrode stack according claim 1 , wherein the electric field increases to a highest electric field by increasing electric potential differences between adjacent collimator electrodes, resulting in a local electric field distribution that acts as a positive lens on the electron beam.

4. The collimator electrode stack according claim 3 , wherein the electric field decreases to a minimum electric field following the highest electric field electric field by decreasing electric potential differences between adjacent collimator electrodes, resulting in a further local electric field distribution that acts as a negative lens on the electron beam.

5. The collimator electrode stack according claim 1 , wherein a first collimator electrode provided at an upstream end of the collimator electrode stack is configured to be kept at a ground potential.

6. The collimator electrode stack according to claim 1 , wherein a last collimator electrode provided at a downstream end of the collimator electrode stack is configured to be kept at a low positive electric potential, preferably at a positive electric potential with a value between +500 Volts and +1100 Volts.

7. The collimator electrode stack according to claim 1 , wherein a middle collimator electrode provided between the first collimator electrode and the last collimator electrode is configured to be kept at a highest positive electric potential, preferably at a fixed electric potential with a value between +20 kilovolts and +30 kilovolts.

8. The collimator electrode stack according to claim 7 , wherein an adjacent collimator electrode provided directly upstream of the middle collimator electrode is configured to be kept at an electric potential provided resulting in an electric potential difference between the middle collimator electrode and the adjacent collimator electrode, wherein a further adjacent collimator electrode provided directly upstream of the adjacent collimator electrode is configured to be kept at a further electric potential resulting in a further electric potential difference between the adjacent collimator electrode and the further adjacent collimator electrode, and wherein the further electric potential difference is larger than the electric potential difference.

9. The collimator electrode stack according to claim 1 , wherein a second collimator electrode provided secondly at an upstream end of the collimator electrode stack is configured to be kept at a negative electric potential resulting in a negative electric field minimum, preferably at a fixed electric potential with a value between −3 kilovolts and −4 kilovolts.

10. The collimator electrode stack according to claim 1 , wherein a penultimate electrode is configured to be kept at a negative electric potential resulting in a further negative electric field minimum, preferably at a fixed electric potential with a value between −300 Volts and −500 Volts.

11. The collimator electrode stack according to claim 1 , wherein a two-to-last electrode is configured to be kept at the low negative electric potential, preferably at a fixed electric potential with a value between −300 Volts and −500 Volts.

12. The collimator electrode stack according to claim 1 , wherein the collimator electrodes are configured to be kept at different electric potentials.

13. The collimator electrode stack according to claim 1 , wherein the electrode body has a disk shape arranged in a radial-angular plane substantially perpendicular to the axial direction, wherein the electrode aperture is formed by a substantially circular cut-out extending through the electrode body and along the axial direction.

14. The collimator electrode stack according to claim 1 , wherein at least one intermediate electrode has an electrode thicknesses along the axial direction.

15. The collimator electrode stack according to claim 14 , wherein inter-electrode distances between adjacent intermediate electrodes on the one hand, and the intermediate electrode thickness along the axial direction on the other hand, are bounded by the relation 0.75·He≦Hd≦1.5·He.

16. The collimator electrode stack according to claim 5 , wherein the first collimator electrode has a first thickness in a range defined by 1.5·He≦H1 ≦2.5·He.

17. The collimator electrode stack according to claim 7 , wherein the middle collimator electrode has a thickness in a range defined by 1.5·He≦H5≦2.5·He.

18. Charged particle lithography system for exposing a target, the system comprising:
a beam source for generating an electron beam;
a collimator electrode stack according to claim 1 for collimating the electron beam; and
an aperture array for forming a plurality of beamlets from the electron beam.

Assignees

• Mapper Lithography Ip Bv

Inventors

• Wieland Marco Jan Jaco
• Urbanus Willem Henk

Classifications

• H01J37/16

  Vessels; Containers · CPC title

• H01J2237/16

  Vessels · CPC title

• H01J2237/002

  Cooling arrangements · CPC title

• H01J2237/0216

  Means for avoiding or correcting vibration effects · CPC title

• H01J2237/1215

  Annular electrodes · CPC title