SiC single crystal and production method thereof

Patent metadata

Field	Value
Publication number	US-9856582-B2
Application number	US-201213428395-A
Country	US
Kind code	B2
Filing date	Mar 23, 2012
Priority date	Sep 29, 2009
Publication date	Jan 2, 2018
Grant date	Jan 2, 2018

Abstract

A method is disclosed with provides stable growth of SiC single crystals, particularly 4H—SiC single crystals, with an effective crystal growth rate for a prolonged time even at a low temperature range of 2000° C. or lower. A raw material containing Si, Ti and Ni is charged into a crucible made of graphite and heat-melted to obtain a solvent. At the same time, C is dissolved out from the crucible into the solvent to obtain a melt. A SiC seed crystal substrate is then brought into contact with the melt such that SiC is supersaturated in the melt in the vicinity of the surface of the SiC seed crystal substrate, thereby allowing growth and production of an SiC single crystal on the SiC seed crystal substrate.

First claim

What is claimed is:

1. A method for production of a SiC single crystal, comprising:
dissolving C in a solvent in which a raw material containing Si, Ti and Ni has been heat-melted, thereby preparing a melt; and
bringing a SiC seed crystal into contact with the melt such that SiC is supersaturated in the melt in the vicinity of the surface of the SiC seed crystal, to thereby allow growth of the SiC single crystal on the SiC seed crystal, wherein an atomic ratio of Ti relative to Si satisfies the relation 0.05≦[Ti]/([Si]+[Ti])≦0.3, and
wherein an atomic ratio of a total of Ti and Ni relative to Si satisfies the relation 0.1≦([Ti]+[Ni])/([Si]+[Ti]+[Ni])≦0.45.

2. The method according to claim 1 , wherein an atomic ratio of Ti relative to Si satisfies the relation 0.1≦[Ti]/([Si]+[Ti])≦0.3.

3. The method according to claim 1 , wherein an atomic ratio of Ni relative to Ti satisfies the relation 0.05≦[Ni]/[([Ti]+[Ni])≦0.70.

4. The method according to claim 1 , wherein an atomic ratio of Ni relative to Ti satisfies the relation 0.05≦[Ni]/[([Ti]+[Ni])≦0.54.

5. The method according to claim 1 , wherein an atomic ratio of Ni relative to Ti satisfies the relation 0.05≦[Ni]/[([Ti]+[Ni])≦0.70.

6. The method according to claim 1 , wherein an atomic ratio of Ni relative to Ti satisfies the relation 0.05≦[Ni]/[([Ti]+[Ni])≦0.54.

7. The method according to claim 1 , which is carried out at atmospheric pressure or under pressure.

8. The method according to claim 1 , wherein the raw material is charged into a crucible.

9. The method according to claim 8 wherein the crucible is made of impurity-free graphite.

10. The method according to claim 8 , wherein a gas containing C is fed into the crucible and is dissolved in the solvent by gas-liquid interface reaction.

11. The method according to claim 10 , wherein the gas containing C is a carbohydrate gas or a carbohydrate gas diluted with hydrogen.

12. The method according to claim 10 , wherein the gas containing C is fed together with a gas containing Si.

13. The method according to claim 12 , wherein the gas continuing Si is silane, disilane, or SiH n Cl 4−n , wherein n is 1, 2 or 3.

14. The method according to claim 12 , wherein composition of the melt is maintained by feeding the gas containing Si.

15. The method according to claim 1 , wherein temperature of the melt is 2000° C. or lower.

16. The method according to claim 15 , wherein the seed crystal is cooled such that the melt at the side of the seed crystal has a lower temperature, wherein a temperature gradient ΔT is about 40° C./cm.

17. The method according to claim 16 , wherein SiC is supersaturated in the vicinity of the surface of seed crystal.

18. The method according to claim 1 , wherein temperature of the melt is 1700° C. or lower.

Assignees

• Ryo Mina
• Yonezawa Yoshiyuki
• Suzuki Takeshi
• Fuji Electric Co Ltd

Inventors

• Ryo Mina
• Yonezawa Yoshiyuki
• Suzuki Takeshi

Classifications

• C30B29/36 Primary

  Carbides · CPC title

• C30B17/00

  Single-crystal growth onto a seed which remains in the melt during growth, e.g. Nacken-Kyropoulos method (C30B15/00 takes precedence) · CPC title

• C30B9/10

  Metal solvents · CPC title