Conditioned semiconductor system parts

Patent metadata

Field	Value
Publication number	US-9885117-B2
Application number	US-201514619474-A
Country	US
Kind code	B2
Filing date	Feb 11, 2015
Priority date	Mar 31, 2014
Publication date	Feb 6, 2018
Grant date	Feb 6, 2018

Abstract

A method for conditioning a semiconductor chamber component may include passivating the chamber component with an oxidizer. The method may also include performing a number of chamber process operation cycles in a semiconductor processing chamber housing the chamber component until the process is stabilized. The number of chamber operation cycles to stabilize the process may be less than 10% of the amount otherwise used with conventional techniques.

First claim

The invention claimed is:

1. A method of conditioning a semiconductor chamber component, the method comprising:
passivating the chamber component with an oxidizer, wherein the chamber component comprises an aluminum chamber component, and wherein the passivating comprises:
exposing the chamber component to an acid solution for a first period of time; and
subsequently exposing the chamber component to a basic solution for a second period of time; and
performing a number of chamber process operation cycles in a semiconductor processing chamber housing the chamber component until the process is stabilized, wherein the number of chamber operation cycles to stabilize the process is less than 3,000, wherein the chamber process is an etch process, and wherein the chamber process is stabilized when it performs consistently to within +/−20% etch amount between operation cycles.

2. The method of claim 1 , wherein the process is stabilized when it performs consistently to within +/−10% etch amount between operation cycles.

3. The method of claim 1 , wherein the number of chamber operation cycles to stabilize the process is less than 100.

4. The method of claim 1 , wherein the acid solution comprises an acid selected from the group consisting of nitric acid (HNO 3 ), sulfuric acid (H 2 SO 4 ), hydrochloric acid (HCl), and hydrofluoric acid (HF).

5. The method of claim 4 , wherein the acid comprises nitric acid at a concentration greater than 25%.

6. The method of claim 1 , wherein the basic solution comprises an aqueous solution of ammonia.

7. The method of claim 6 , wherein the aqueous solution of ammonia is at a concentration greater than 10%.

8. The method of claim 1 , wherein the passivation operation is performed for a time greater than about 5 minutes.

9. The method of claim 1 , wherein the passivation operation is performed at a temperature of less than about 50° C.

10. The method of claim 1 , wherein exposing the chamber component to an acid solution comprises dipping the chamber component in a first bath comprising the acid solution for a time period greater than about 10 minutes, and wherein subsequently exposing the chamber component to a basic solution comprises dipping the component in a second bath comprising the basic solution for a time period less than about 3 minutes.

11. The method of claim 1 , further comprising coating at least a portion of the chamber component with a protective material subsequent to the passivation operation.

12. A method of conditioning an aluminum semiconductor chamber component, comprising:
machining a plurality of apertures through the chamber component;
dipping the chamber component in an oxidizer bath comprising nitric acid (HNO 3 ) at a concentration greater than 25%, for a time period less than about 30 minutes, and at a temperature less than about 25° C.;
subsequently dipping the chamber component in a bath of a basic solution; and
performing a number of chamber process operation cycles in a semiconductor processing chamber housing the chamber component until the process is stabilized, wherein the number of chamber operation cycles to stabilize the process is less than about 50, wherein the chamber process is an etch process, and wherein the chamber process is stabilized when it performs consistently to within +/−20% etch amount between operation cycles.

13. The method of claim 11 , wherein the chamber component is at least partially coated with yttrium oxide.

14. The method of claim 13 , wherein a yttrium oxide coating is applied to at least a portion of the chamber component subsequent passivating the chamber component.

Assignees

• Applied Materials Inc

Inventors

• Lubomirsky Dmitry
• Kim Sung Je

Classifications

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0421

  for drying etching · CPC title

• H10P72/123

  characterised by a material, a roughness, a coating or the like · CPC title

• C23C14/22

  characterised by the process of coating · CPC title