Stress compensation for piezoelectric optical MEMS devices

Patent metadata

Field	Value
Publication number	US-9890040-B2
Application number	US-201414533947-A
Country	US
Kind code	B2
Filing date	Nov 5, 2014
Priority date	Jun 30, 2014
Publication date	Feb 13, 2018
Grant date	Feb 13, 2018

Abstract

An apparatus includes a lens material forming a lens. The apparatus also includes a piezoelectric capacitor over the lens material, where the piezoelectric capacitor is configured to change a shape of the lens material in response to a voltage across the piezoelectric capacitor to thereby change a focus of the lens. The apparatus further includes at least one stress compensation ring over a portion of the lens material and over at least a portion of the piezoelectric capacitor. The at least one stress compensation ring is configured to at least partially reduce bending of the lens material caused by stress on or in the lens material.

First claim

What is claimed is:

1. An apparatus comprising:
a lens material forming a lens;
a piezoelectric capacitor having a first electrode interfacing the lens material, and a second electrode having a first surface facing away from the lens material;
a first stress compensation structure extending over the lens material and covering an outer circumferential perimeter of the second electrode and a first portion of the first surface that forms a first edge with the outer circumferential perimeter; and
a second stress compensation structure extending over the lens material and covering an inner circumferential perimeter of the second electrode and a second portion of the first surface that forms a second edge with the inner circumferential perimeter, the first and second stress compensation structures free from connecting with each other and free from completely covering the first surface of the second electrode of the piezoelectric capacitor;
wherein, for each radial position along the outer and inner circumferential perimeters of the second electrode that includes covered first and second portions of the first surface, an uncovered portion of the first surface is interposed between the covered first and second portions at the radial position.

2. The apparatus of claim 1 , wherein a surface of the lens material is visible within the inner aperture of the piezoelectric capacitor.

3. The apparatus of claim 1 , wherein a surface of the lens material is substantially planar when no voltage is applied across the piezoelectric capacitor.

4. The apparatus of claim 1 , wherein:
a surface of the lens material bulges downward when no voltage is applied across the piezoelectric capacitor; and
the piezoelectric capacitor is configured to cause the surface of the lens material to bulge upward in response to the voltage applied across the piezoelectric capacitor.

5. The apparatus of claim 1 , wherein:
the first and second electrodes are separated by at least one piezoelectric material; and
the at least one piezoelectric material is configured to change shape in response to the voltage across the piezoelectric capacitor.

6. The apparatus of claim 5 , wherein:
the first and second electrodes comprise at least one of: platinum, nickel, and palladium; and
the at least one piezoelectric material comprises lead zirconium titanate.

7. The apparatus of claim 1 , wherein the first and second stress compensation structures are each ring-shaped and are arranged concentrically with respect to one another.

8. The apparatus of claim 1 , wherein:
the second electrode is shaped as a ring;
the first edge is a circular outer edge of the ring;
the second edge is a circular inner edge of the ring;
the first stress compensation structure covers the entire first edge; and
the second stress compensation structure covers the entire second edge.

9. A system comprising:
an auto-focus lens comprising:
a lens material forming a lens;
a piezoelectric capacitor having a first electrode interfacing the lens material, and a second electrode having a first surface facing away from the lens material; and
a first stress compensation structure extending over the lens material and covering an outer circumferential perimeter of the second electrode and a first portion of the first surface that forms a first edge with the outer circumferential perimeter; and
a second stress compensation structure extending over the lens material and covering an inner circumferential perimeter of the second electrode and a second portion of the first surface that forms a second edge with the inner circumferential perimeter, the first and second stress compensation structures free from connecting with each other and free from completely covering the first surface of the second electrode of the piezoelectric capacitor;
wherein, for each radial position along the outer and inner circumferential perimeters of the second electrode that includes covered first and second portions of the first surface, an uncovered portion of the first surface is interposed between the covered first and second portions at the radial position.

10. The system of claim 9 , wherein a surface of the lens material is visible within the inner aperture.

11. The system of claim 9 , wherein a surface of the lens material is substantially planar when no voltage is applied across the piezoelectric capacitor.

12. The system of claim 9 , wherein:
a surface of the lens material bulges downward when no voltage is applied across the piezoelectric capacitor; and
the piezoelectric capacitor is configured to cause the surface of the lens material to bulge upward in response to the voltage applied across the piezoelectric capacitor.

13. The system of claim 9 , wherein:
the first and second electrodes are separated by at least one piezoelectric material; and
the at least one piezoelectric material is configured to change shape in response to the voltage across the piezoelectric capacitor.

14. The system of claim 13 , wherein:
the first and second electrodes comprise at least one of: platinum, nickel, and palladium; and
the at least one piezoelectric material comprises lead zirconium titanate.

15. The system of claim 9 , wherein the first and second stress compensation structures are each ring-shaped and are arranged concentrically with respect to one another.

16. The system of claim 9 , wherein:
the second electrode is shaped as a ring;
the first edge is a circular outer edge of the ring;
the second edge is a circular inner edge of the ring;
the first stress compensation structure covers the entire first edge; and
the second stress compensation structure covers the entire second edge.

Assignees

• Texas Instruments Inc

Inventors

• Chang Yungshan
• Jackson Ricky A
• Ritchison Jeff W
• Jiang Neng

Classifications

• B81B3/0072 Primary

  For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers · CPC title

• G02B13/14

  for use with infrared or ultraviolet radiation ({G02B13/008, } G02B13/16 take precedence) · CPC title

• B81C2201/0174

  for making multi-layered devices, film deposition or growing · CPC title

• B81C1/00523 Primary

  Etching material · CPC title

• B81C1/00349

  Creating layers of material on a substrate · CPC title