Method for growing carbon nanotubes

Patent metadata

Field	Value
Publication number	US-9850132-B2
Application number	US-201414779577-A
Country	US
Kind code	B2
Filing date	Mar 26, 2014
Priority date	Mar 28, 2013
Publication date	Dec 26, 2017
Grant date	Dec 26, 2017

Abstract

Provided is a method for growing carbon nanotubes that enables the growth of high-density carbon nanotubes. A high frequency bias voltage is applied to a loading table on which a wafer W having a catalytic metal layer is mounted to generate a bias potential on the surface of the wafer W, and oxygen plasma is used to micronize the catalytic metal layer to form catalytic metal particles. Thereafter, hydrogen plasma is used to reduce the surface of the catalytic metal particles to form activated catalytic metal particles having an activated surface. By using each activated catalytic metal particles as a nucleus, carbon nanotubes are formed.

First claim

What is claimed is:

1. A method for growing carbon nanotubes, comprising:
a fine particle forming process of forming catalytic metal fine particles by micronizing a catalytic metal layer using first plasma that is oxygen-containing gas plasma generated by microwave in a substrate including thereon the catalytic metal layer, so that an agglomeration of a plurality of atoms of catalytic metal is generated and the catalytic metal layer is changed into a number of catalytic metal fine particles;
an activation process of activating surfaces of the catalytic metal fine particles by reducing the surfaces of the catalytic metal fine particles using second plasma containing hydrogen atoms; and
a carbon nanotube forming process of forming the carbon nanotubes using the catalytic metal fine particles having the activated surfaces as nuclei,
wherein, in the fine particle forming process, the substrate including thereon the catalytic metal layer is loaded on a loading table and a high-frequency bias voltage is applied to the substrate via the loading table in the first plasma and a bias potential generated on a surface of the substrate is adjusted in order to control an amount of an ion flux and change the catalytic metal layer into the catalytic metal fine particles in the fine particle forming process, and
wherein, in the carbon nanotube forming process, a thermal CVD method is used.

2. The method of claim 1 , wherein the first plasma includes at least argon atoms.

3. The method of claim 1 , wherein in the carbon nanotube forming process, the high-frequency bias voltage is not applied.

4. The method of claim 1 , wherein in the activation process, the high-frequency bias voltage is not applied.

5. The method of claim 1 , wherein the fine particle forming process, the activation process, and the carbon nanotube forming process are sequentially and continuously performed.

Assignees

• Tokyo Electron Ltd

Inventors

• Matsumoto Takashi
• Koizumi Kenjiro

Classifications

• H10P14/43

  Chemical deposition, e.g. chemical vapour deposition [CVD] · CPC title

• H10W20/0554

  of nanotubes or nanowires · CPC title

• H10W20/045

  for deposition from the gaseous phase, e.g. for chemical vapour deposition [CVD] · CPC title

• B01J35/45

  Nanoparticles · CPC title

• C01B32/162

  characterised by catalysts · CPC title