Recirculation substrate container purging systems

Patent metadata

Field	Value
Publication number	US-9868140-B2
Application number	US-201615095898-A
Country	US
Kind code	B2
Filing date	Apr 11, 2016
Priority date	Dec 13, 2013
Publication date	Jan 16, 2018
Grant date	Jan 16, 2018

Abstract

Methods and systems to reduce the consumption of purge gas for semiconductor substrate containers. The recirculation purging system recycles purge gas back to substrate containers by filtering and purifying gas flow from substrate containers, receiving gas flow from load port, or including a recirculation tank.

First claim

What is claimed is:

1. A recirculation purging system comprising:
a load port;
a purge gas flow input to the load port comprising at least one of a recirculated gas flow and a refresh gas flow,
wherein the recirculated gas flow is configured to add a purified purge gas flow to the load port, and
wherein the refresh gas flow is configured to add a fresh gas flow to the load port;

a switch mechanism coupled to the purge gas flow input and being configured to provide one of both the recirculated gas flow and the refresh gas flow to the purge gas flow input;
an exhaust purge gas flow output from the load port.

2. The recirculation purging system of claim 1 , further comprising:
at least one of a filter and a purifier configured to remove at least one of a particle contaminant, an organic contaminant, and a moisture contaminant from the recirculated gas flow.

3. The recirculation purging system of claim 1 ,
wherein the switch mechanism is configured to switch among the recirculated gas flow, the refresh gas flow, and a closed conduit.

4. The recirculation purging system of claim 3 , further comprising:
wherein the switch mechanism is configured to add the refresh gas flow to the recirculated gas flow, or
wherein the switch mechanism is configured to replace the recirculated gas flow with the refresh gas flow, or
wherein the switch mechanism is configured to continuously maintain the recirculated gas flow while toggling between on and off the refresh gas flow.

5. The recirculation purging system of claim 3 , further comprising:
wherein the switch mechanism is controlled by a controller,
wherein the controller periodically toggles the purge gas flow input between a closed state and the recirculated gas flow when a moisture contamination level is below a predetermined level, or wherein the controller periodically toggles the purge gas flow input between the closed state and the refresh gas flow when the moisture contamination level is above another predetermined level.

6. The recirculation purging system of claim 1 , further comprising:
at least one sensor configured to monitor at least one of an organic contamination level, a moisture contamination level, and a particle contamination level of the recirculated gas.

7. The recirculation system of claim 6 , further comprising:
wherein an input of at least one of the recirculated gas flow and the fresh gas flow is controlled based on a contamination reading of at least one of the organic contamination level, the moisture contamination level, and the particle contamination level of the recirculated gas flow.

8. The recirculation system of claim 6 , further comprising:
wherein the exhaust purge gas flow output from the container is replaced with the fresh gas flow when the moisture contamination level reaches or exceeds the acceptable value.

9. The recirculation system of claim 6 , further comprising:
wherein the exhaust purge gas flow output from the container is recirculated back to the container when moisture contamination level is below 1 ppb.

10. The recirculation system of claim 6 , further comprising:
wherein the at least one of a fresh dry air and a nitrogen gas is added to the system when the moisture contamination level reaches or exceeds a predetermined level.

11. A recirculation purging system, comprising:
a container;
a sealable load port;
wherein the recirculation purging system is activated when the container is placed on a support of the load port;
a purge gas flow input to the load port comprising at least one of a recirculated gas flow and a refresh gas flow,
wherein the recirculated gas flow is configured to add a purified purge gas flow to the load port, and
wherein the refresh gas flow is configured to add a fresh gas flow to the load port;

a switch mechanism coupled to the purge gas flow input and being configured to provide one of both the recirculated gas flow and the refresh gas flow to the purge gas flow input;
at least one of a filter and a purifier configured to remove at least one of a particle contaminant, an organic contaminant, and a moisture contaminant from the recirculated gas flow; and
an exhaust purge gas flow output from the load port.

12. The recirculation purging system of claim 11 , further comprising:
wherein the filter is configured to permit exhaust purge gas flow from the container to escape, and
wherein the filter is configured to remove the particle contaminant from the exhaust purge gas flow.

13. The recirculation purging system of claim 11 , further comprising:
wherein the purifier is configured to remove at least one of a moisture contaminant and an organic contaminant from the exhaust purge gas flow, and
wherein the purifier comprises at least one of a desiccant material and a carbon fiber material.

Assignees

• Brooks Automation (Germany) Gmbh
• Brooks Automation Inc

Inventors

• Rebstock Lutz

Classifications

• H10P72/1926 Primary

  characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• Y10T137/0419

  Fluid cleaning or flushing · CPC title

• B08B9/0321 Primary

  using pressurised, pulsating or purging fluid (E04F17/126 takes precedence) · CPC title

• Y10T137/4259

  With separate material addition · CPC title