Apparatus for suppression of arcs in an electron beam generator

Patent metadata

Field	Value
Publication number	US-9875874-B2
Application number	US-201615341699-A
Country	US
Kind code	B2
Filing date	Nov 2, 2016
Priority date	Nov 11, 2015
Publication date	Jan 23, 2018
Grant date	Jan 23, 2018

Abstract

An apparatus for suppression of arcs in an electron beam generator including: a first module providing an operating voltage; a second module including a coil suitable for a voltage of at least 10 kV, and at least one free-wheeling diode connected in parallel to the coil; a third module including a first circuit component configured to detect a first actual value for electric voltage, and a first signal is producible when the first actual value falls below a first threshold value, a second circuit component by which a second actual value for electric current is detectable, and a second signal is generated when the second actual value exceeds a second threshold value, a control logic, which optionally links the first and second signals and a resultant output signal is producible; a semiconductor-based switch suitable for the voltage of at least 10 kV, which is opened based on the output signal.

First claim

We claim:

1. An apparatus for suppression of arcs in an electron beam generator, comprising the following components connected in series:
a) a first module for providing of an operating voltage;
b) a second module comprising a coil suitable for a voltage of at least 10 kV, and also at least one free-wheeling diode connected in parallel to the coil;
c) a third module for arc detection, comprising
a first circuit component with which a first actual value for an electric voltage is detectable, and a first signal is producible when the first actual value falls below a first threshold value,
a second circuit component with which a second actual value for an electric current is detectable, and a second signal is producible when the second actual value exceeds a second threshold value,
a control logic with which the first and second signals are linkable together and a resultant output signal is producible;

d) a semiconductor-based switch suitable for the high voltage of at least 10 kV, which is opened with the generation of the output signal.

2. The apparatus of claim 1 , wherein the coil in the second module is designed as an air-cored coil.

3. The apparatus of claim 1 , wherein a free-wheeling diode module is connected in parallel to the coil in the second module.

4. The apparatus of claim 1 , wherein the switch is designed as a MOSFET switch.

5. The apparatus of claim 1 , wherein the third module comprises a third circuit component, with which a third actual value for a rate of power rise is detectable, and a third signal is producible when the third actual value exceeds a third threshold value, and wherein the first, second and third signals are linkable together using the control logic.

Assignees

• Fraunhofer Ges Forschung

Inventors

• Labitzke Rainer
• Dominok Severin
• Mattausch Gösta
• Weiss Stefan

Classifications

• H01J29/98 Primary

  Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for · CPC title

• H01J37/24

  Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for · CPC title

• H01J2237/06366

  Gas discharge electron sources · CPC title

• H01J2237/0206

  Extinguishing, preventing or controlling unwanted discharges · CPC title

• H01J2237/3132

  Evaporating · CPC title