Composition for metal plating comprising suppressing agent for void free submicron feature filling

Patent metadata

Field	Value
Publication number	US-9869029-B2
Application number	US-201013387776-A
Country	US
Kind code	B2
Filing date	Jul 16, 2010
Priority date	Jul 30, 2009
Publication date	Jan 16, 2018
Grant date	Jan 16, 2018

Abstract

According to the present invention a composition is provided comprising at least one source of metal ions and at least one additive obtainable by reacting a) a polyhydric alcohol condensate compound derived from at least one polyalcohol of formula (I)

X(OH) n   (I)

by condensation with b) at least one alkylene oxide to form a polyhydric alcohol condensate comprising polyoxyalkylene side chains, wherein n is an integer from 3 to 6 and X is an n-valent linear or branched aliphatic or cycloaliphatic radical having from 2 to 10 carbon atoms, which may be substituted or unsubstituted.

First claim

The invention claimed is:

1. A composition, comprising:
a copper ion source and
at least one suppressing agent produced by a process comprising reacting:
a) a polyhydric alcohol condensate starter, which is a condensation derivative of a polyalcohol of the formula
X(OH) m

with
b) an alkylene oxide,
to produce a polyhydric alcohol condensate comprising polyoxyalkylene side chains, wherein
m is an integer from 3 to 6, and
X is a m-valent, linear or branched, aliphatic or cycloaliphatic radical having from 3 to 10 carbon atoms, wherein the radical is unsubstituted or substituted with one or more substituent groups selected from the group consisting of a cyano, hydroxyl, halo, (C1-C6) alkoxy, (C1-C6) alkylthio, thiol and nitro group.

2. The composition of claim 1 , wherein the polyhydric alcohol condensate starter is a homocondensate of the polyalcohol of the formula X(OH) m or a co-condensate of two or more polyalcohols wherein at least one polyalcohol is of the formula X(OH) m and
the polyhydric alcohol condensate starter comprises from 2 to 50 polyalcohol units of the formula X(OH) m .

3. The composition of claim 1 , wherein the polyhydric alcohol condensate starter is at least one condensate selected from the group consisting of a glycerol condensate and a pentaerythritol condensate.

4. The composition of claim 1 , wherein the polyhydric alcohol condensate starter comprises at least one condensate of a formula selected from the group consisting of:

wherein
Y is a n-valent, linear or branched, aliphatic or cycloaliphatic radical having from 1 to 10 carbon atoms, wherein the radical is unsubstituted or substituted with one or more substituent groups selected from the group consisting of a cyano, hydroxyl, halo, (C1-C6) alkoxy, (C1-C6) alkylthio, thiol and nitro group,
a is an integer from 2 to 50,
each b is independently an integer from 1 to 30,
c is an integer from 2 to 3, and
n is an integer from 1 to 6.

5. The composition of claim 1 , wherein the alkylene oxide comprises at least one oxide selected from the group consisting of ethylene oxide, propylene oxide, and butylene oxide.

6. The composition of claim 1 , wherein the polyoxyalkylene side chains are a copolymer of ethylene oxide with propylene oxide, butylene oxide, or both.

7. The composition of claim 6 , wherein the content of ethylene oxide in the copolymer is from 10 to 50% by weight.

8. The composition of claim 6 , wherein the polyoxyalkylene side chains are a random copolymer of at least two alkylene oxides.

9. The composition of claim 1 , wherein the molecular weight M w of the polyhydric alcohol condensate comprising polyoxyalkylene side chains is from 3000 to 10000 g/mol.

10. The composition of claim 1 , further comprising a leveling agent.

11. The composition of claim 1 , wherein the copper ion source comprises at least one member selected from the group consisting of copper sulfate, copper chloride, copper acetate, copper citrate, copper nitrate, copper fluoroborate, copper methane sulfonate, copper phenyl sulfonate and copper p-toluene sulfonate.

12. A composition comprising:
a copper ion source and
at least one suppressing agent produced by a process comprising reacting:
a) a polyhydric alcohol condensate starter, which is a condensation derivative of the formula
X(OH) m

with
b) an alkylene oxide,
to produce a polyhydric alcohol condensate comprising polyoxyalkylene side chains,
wherein
m is an integer from 3 to 6, and
X is a m-valent, linear or branched, aliphatic or cycloaliphatic radical having from 3 to 10 carbon atoms, wherein the radical is unsubstituted or substituted with one or more substituent groups selected from the group consisting of a cyano, hydroxyl, halo, (C1-C6) alkoxy, (C1-C6) alkylthio, thiol and nitro group; and
an accelerating agent.

13. The composition of claim 12 , wherein the accelerating agent is a compound comprising one or more sulfur atom, a sulfonic acid, a sulfonic acid salt, a phosphonic acid or a phosphonic acid salt.

14. The composition of claim 12 , wherein the accelerating agent is a compound of the formula:
MO 3 X—R 21 —(S) p —R 22 ,

wherein:
M is a hydrogen or an alkali metal
X is P or S
p=1 to 6
R 21 is selected from C1-C8 alkyl group, a heteroalkyl group, an aryl group or a heteroaromatic group
R 22 is selected from H or —S—R 21 ′XO 3 M, with R 21 ′ being identical or different from R 21 .

15. The composition of claim 12 , wherein the accelerating agent is a compound having a fonnula selected from the group consisting of:
MO 3 S—R 21 —SH,

MO 3 S—R 21 —S—S—R 21 ′—SO 3 M, and

MO 3 S—Ar—S—S—Ar—SO 3 M

wherein
R 21 and R 21 ′ are the same or different and are independently selected from C1-C8 alkyl group, a heteroalkyl group, an aryl group or a heteroaromatic group and
Ar is Aryl.

16. The composition of claim 12 , wherein the accelerating agent is bis-(3-sulfopropyl)-disulfide disodium salt or 3-mercapto-1-propansulfonic acid, sodium salt.

17. The composition of claim 12 , wherein the accelerating agent is at least one selected from the group consisting of 2-mercaptoethanesulfonic acid, sodium salt, N,N-dimethyldithiocarbamic acid (3-sulfopropylester), sodium salt, 3-[(amino-iminomethyl)-thio]-1-propylsulfonic acid, 3-(2-benzthiazolylthio)-1-propanesulfonic acid, sodium salt, 3-mercapto-propylsulfonicacid-(3-sulfopropyl)ester, methyl-( ω -sulfopropyl)-disulfide, disodium salt, and methyl-( ω -sulfopropyl)-trisulfide, disodium salt.

18. The composition of claim 12 , wherein the accelerating agent is present in an amount ranging from about 0.1 ppm to about 3000 ppm, based on the total weight of the composition.

19. A process for depositing a copper layer on a substrate, comprising:
a) contacting a metal plating bath comprising the composition of claim 1 with the substrate, and
b) applying a current to the substrate, thereby depositing a copper layer onto the substrate.

20. The process of claim 19 ,
wherein the substrate comprises at least one feature selected from the group consisting of a micrometer sized feature and a submicrometer sized feature, and
wherein applying the current fills the feature.

21. The process of claim 20 , wherein the substrate comprises a submicrometer-sized feature having an aperture size from 1 to 30 nm, an aspect ratio of 4 or more, or both.

22. The process of claim 19 , wherein a density of the current is from 1 to 250 mA/cm 2 .

Assignees

• Roeger-Goepfert Cornelia
• Raether Roman Benedikt
• Haag Alexandra
• Mayer Dieter
• Emnet Charlotte
• Basf Se

Inventors

• Roeger-Goepfert Cornelia
• Raether Roman Benedikt
• Haag Alexandra
• Mayer Dieter
• Emnet Charlotte

Classifications

• H10P14/47

  Electrolytic deposition, i.e. electroplating; Electroless plating · CPC title

• H10W20/056

  by filling conductive material into holes, grooves or trenches · CPC title

• H05K3/42

  Plated through-holes {or plated via connections} · CPC title

• C25D7/123

  Semiconductors first coated with a seed layer or a conductive layer · CPC title

• C25D3/38 Primary

  of copper · CPC title