Wafer positioning pedestal for semiconductor processing

Patent metadata

Field	Value
Publication number	US-9892956-B1
Application number	US-201615291549-A
Country	US
Kind code	B1
Filing date	Oct 12, 2016
Priority date	Oct 12, 2016
Publication date	Feb 13, 2018
Grant date	Feb 13, 2018

Abstract

An assembly used in a process chamber for depositing a film on a wafer and including a pedestal extending from a central axis. An actuator is configured for controlling movement of the pedestal. A central shaft extends between the actuator and pedestal, the central shaft configured to move the pedestal along the central axis. A lift pad is configured to rest upon the pedestal and having a pad top surface configured to support a wafer placed thereon. A pad shaft extends between the actuator and the lift pad and controls movement of the lift pad. The pad shaft is positioned within the central shaft and is configured to separate the lift pad from the pedestal top surface by a process rotation displacement when the pedestal is in an upwards position. The pad shaft is configured to rotate relative to the pedestal top surface between first and second angular orientations.

First claim

What is claimed is:

1. A method for operating a process chamber for depositing a film on a wafer, the method comprising:
placing the wafer on an assembly, the assembly including a pedestal and a lift pad, the pedestal having a pedestal top surface extending from a central axis, the lift pad resting on the pedestal;
controlling movement of the pedestal up and down along the central axis;
moving the pedestal to a process position;
performing a first number of processing cycles, wherein the lift pad is in a first angular orientation relative to the pedestal top surface;
moving the pedestal to a topmost upwards position;
raising the lift pad upwards relative to the pedestal top surface along the central axis when the pedestal is in the topmost upwards position such that the lift pad is separated from the pedestal top surface by a process rotation displacement, and such that the wafer disposed upon the lift pad is separated from the pedestal;
rotating the lift pad relative to the pedestal top surface when separated from the pedestal top surface to a second angular orientation relative to the pedestal top surface;
lowering the lift pad to rest upon the pedestal;
moving the pedestal to the process position;
performing a second number of processing cycles, wherein the lift pad is in the second angular orientation; and moving pedestal to a bottommost position, and removing the wafer.

2. The method of claim 1 , wherein the assembly comprises:
the pedestal;
an actuator configured for controlling movement of the pedestal;
a central shaft extending between the actuator and the pedestal, the central shaft configured to move the pedestal along the central axis;
the lift pad having a pad top surface extending from the central axis to a pad diameter and a pad bottom surface configured to rest upon the pedestal top surface, the pad top surface configured to support the wafer when placed thereon; and
a pad shaft extending between the actuator and the lift pad, the actuator configured for controlling movement of the lift pad, the pad shaft configured to separate the lift pad from the pedestal, the pad shaft positioned within the central shaft;
wherein the lift pad is configured to move up relative to the pedestal top surface along the central axis when the pedestal is in an upwards position, such that the lift pad is separated from the pedestal top surface by a process rotation displacement;
wherein the lift pad is configured to rotate relative to the pedestal top surface when separated from the pedestal between at least a first angular orientation and a second angular orientation.

3. The method of claim 1 , wherein the assembly comprises:
the pedestal having the pedestal top surface, the pedestal top surface configured to support a wafer when placed thereon;
a recess centered in the pedestal top surface and extending from the central axis to a recess diameter, the recess having a recess height, the recess having a recess bottom surface;
an actuator configured for controlling movement of the pedestal;
a central shaft extending between the actuator and the pedestal, the central shaft configured to move the pedestal along the central axis;
the lift pad having a pad top surface extending from the central axis to a pad diameter, the lift pad configured rest upon the recess bottom surface when situated within the recess;
a pad shaft extending between the actuator and the lift pad, the actuator configured for controlling movement of the lift pad, the pad shaft configured to separate the lift pad from the pedestal, the pad shaft positioned within the central shaft;
wherein the lift pad is configured to move up relative to the pedestal top surface along the central axis when the pedestal is in an upwards position, such that the lift pad is separated from the pedestal top surface by a process rotation displacement;
wherein the lift pad is configured to rotate relative to the pedestal top surface when separated from the pedestal between at least a first angular orientation and a second angular orientation.

4. The method of claim 1 , wherein the first orientation and the second orientation are 180 degrees apart.

5. The method of claim 1 , further comprising:
raising the lift pad upwards relative to the pedestal top surface along the central axis such that the lift pad is separated from the pedestal top surface by a displacement large enough for entry of an end-effector arm.

6. The method of claim 1 , further comprising:
moving the lift pad with the pedestal when the lift pad is resting upon the pedestal.

Assignees

• Lam Res Corp

Inventors

• Konkola Paul
• Leeser Karl F
• Srinivasan Easwar

Classifications

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/7614

  characterised by a plurality of individual support members, e.g. support posts or protrusions · CPC title

• H10P72/7612

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H10P72/7611

  characterised by edge profile or support profile · CPC title

• H10P72/72

  using electrostatic chucks · CPC title