Ion assisted deposition top coat of rare-earth oxide

Patent metadata

Field	Value
Publication number	US-9869013-B2
Application number	US-201414262644-A
Country	US
Kind code	B2
Filing date	Apr 25, 2014
Priority date	Apr 25, 2014
Publication date	Jan 16, 2018
Grant date	Jan 16, 2018

Abstract

A method of manufacturing an article comprises providing an article such as a chamber component for an etch reactor. A plasma spray deposition process is performed for deposit a first protective layer over at least one surface of the chamber component. The first protective layer is a plasma resistant ceramic having a thickness of greater than approximately 50 microns and a plurality of cracks and pores. An ion assisted deposition (IAD) process is then performed to deposit a second protective layer over the first protective layer. The second protective layer is a plasma resistant rare earth oxide having a thickness of less than 50 microns and a porosity of less than 1%. The second protective layer seals the plurality of cracks and pores of the first protective layer.

First claim

What is claimed is:

1. A method comprising:
performing physical vapor deposition (PVD) with a metallic target consisting of an Erbium Aluminum Alloy to deposit a first protective layer consisting of a plasma resistant ceramic on at least one surface of an article, the article comprising a chamber component of a processing chamber, wherein the plasma resistant ceramic consists of Er 3 Al 5 O 12 and has an amorphous structure;
performing at least one of flowing Oxygen radicals from a first source into a deposition chamber containing the article at a flow rate or bombarding the article with Oxygen ions from a second source while performing the PVD, wherein the first source is a plasma source, and wherein the metallic target is evaporated or sputtered to react with at least one of the Oxygen radicals from the first source or the Oxygen ions from the second source and form the first protective layer consisting of the plasma resistant ceramic in situ as a result of the PVD; and
depositing a second protective layer over the first protective layer, the second protective layer comprising Er 2 O 3 , wherein the second protective layer has a crystalline or nano-crystalline structure.

2. The method of claim 1 , further comprising:
gradually increasing the flow rate of the Oxygen radicals while performing the PVD, wherein the deposited first protective layer comprises a first Oxygen content at a bottom of the first protective layer and a higher second Oxygen content at a top of the first protective layer.

3. The method of claim 1 , wherein the article comprises a third protective layer that has been deposited by a plasma spray process, the third protective layer having a thickness of greater than approximately 50 microns that comprises a plurality of cracks and pores that are sealed by the first protective layer.

4. The method of claim 1 , wherein depositing the second protective layer comprises performing PVD with a metallic Er target.

5. The method of claim 1 , further comprising:
concurrent to performing PVD with the metallic target, performing PVD with a second metallic target that has a same composition as the metallic target to deposit the first protective layer on the at least one surface of the article, wherein co-deposition using the metallic target and the second metallic target results in an increased deposition rate.

Assignees

• Applied Materials Inc

Inventors

• Sun Jennifer Y
• Kanungo Biraja P
• Firouzdor Vahid

Classifications

• Y10T428/24967

  Absolute thicknesses specified · CPC title

• C23C4/134

  Plasma spraying · CPC title

• Y10T428/24926

  including ceramic, glass, porcelain or quartz layer · CPC title

• Y10T428/24942

  including components having same physical characteristic in differing degree · CPC title

• C23C14/548

  Controlling the composition · CPC title