Semiconductor package having through silicon via (TSV) interposer and method of manufacturing the semiconductor package
US-8928132-B2 · Jan 6, 2015 · US
US9899294B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9899294-B2 |
| Application number | US-201314910280-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 12, 2013 |
| Priority date | Aug 12, 2013 |
| Publication date | Feb 20, 2018 |
| Grant date | Feb 20, 2018 |
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Provided are a thermal interface material layer and a package-on-package device including the same. The package-on-package device may include a thermal interface material layer interposed between lower and upper semiconductor packages and configured to have a specific physical property. Accordingly, it is possible to prevent a crack from occurring in a lower semiconductor chip, when a solder ball joint process is performed to mount the upper semiconductor package on the lower semiconductor package.
Opening claim text (preview).
The invention claimed is: 1. A thermal interface material layer interposed between a lower semiconductor package and an upper semiconductor package, the thermal interface material layer having a modulus of elasticity of 500 kPa or less, wherein the thermal interface material layer includes a resin layer and filler particles distributed in the resin layer, and the resin layer has a modulus of elasticity of 500 kPA or less. 2. The thermal interface material layer of claim 1 , wherein the thermal interface material layer has Mohs hardness that is lower than 7. 3. The thermal interface material layer of claim 1 , wherein the thermal interface material layer has thermal conductivity of 1 W/mK or higher. 4. The thermal interface material layer of claim 1 , wherein the resin layer is formed of a silicon-based compound or a rubber-based compound. 5. The thermal interface material layer of claim 1 , wherein the filler particles have Mohs hardness that is lower than 7. 6. The thermal interface material layer of claim 5 , wherein the filler particles are configured to exhibit an insulation property. 7. The thermal interface material layer of claim 6 , wherein the filler particles are at least one of boron nitride particles and zinc oxide particles. 8. The thermal interface material layer of claim 6 , wherein at least one of the filler particles comprises a metal particle coated with an insulating layer, and the metal particle has Mohs hardness that is lower than 7. 9. The thermal interface material layer of claim 1 , wherein a content of the filler particles in the thermal interface material layer ranges from 60 wt % to 95 wt %. 10. The thermal interface material layer of claim 1 , wherein the thermal interface material layer has a Mohs hardness that is lower than 7. 11. The thermal interface material layer of claim 10 , wherein the thermal interface material layer has modulus of elasticity of 500 kPa or less. 12. The thermal interface material layer of claim 10 , wherein the thermal interface material layer has thermal conductivity of 1 W/mK or higher. 13. The thermal interface material layer of claim 10 , wherein the filler particles have Mohs hardness that is lower than 7. 14. The thermal interface material layer of claim 13 , wherein the filler particles are configured to exhibit an insulation property. 15. The thermal interface material layer of claim 13 , wherein the filler particles are at least one of boron nitride particles and zinc oxide particles. 16. The thermal interface material layer of claim 13 , wherein at least one of the filler particles comprises a metal particle coated with an insulating layer, and the metal particle has Mohs hardness that is lower than 7. 17. The thermal interface material layer of claim 1 , wherein the resin layer is formed of a silicon-based compound or a rubber-based compound. 18. The thermal interface material layer of claim 13 , wherein a content of the filler particles in the thermal interface material layer ranges from 60 wt % to 95 wt %.
Encapsulations, e.g. protective coatings · CPC title
the encapsulations exposing the passive side of the semiconductor body · CPC title
between stacked chips · CPC title
characterised by arrangements for thermal management of the stacked chips · CPC title
Insulating or insulated package substrates; Interposers; Redistribution layers (leadframes H10W70/40) · CPC title
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