Cobalt first layer advanced metallization for interconnects

Patent metadata

Field	Value
Publication number	US-9852990-B1
Application number	US-201615239087-A
Country	US
Kind code	B1
Filing date	Aug 17, 2016
Priority date	Aug 17, 2016
Publication date	Dec 26, 2017
Grant date	Dec 26, 2017

Abstract

A method for fabricating an advanced metal conductor structure is described. A pattern in a dielectric layer is provided. The pattern includes a set of features in the dielectric for a set of metal conductor structures. An adhesion promoting layer is created over the patterned dielectric. A ruthenium layer is deposited over the adhesion promoting layer. Using a physical vapor deposition process, a cobalt layer is deposited over the ruthenium layer. A thermal anneal is performed which reflows the cobalt layer to fill the set of features to form a set of metal conductor structures. In another aspect of the invention, an integrated circuit device is formed using the method.

First claim

Having described our invention, what we now claim is as follows:

1. A method for fabricating an advanced metal conductor structure comprising:
providing a pattern in a dielectric layer, wherein the pattern includes a set of features in the dielectric for a set of metal conductor structures;
creating an adhesion promoting layer disposed over the patterned dielectric;
depositing a ruthenium metal layer disposed over the adhesion promoting layer;
using a physical vapor deposition process to deposit a cobalt layer disposed over the ruthenium layer;
performing a thermal anneal which reflows the cobalt layer to fill a first portion of the set of features leaving a second, remaining portion of the set of features unfilled, wherein the reflowed cobalt layer has a u-shaped cross-section having a thicker bottom layer than side layers; and
depositing a second metal layer to fill the second, remaining portion of the set of features, wherein the second metal is a metal other than cobalt;
wherein a thickness of the reflowed cobalt layer from the ruthenium layer to a bottom of the second metal layer and a thickness of the second metal layer after planarization are substantially equal.

2. The method as recited in claim 1 , wherein the adhesion promoting layer is a liner layer of a single layer comprised of a material selected from the group consisting of Ta, Ti, W, TaN, TiN and WN.

3. The method as recited in claim 1 , wherein the adhesion promoting layer is a nitrogen enriched layer formed in the patterned dielectric produced by a nitridation process.

4. The method as recited in claim 1 , wherein the adhesion promoting layer is comprised of a nitrogen enriched layer formed in the patterned dielectric produced by a nitridation process and a liner layer comprised of one or more materials selected from the group consisting of Ta, Ti, W, TaN, TiN and WN.

5. The method as recited in claim 1 , wherein the set of metal conductor structures are a set of conductive lines.

6. The method as recited in claim 2 , wherein the thermal anneal is carried out in a temperature range between 300-800 degrees Centigrade in a neutral ambient and a RuCo alloy is formed.

7. The method as recited in claim 1 , further comprising removing excess material on field areas of the dielectric layer using a planarization process.

8. The method as recited in claim 3 , wherein the nitridation process is selected from the group of a plasma nitrididation process and a thermal nitridation process.

9. The method as recited in claim 7 , wherein the planarization process is a chemical mechanical polishing process.

10. The method as recited in claim 1 , wherein the second metal layer is selected from the group consisting of Cu, Al, Ni, Ir and Rh.

11. The method as recited in claim 1 , wherein the respective thicknesses of the reflowed cobalt layer and the second metal layer are formed according to a desired resistivity and reliability needed for the advanced metal connector structure.

12. The method as recited in claim 1 , wherein a first dimension of the advanced metal connector structure is less than twenty nanometers.

Assignees

• IBM

Inventors

• Edelstein Daniel C
• Yang Chih-Chao

Classifications

• H10W20/4437

  the principal metal being a transition metal · CPC title

• H10P52/403

  of conductive or resistive materials · CPC title

• H10P14/418

  the conductive layers comprising transition metals · CPC title

• H10P14/44

  Physical vapour deposition [PVD] · CPC title

• H10W20/4446

  Refractory-metal alloys · CPC title