Optical inspection system using multi-facet imaging

Patent metadata

Field	Value
Publication number	US-9857312-B2
Application number	US-66467108-A
Country	US
Kind code	B2
Filing date	Jun 15, 2008
Priority date	Jun 15, 2007
Publication date	Jan 2, 2018
Grant date	Jan 2, 2018

Abstract

An optical inspection system, the system includes: (i) an image sensor; and (ii) a single optical element, that at least partially surrounds an edge of an inspected object; wherein the optical element is adapted to direct light from different areas of the edge of the inspected object towards the image sensor so that the image sensor concurrently obtains images of the different areas.

First claim

What is claimed is:

1. An optical inspection system, comprising:
an image sensor;
an optical element, that is a multi-facet reflector that at least partially surrounds an edge of an inspected object; wherein the optical element is adapted to (a) pass light that is normal to an apex area of the edge towards the apex area, (b) reflect light towards different areas of the edge that differ from the apex area, wherein the different areas comprise a top area, a top bevel area, a bottom area and a bottom bevel area; (c) and reflect light scattered or reflected from the apex area and from the different areas towards the image sensor so that the image sensor concurrently obtains images of the different areas and of the apex area; wherein the different areas are oriented to each other;
a pair of lenses; and
a beam splitter that is located between the pair of lenses, wherein the pair of lenses are parallel to each other and are positioned between the image sensor and the optical element;
wherein the beam splitter is configured to reflect light from a light source towards the optical element; and
wherein the pair of lenses are configured to direct light reflected from the top area and the top bevel area towards a part of the image sensor that is located below an optical axis of the image sensor.

2. The system according to claim 1 wherein the optical element comprises (a) an upper portion that is arranged to collect light from the top area and from the top bevel area, (b) a middle portion that is arranged to collect light from the apex area, and (c) a lower portion that is arranged to collect light from the bottom area and from the bottom bevel area.

3. The system according to claim 2 wherein the upper portion and the lower portion are normal to the apex area and are parallel to an optical axis of the image sensor.

4. The system according to claim 2 wherein a distance between a right end of the middle portion and a left end of the middle portion is smaller than each one of (a) a distance between a right end and a left end of the top portion and (b) a distance between a right end and a left end of the bottom portion.

5. The system according to claim 2 wherein the bottom portion and the top portion are arranged in a symmetrical manner about the middle portion.

6. The system according to claim 1 wherein the optical element is arranged to reflect light from the apex area and from any of the different areas of the edge in parallel to an optical axis of the image sensor.

7. The system according to claim 1 wherein the optical element comprises a first facet, a second facet, a third facet and a fourth facet, wherein the first facet and the second facet have a positive slope and are oriented to each other, wherein the fourth facet has a negative slope and is positioned above the first facet and the second facet, wherein an upper end of the third facet contacts a lower end of the fourth facet and wherein a lower end of the third facet contacts an upper end of the second facet.

8. The system according to claim 1 wherein the optical element comprises a first facet, a second facet, a third facet and a fourth facet, wherein the first facet has a negative slope, the fourth facet has negative slope and is positioned above the first facet and the second facet, wherein an upper end of the third facet contacts a lower end of the fourth facet and wherein a lower end of the third facet contacts an upper end of the second facet.

9. The system according to claim 1 wherein the optical element is adapted to reduce a length difference between different optical paths defined between the different areas and the image sensor.

10. The system according to claim 1 comprising a path length adjustment optics that reduces a length difference between different optical paths defined between the different areas and the image sensor.

11. The system according to claim 1 comprising a path length adjustment optics; wherein the path length adjustment optics and the optical element substantially equalize a length of different optical paths defined between the different areas and the image sensor.

12. The system according to claim 1 comprising an inspected object stabilizer that maintains a substantially constant distance between an illuminated portion of the edge of the inspected object and the optical element during a movement of the inspected object in relation to the optical element.

13. The system according to claim 1 comprising an optical element mover adapted to move the optical element in relation to an illuminated portion of the edge of the inspected object in response to an estimated location of the illuminated portion of the edge of the inspected object, during a scan of the edge of the inspected object in relation to the optical element.

14. The system according to claim 1 wherein the optical element comprises multiple portions that differ from each other by at least one optical characteristic; and wherein at a given point of time the different portions of the optical element direct, towards the image sensor, light from different regions of the edge of the inspected element; wherein each region of the edge of the inspected element comprises at least two areas of the edge of the inspected element that are oriented in relation to each other.

15. The system according to claim 1 wherein the optical element comprises multiple portions that differ from each other by at least one optical characteristic; and wherein at a given point of time the different portions of the optical element direct, towards the image sensor, light from different regions of the edge of the inspected element; wherein each region of the edge of the inspected element has an central axis that is substantially perpendicular to a plane defined by an upper surface of the inspected object.

16. The system according to claim 1 wherein the image sensor is an area image sensor.

17. The system according to claim 1 wherein the image sensor is a linear image sensor.

18. The system according to claim 1 wherein the inspected object is a wafer.

19. The system according to claim 1 wherein the optical element comprises a pair of penta-prisms that are symmetrically arranged about a symmetry axis of the optical element.

20. The system according to claim 1 wherein the optical element comprises multiple portions that differ from each other by angular coverage.

21. The system according to claim 1 wherein the optical element comprises multiple portions that differ from each other by magnification.

22. The system according to claim 1 wherein the optical element comprises multiple portions that differ from each other by color filtering.

23. The system according to claim 1 wherein the optical element comprises multiple portions that differ from each other by spectral range.

24. An optical inspection system, comprising: an image sensor; an optical element, that is a multi-facet reflector that at least partially surrounds an edge of an inspected object wherein the optical element is adapted to (a) pass light that is normal to an apex area of the edge towards the apex area, (b) reflect light towards different areas of the edge that differ from the apex area, wherein the different areas comprise a top area, a top bevel area, a bottom area and a bottom bevel area; (c) and reflect light scattered or reflected from the apex area and from the different areas towards the image sensor so that the image sensor concurrently obtains images of th

Assignees

• Lev Michael
• Efrat Ehud
• Flieswasser Roni
• Camtek Ltd

Inventors

• Lev Michael
• Efrat Ehud
• Flieswasser Roni

Classifications

• G01N21/9503 Primary

  Wafer edge inspection · CPC title

• G01N21/8806

  Specially adapted optical and illumination features · CPC title