Gate all around vacuum channel transistor

Patent metadata

Field	Value
Publication number	US-9853163-B2
Application number	US-201615280879-A
Country	US
Kind code	B2
Filing date	Sep 29, 2016
Priority date	Sep 30, 2015
Publication date	Dec 26, 2017
Grant date	Dec 26, 2017

Abstract

A vacuum channel transistor having a vertical gate-all-around (GAA) architecture provides high performance for high-frequency applications, and features a small footprint compared with existing planar devices. The GAA vacuum channel transistor features stacked, tapered source and drain regions that are formed by notching a doped silicon pillar using a lateral oxidation process. A temporary support structure is provided for the pillar during formation of the vacuum channel. Performance of the GAA vacuum channel transistor can be tuned by replacing air in the channel with other gases such as helium, neon, or argon. A threshold voltage of the GAA vacuum channel transistor can be adjusted by altering dopant concentrations of the silicon pillar from which the source and drain regions are formed.

First claim

The invention claimed is:

1. A device, comprising:
a substrate;
a doped layer on the substrate;
a vertical pillar formed from the doped layer;
a source formed in a first portion of the vertical pillar, the first portion having a first point;
a drain formed in a second portion of the vertical pillar, the second portion having a second point spaced apart from the first point by a first gap;
a first insulator surrounding the source;
a second insulator surrounding the drain;
a second gap between the first and second insulators; and
an annular gate concentric with the vertical pillar, the annular gate aligned with the first gap.

2. The device of claim 1 , further comprising a gas that fills the first and second gaps.

3. The device of claim 2 wherein the gas includes one or more of argon, helium, neon, oxygen and nitrogen.

4. The device of claim 1 wherein one or both of the insulators includes a plurality of insulating materials.

5. The device of claim 1 , further comprising front side electrical contacts coupled to the source, gate and drain.

6. The device of claim 1 , further comprising isolation regions in the semiconductor substrate, the isolation regions separating the device from neighboring circuitry.

7. The device of claim 1 wherein the first gap is less than 10 nm wide.

8. The device of claim 1 wherein the doped layer has a concentration in the range of 1.0 E 19-1.0 E 21 cm −3 .

9. The device of claim 1 wherein the first portion of the vertical pillar is wider than the second portion of the vertical pillar.

10. An integrated circuit comprising:
a substrate;
a plurality of devices on the substrate, each device including:
a doped layer on the substrate;
a vertical pillar in the doped layer;
a source in a first portion of the vertical pillar, the first portion having a first point;
a drain in a second portion of the vertical pillar, the second portion having a second point spaced apart from the first point by a first gap;
a first insulator surrounding the source;
a second insulator surrounding the drain;
a second gap between the first and second insulators;
an annular gate concentric with the vertical pillar, the annular gate aligned with the first gap; and
front side electrical contacts coupled to the source, gate and drain.

11. The integrated circuit of claim 10 wherein the plurality of devices includes a first group of devices in which the doped layer is doped with negative ions and a second group of devices in which the doped layer is doped with positive ions.

12. The integrated circuit of claim 10 , further comprising:
a plurality of insulating structures positioned between adjacent ones of the plurality of devices, each insulating structure including a first end in the substrate and a second end coplanar with ends of the front side electrical contacts.

13. The integrated circuit of claim 12 wherein the front side electrical contact that is coupled to the source in a first one of the plurality of devices abuts a first one of the plurality of insulating structures.

14. The integrated circuit of claim 13 wherein the front side electrical contact that is coupled to the source of a second one of the plurality of devices abuts the first one of the plurality of insulating structures.

15. The integrated circuit of claim 10 wherein the front side electrical contact coupled to the drain in each device is cylindrical.

16. A device, comprising:
a substrate;
a doped layer on the substrate, the doped layer having a base and a pillar, the pillar extends from the base, the pillar includes:
a source in a first portion of the pillar, the source having a first tapered end; and
a drain in a second portion of the pillar, the drain having a second tapered end, the second tapered end spaced apart from the first tapered end by a first gap.

17. The device of claim 16 , further comprising:
a first insulator surrounding the source;
a second insulator surrounding the drain;
a second gap between the first and second insulators; and
an annular gate concentric with the pillar portion, the annular gate aligned with the first gap.

18. The device of claim 17 , further comprising:
an isolation structure surrounding the source, the drain, the first insulator, the second insulator, the second gap, and the annular gate, the isolation structure having a portion in the substrate.

19. The device of claim 18 , further comprising:
a first electrical contact electrically coupled to the source;
a second electrical contact electrically coupled to the drain; and
a third electrical contact electrically coupled to the annular gate.

20. The device of claim 19 , wherein the first electrical contact has a first end in the doped layer and a second end coplanar with ends of the second electrical contact and the third electrical contact.

Assignees

• St Microelectronics Inc

Inventors

• Zhang John H

Classifications

• H01L29/78696

  Electricity · mapped topic

• H01L29/78642 Primary

  Electricity · mapped topic

• H01L29/42392

  Electricity · mapped topic

• H01L29/66666

  Electricity · mapped topic

• H01J21/105 Primary

  with microengineered cathode and control electrodes, e.g. Spindt-type · CPC title