Production method of electroconductive mayenite compound having high electron density, and target

Patent metadata

Field	Value
Publication number	US-9881773-B2
Application number	US-201414567478-A
Country	US
Kind code	B2
Filing date	Dec 11, 2014
Priority date	Jun 20, 2012
Publication date	Jan 30, 2018
Grant date	Jan 30, 2018

Abstract

A production method of an electroconductive mayenite compound having an electron density greater than or equal to 5×10 20 cm −3 includes preparing an object of processing containing a mayenite compound or a precursor of a mayenite compound, placing aluminum foil on at least part of a surface of the object of processing, and retaining the object of processing at temperatures falling within the range of 1080° C. to 1450° C. in a low oxygen partial pressure atmosphere.

First claim

What is claimed is:

1. A production method of an electroconductive mayenite compound having an electron density greater than or equal to 5×10 20 cm −3 , comprising:
preparing an object of processing containing a mayenite compound or a precursor of the mayenite compound;
placing aluminum foil on at least a part of a surface of the object of processing; and
retaining the object of processing at a temperature falling within a range of 1080° C. to 1450° C. in a low oxygen partial pressure atmosphere.

2. The production method as claimed in claim 1 , wherein a total thickness of the aluminum foil falls within a range of 5 μm to 1000 μm.

3. The production method as claimed in claim 1 , wherein
the object of processing includes a bottom surface that becomes a lowermost surface in a vertical direction when the object of processing is placed, and
the aluminum foil is placed on the bottom surface of the object of processing in said placing.

4. The production method as claimed in claim 3 , wherein
the object of processing includes a top surface opposite to the bottom surface, and
the aluminum foil is placed on the top surface of the object of processing in said placing.

5. The production method as claimed in claim 1 , wherein the aluminum foil is placed on an entire surface of the object of processing in said placing.

6. The production method as claimed in claim 1 , wherein the low oxygen partial pressure atmosphere contains carbon monoxide gas.

7. The production method as claimed in claim 1 , wherein said placing and said retaining are performed with the object of processing being placed inside a carbon-containing container.

8. The production method as claimed in claim 1 , wherein the object of processing is a forming body including a powder of the mayenite compound, a sintered body including the mayenite compound, or a forming body including a calcined powder.

9. The production method as claimed in claim 1 , wherein the object of processing contains a halogen component.

10. The production method as claimed in, claim 1 , wherein said placing and said retaining are performed in an environment where a pressure is reduced to less than or equal to 100 Pa or in an atmosphere of an inert gas other than nitrogen.

11. The production method as claimed in claim 1 , wherein the electroconductive mayenite compound having a minimum size of 5 mm or more is obtained after said retaining.

12. A method of producing a target for film deposition that includes an electroconductive mayenite compound having an electron density greater than or equal to 0.5×10 20 cm −3 , the method comprising:
preparing an object of processing containing a mayenite compound or a precursor of the mayenite compound;
placing aluminum foil on at least a part of a surface of the object of processing; and
retaining the object of processing at a temperature of from 1080° C. to 1450° C. in a low oxygen partial pressure atmosphere.

Assignees

• Asahi Glass Co Ltd

Inventors

• Ito Kazuhiro
• Watanabe Satoru
• Watanabe Toshinari
• Miyakawa Naomichi

Classifications

• C01P2006/80

  Compositional purity · CPC title

• C04B2235/3217

  Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina · CPC title

• C04B2235/5436

  micrometer sized, i.e. from 1 to 100 micron · CPC title

• C04B2237/50

  Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating · CPC title

• C04B35/44 Primary

  based on aluminates · CPC title