FinFET device with epitaxial structures that wrap around the fins and the method of fabricating the same

Patent metadata

Field	Value
Publication number	US-9865595-B1
Application number	US-201715490959-A
Country	US
Kind code	B1
Filing date	Apr 19, 2017
Priority date	Dec 14, 2016
Publication date	Jan 9, 2018
Grant date	Jan 9, 2018

Abstract

A FinFET device is provided. The FinFET device includes a plurality of fin structures that protrude upwardly out of a dielectric isolation structure. The FinFET device also includes a plurality of gate structures that partially wrap around the fin structures. The fin structures each extend in a first direction, and the gate structures each extend in a second direction different from the first direction. An epitaxial structure is formed over at least a side surface of each of the fin structures. The epitaxial structure includes: a first epi-layer, a second epi-layer, or a third epi-layer. The epitaxial structure formed over each fin structure is separated from adjacent epitaxial structures by a gap. A silicide layer is formed over each of the epitaxial structures. The silicide layer at least partially fills in the gap. Conductive contacts are formed over the silicide layer.

First claim

What is claimed is:

1. A method, comprising:
providing a FinFET device that includes:
a plurality of fin structures that protrude upwardly out of a dielectric isolation structure; and
a plurality of gate structures that partially wrap around the fin structures, wherein the fin structures each extend in a first direction, and the gate structures each extend in a second direction different from the first direction;

forming an epitaxial structure in a source/drain region of the FinFET device, wherein the epitaxial structure is formed over at least a side surface of each of the fin structures, the epitaxial structure including: a first epi-layer, a second epi-layer, or a third epi-layer, wherein the epitaxial structure formed over each fin structure is separated from adjacent epitaxial structures by a gap;
forming a silicide layer over each of the epitaxial structures, wherein the silicide layer at least partially fills in the gap; and
forming conductive contacts over the silicide layer.

2. The method of claim 1 , wherein the forming of the epitaxial structure comprises:
removing, in the source/drain region, the fin structures that protrude out of the dielectric isolation structure;
growing the first epi-layer in place of the removed fin structures;
growing the second epi-layer on the first epi-layer; and
growing the third epi-layer on the second epi-layer, wherein the third epi-layer is separated from adjacent third epi-layers by the gap.

3. The method of claim 1 , wherein the forming of the epitaxial structure comprises:
removing, in the source/drain region, the fin structures that protrude out of the dielectric isolation structure;
growing the second epi-layer in place of the removed fin structures; and
growing the third epi-layer on the second epi-layer, wherein the third epi-layer is separated from adjacent third epi-layers by the gap.

4. The method of claim 1 , wherein the forming of the epitaxial structure comprises:
growing the second epi-layer on each of the fin structures; and
growing the third epi-layer on the second epi-layer, wherein the third epi-layer is separated from adjacent third epi-layers by the gap.

5. The method of claim 1 , wherein the forming of the epitaxial structure comprises:
partially removing, in the source/drain region, the fin structures that protrude out of the dielectric isolation structure;
growing the first epi-layer on remaining portions of the fin structures that are not removed;
growing the second epi-layer on the first epi-layer and on the remaining portions of the fin structures; and
growing the third epi-layer on the second epi-layer, wherein the third epi-layer is separated from adjacent third epi-layers by the gap.

6. The method of claim 1 , wherein the forming of the epitaxial structure comprises:
partially removing, in the source/drain region, the fin structures that protrude out of the dielectric isolation structure;
growing the second epi-layer on remaining portions of the fin structures that are not removed; and
growing the third epi-layer on the second epi-layer and on the remaining portions of the fin structures, wherein the third epi-layer is separated from adjacent third epi-layers by the gap.

7. The method of claim 1 , wherein:
the first epi-layer, the second epi-layer, and the third epi-layer each contain silicon germanium; and
the second epi-layer has a greater germanium content than the first epi-layer and the third epi-layer.

8. A method, comprising:
forming a first fin and a second fin that each protrude vertically upwardly out of a dielectric isolation structure;
forming a gate that partially wraps around the first fin and the second fin, wherein the first fin and the second fin each extend in a first horizontal direction, and the gate extends in a second horizontal direction perpendicular to the first horizontal direction;
forming a first epitaxial structure and a second epitaxial structure, respectively, over a top surface and side surfaces of portions of the first fin and the second fin that are not wrapped around by the gate, wherein the first epitaxial structure and the second epitaxial structure each includes: a first epi-layer, a second epi-layer, or a third epi-layer, wherein the first epitaxial structure is spaced apart from the second epitaxial structures;
forming a silicide material over the first epitaxial structure and the second epitaxial structure, wherein portions of the silicide material are formed on side surfaces of the first epitaxial structure and the second epitaxial structure; and
forming a conductive material on the silicide material.

9. The method of claim 8 , wherein the forming of the first epitaxial structure and the second epitaxial structure each comprises:
removing, in the source/drain region, the first fin and the second fin that protrude out of the dielectric isolation structure;
growing the first epi-layer in place of the removed first fin and second fin;
growing the second epi-layer on the first epi-layer; and
conformally growing the third epi-layer on the second epi-layer, wherein the second epi-layer has a greater germanium content than the first epi-layer and the third epi-layer, and wherein the third epi-layer of the first epitaxial structure is spaced apart from the third epi-layer of the second epitaxial structure.

10. The method of claim 8 , wherein the forming of the first epitaxial structure and the second epitaxial structure each comprises:
removing, in the source/drain region, the first fin and the second fin that protrude out of the dielectric isolation structure;
growing the second epi-layer in place of the removed first fin and second fin; and
conformally growing the third epi-layer on the second epi-layer, wherein the second epi-layer has a greater germanium content than the third epi-layer, and wherein the third epi-layer of the first epitaxial structure is spaced apart from the third epi-layer of the second epitaxial structure.

11. The method of claim 8 , wherein the forming of the first epitaxial structure and the second epitaxial structure each comprises:
growing the second epi-layer on each of the first fin and the second fin; and
conformally growing the third epi-layer on the second epi-layer, wherein the second epi-layer has a greater germanium content than the third epi-layer, and wherein the third epi-layer of the first epitaxial structure is spaced apart from the third epi-layer of the second epitaxial structure.

12. The method of claim 8 , wherein the forming of the first epitaxial structure and the second epitaxial structure each comprises:
removing a segment of the first fin and the second fin;
growing the first epi-layer on a remaining segment of the first fin and the second fin;
growing the second epi-layer on the first epi-layer and on the remaining segment of the first fin and the second fin; and
conformally growing the third epi-layer on the second epi-layer, wherein the second epi-layer has a greater germanium content than the first epi-layer and the third epi-layer, and wherein the third epi-layer of the first epitaxial structure is spaced apart from the third epi-layer of the second epitaxial structure.

13. The method of claim 8 , wherein the forming of the first epitaxial structure and the second epitaxial structure each comprises:
removing a segment of the first fin and the second fin;
growing the second epi-layer on a remaining segment of the first fin and the second fin; and
conformally growing the third epi-layer on the second epi-layer and on the remaining segments of the first fin and the second fin, wherein the second epi-layer has a greater germanium con

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Yu Chia-Ta
• Wang Sheng-Chen
• Yang Cheng-Yu
• LEE Kai-Hsuan
• Yeong Sai-Hooi
• Yang Feng-Cheng
• Chen Yen-Ming

Classifications

• H01L29/0847

  Electricity · mapped topic

• H01L21/823475

  Electricity · mapped topic

• H01L27/0886 Primary

  Electricity · mapped topic

• H01L21/823431

  Electricity · mapped topic

• H01L21/823418

  Electricity · mapped topic