Method and System for Positioning Center of V-Type Notch of Wafer, and Computer Storage Medium
US-2024266198-A1 · Aug 8, 2024 · US
US9875419B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9875419-B2 |
| Application number | US-201514744585-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 19, 2015 |
| Priority date | Jan 13, 2015 |
| Publication date | Jan 23, 2018 |
| Grant date | Jan 23, 2018 |
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Embodiments of the present invention provide a recognition device and an alignment system. The recognition device is configured to recognize an alignment mark on a display substrate and comprises a camera unit and a light source unit. The camera unit is configured to shoot the alignment mark, and the light source unit is configured to radiate emitted light onto the alignment mark. The recognition device further comprises a light processing unit configured to process light emitted from the light source unit so that the luminance of the light irradiated onto the alignment mark is greater than that of the light emitted from the light source unit. Through the arrangement of the light processing unit, the recognition device enables the luminance of the light irradiated onto the alignment mark to be greater than that of the light emitted from the light source unit.
Opening claim text (preview).
The invention claimed is: 1. A recognition device, configured to recognize an alignment mark on a display substrate and comprising a camera unit and a light source unit, the camera unit being configured to shoot the alignment mark, the light source unit being configured to radiate light onto the alignment mark, wherein the recognition device further comprises a light processing unit configured to process light emitted from the light source unit so that the luminance of the light irradiating onto the alignment mark is greater than the luminance of the light emitted from the light source unit, wherein the camera unit comprises a camera, and the light source unit comprises a light source box, the camera being disposed right above the light source box, the alignment mark being positioned right below the light source box during recognition; both an upper surface and a lower surface, which are opposite to each other, of the light source box can transmit light, and the light processing unit comprises a concave lens disposed on the upper surface and a convex lens disposed on the lower surface, a primary optical axis of the convex lens coinciding with a primary optical axis of the concave lens and the primary optical axes being in a same line; the light source box further comprises a transmission-reflection mirror disposed between the upper surface and the lower surface, and a light source disposed on a side opposite to the transmission-reflection mirror; light emitted from the light source unit can be radiated onto the transmission-reflection mirror; the transmission-reflection mirror can reflect the light onto the convex lens; the convex lens can gather the light and then radiate the gathered light onto the alignment mark; and, the light reflected from the alignment mark can enter the camera successively through the convex lens, the transmission-reflection mirror and the concave lens, along said same line. 2. The recognition device according to claim 1 , wherein the upper surface is parallel to the lower surface, the transmission-reflection mirror is a plane mirror, and acute included angles between the transmission-reflection mirror and the upper surface and between the transmission-reflection mirror and the lower surface are 45°; and, the light emitted from the light source is parallel light, and an acute included angle between the parallel light and the transmission-reflection mirror is 45°. 3. The recognition device according to claim 1 , wherein a primary optical axis of the convex lens is vertical to the upper surface and the lower surface; and, during recognition, the alignment mark is positioned on the primary optical axis of the convex lens, and a distance between the alignment mark and the convex lens ranges from 0.5f to 1.5f, where f is a focal distance of the convex lens. 4. The recognition device according to claim 3 , wherein a distance d between the convex lens and the concave lens is equal to f-f′, where f′ is a focal distance of the concave lens. 5. The recognition device according to claim 1 , wherein the camera unit further comprises an adjustment part configured to adjust the focal distance of the camera. 6. The recognition device according to claim 5 , wherein the adjustment part comprises an adjustment scaleplate and an adjustment knob, the adjustment knob being configured to adjust the focal distance of the camera according to the scale on the adjustment scaleplate so as to allow the camera to take a zoomed-in, zoomed-out or unchanged image of the alignment mark. 7. The recognition device according to claim 1 , further comprising a support frame configured to support the camera unit and the light source unit. 8. The recognition device according to claim 1 , wherein the display substrate comprises an array substrate and a color filter substrate. 9. An alignment system, comprising a recognition device configured to recognize an alignment mark on a display substrate and comprising a camera unit and a light source unit, the camera unit being configured to shoot the alignment mark, the light source unit being configured to radiate light onto the alignment mark, wherein the recognition device further comprises a light processing unit configured to process light emitted from the light source unit so that the luminance of the light irradiating onto the alignment mark is greater than the luminance of the light emitted from the light source unit, wherein the camera unit comprises a camera, and the light source unit comprises a light source box, the camera being disposed right above the light source box, the alignment mark being positioned right below the light source box during recognition; both an upper surface and a lower surface, which are opposite to each other, of the light source box can transmit light, and the light processing unit comprises a concave lens disposed on the upper surface and a convex lens disposed on the lower surface, a primary optical axis of the convex lens coinciding with a primary optical axis of the concave lens and the primary optical axes being in a same line; the light source box further comprises a transmission-reflection mirror disposed between the upper surface and the lower surface, and a light source disposed on a side opposite to the transmission-reflection mirror; light emitted from the light source unit can be radiated onto the transmission-reflection mirror; the transmission-reflection mirror can reflect the light onto the convex lens; the convex lens can gather the light and then radiate the gathered light onto the alignment mark; and, the light reflected from the alignment mark can enter the camera successively through the convex lens, the transmission-reflection mirror and the concave lens, along said same line. 10. The alignment system according to claim 9 , wherein the upper surface is parallel to the lower surface, the transmission-reflection mirror is a plane mirror, and acute included angles between the transmission-reflection mirror and the upper surface and between the transmission-reflection mirror and the lower surface are 45°; and, the light emitted from the light source is parallel light, and an acute included angle between the parallel light and the transmission-reflection mirror is 45°. 11. The alignment system according to claim 9 , wherein a primary optical axis of the convex lens is vertical to the upper surface and the lower surface; and, during recognition, the alignment mark is positioned on the primary optical axis of the convex lens, and a distance between the alignment mark and the convex lens ranges from 0.5f to 1.5f, where f is a focal distance of the convex lens. 12. The alignment system according to claim 11 , wherein a distance d between the convex lens and the concave lens is equal to f-f′, where f′ is a focal distance of the concave lens. 13. The alignment system according to claim 9 , wherein the camera unit further comprises an adjustment part configured to adjust the focal distance of the camera. 14. The alignment system according to claim 13 , wherein the adjustment part comprises an adjustment scaleplate and an adjustment knob, the adjustment knob being configured to adjust the focal distance of the camera according to the scale on the adjustment scaleplate so as to allow the camera to take a zoomed-in, zoomed-out or unchanged image of the alignment mark. 15. The alignment system according to claim 9 , wherein the recognition device further comprises a support frame configured to support the camera unit and the light source unit. 16. The alignment system according to claim 9 , wherein the display substrate comprises an array substr
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