Systems and methods for effective pattern wafer surface measurement and analysis using interferometry tool

Patent metadata

Field	Value
Publication number	US-9865047-B1
Application number	US-201514883927-A
Country	US
Kind code	B1
Filing date	Oct 15, 2015
Priority date	Oct 28, 2014
Publication date	Jan 9, 2018
Grant date	Jan 9, 2018

Abstract

Systems and methods for providing improved wafer geometry measurements are disclosed. A wafer geometry measurement system may utilize techniques that enable the wafer geometry measurement system to identify and reduce wafer surface errors caused by structures such as patterns on the wafers being measured. The wafer geometry measurement system may also utilize techniques that enable the wafer geometry measurement system to accurately reconstruct patterned wafer surfaces.

First claim

What is claimed is:

1. A system, comprising:
at least one imaging device configured to acquire at least one of an image of a front surface of a wafer and at least one image of a back surface of the wafer; and
at least one processor in communication with the at least one imaging device, the at least one processor configured to:
calculate at least one of a front surface phase map of the wafer based on the image of the front surface of the wafer and a back surface phase map of the wafer based on the image of the back surface of the wafer;
calculate at least one of a front surface height map based on the front surface phase map and a back surface height map based on the back surface phase map of the wafer;
identify at least one artifact region within the front surface height map based on at least one of the front surface height map and the back surface height map;
generate a reference height map based on the front surface height map with the at least one artifact region excluded;
calculate a surface height correction value at least partially based on the reference height map, the front surface height map, and the front surface phase map; and
apply the surface height correction value to obtain an error-corrected front surface height map.

2. The system of claim 1 , wherein the at least one processor is configured to identify the at least one artifact region by:
filtering the front surface height map;
identifying at least one region within the front surface height map that contains large height variations; and
performing convex hull analysis of the front surface height map based on the at least one region to identify the at least one artifact region.

3. The system of claim 2 , wherein the front surface height map is filtered by high-pass filtering.

4. The system of claim 1 , wherein the at least one processor is configured to identify the at least one artifact region by:
calculating wafer thickness data based on the front surface height map and the back surface height map; and
identifying the at least one artifact region within the front surface height map based on the wafer thickness data.

5. The system of claim 4 , wherein the wafer thickness data includes at least one of: a wafer thickness map and a thickness variation histogram.

6. The system of claim 5 , wherein the at least one processor is configured to identify the at least one artifact region by:
identifying at least one region within the front surface height map that contains a large thickness variation spread as the at least one artifact region.

7. The system of claim 1 , wherein the at least one processor is configured to generate the reference height map by:
fitting a polynomial of a selected order to the front surface height map with the at least one artifact region excluded to generate the reference height map.

8. The system of claim 1 , wherein the at least one processor is configured to calculate the surface height correction value by:
calculating a large scale surface height correction value based on a difference between the reference height map and the front surface height map calculated based on the front surface phase map.

9. The system of claim 8 , wherein the large scale surface height correction value is an integer multiple of λ/2 where λ is a wavelength of a laser used to acquire the front surface phase map of the wafer.

10. The system of claim 9 , wherein the at least one processor is configured to calculate the surface height correction value by:
calculating a detailed scale surface height correction value for the at least one artifact region excluded from the front surface height map.

11. The system of claim 10 , wherein the detailed scale surface height correction value is applied after applying the large scale surface height correction value to further correct the error-corrected front surface height map so that the error-corrected front surface height map corresponds to a phase map that is substantially identical to the front surface phase map of the wafer originally acquired in the acquiring step.

12. The system of claim 1 , wherein the at least one processor is further configured to unwrap the front surface phase map by taking into consideration at least one of: the back surface phase map and the back surface height map.

13. The system of claim 1 , wherein the at least one processor is further configured to calculate the front surface height map by taking into consideration at least one of: the back surface phase map and the back surface height map.

14. A method, comprising:
acquiring a front surface phase map of a wafer;
calculating a front surface height map based on the front surface phase map;
filtering the front surface height map;
identifying at least one region within the front surface height map that contains large height variations;
performing convex hull analysis of the front surface height map based on the at least one region to identify at least one artifact region;
generating a reference height map based on the front surface height map with the at least one artifact region excluded;
calculating a surface height correction value at least partially based on the reference height map, the front surface height map, and the front surface phase map; and
applying the surface height correction value to obtain an error-corrected front surface height map.

15. The method of claim 14 , wherein said filtering the front surface height map further comprises:
filtering the front surface height map using high-pass filtering.

16. The method of claim 14 , wherein said identifying at least one region within the front surface height map containing large height variations further comprises:
identifying at least one region within the front surface height map that contains height variations above a surface height variation threshold.

17. The method of claim 14 , wherein said generating a reference height map further comprises:
fitting a polynomial of a selected order to the front surface height map with the at least one artifact region excluded to generate the reference height map.

18. The method of claim 14 , wherein said calculating a surface height correction value further comprises:
calculating a large scale surface height correction value based on a difference between the reference height map and the front surface height map calculated based on the front surface phase map.

19. The method of claim 18 , wherein the large scale surface height correction value is an integer multiple of λ/2 where λ is a wavelength of a laser used to acquire the front surface phase map of the wafer.

20. The method of claim 19 , wherein said calculating a surface height correction value further comprises:
calculating a detailed scale surface height correction value for the at least one artifact region excluded from the front surface height map.

21. The method of claim 20 , wherein the detailed scale surface height correction value is applied after applying the large scale surface height correction value to further correct the error-corrected front surface height map so that the error-corrected front surface height map corresponds to a phase map that is substantially identical to the front surface phase map of the wafer originally acquired in the acquiring step.

22. A method, comprising:
acquiring a front surface phase map of wafer and a back surface phase map of the wafer;
calculating a front surface height map based on the front surface phase map and a back surface height map based

Assignees

• Kla Tencor Corp

Inventors

• Chen Haiguang
• Sinha Jaydeep
• Chavez Enrique
• Veeraraghavan Sathish

Classifications

• G06F18/22

  Matching criteria, e.g. proximity measures · CPC title

• G06K9/6215

  Physics · mapped topic

• G06K9/52

  Physics · mapped topic

• G06T7/001 Primary

  using an image reference approach · CPC title

• G06K2009/4666

  Physics · mapped topic