Trihalosilane refining device having divided wall distillation column

Patent metadata

Field	Value
Publication number	US-9849402-B2
Application number	US-201514628968-A
Country	US
Kind code	B2
Filing date	Feb 23, 2015
Priority date	Nov 11, 2011
Publication date	Dec 26, 2017
Grant date	Dec 26, 2017

Abstract

Trihalosilane refining device having a divided wall distillation column is disclosed. The trihalosilane refining device can be useful in obtaining high-purity trihalosilane from a feed containing a trihalosilane while consuming a small amount of energy.

First claim

What is claimed is:

1. A trihalosilane refining device comprising:
a divided wall distillation column having an upper column region, a preliminary separation region, a main separation region and a lower column region formed therein and comprising an inlet port installed to introduce a feed containing a trihalosilane into the preliminary separation region, a first outlet port, a second outlet port and a third outlet port; and
a first distillation column coupled to the divided wall distillation column,
wherein the inlet port is installed at a 1/10 to 5/10 section of the preliminary separation region and wherein the second outlet port is formed at a 6/9 to 8/9 section of a divided wall section of the main separation region, and
wherein the divided wall distillation column is a tray type designed to have a plate number so that a separation efficiency can be maintained at a level from 50% to 80% with respect to a theoretical plate number.

2. The trihalosilane refining device of claim 1 , which has a structure in which the upper and lower column regions are open.

3. The trihalosilane refining device of claim 2 , wherein the upper or lower column region has an open length of 800 mm to 3,500 mm.

4. The trihalosilane refining device of claim 1 , wherein the divided wall distillation column has a gap between trays in a divided wall section within a range from 200 mm to 1,500 mm.

5. The trihalosilane refining device of claim 1 , wherein the divided wall of the divided wall distillation column has a length of 30% or more with respect to a total theoretical plate number of the divided wall distillation column.

6. The trihalosilane refining device of claim 1 , wherein the first distillation column is coupled to the divided wall distillation column to introduce a component flowing out through the second outlet port.

7. The trihalosilane refining device of claim 1 , wherein the third outlet port is installed at the divided wall distillation column to enable outflow of a component in the lower column region, and the trihalosilane refining device further comprises a second distillation column coupled to the divided wall distillation column to introduce a component flowing out through the third outlet port.

8. The trihalosilane refining device of claim 1 , further comprising a third distillation column installed to introduce a component flowing out from a lower portion of the first distillation column.

9. The trihalosilane refining device of claim 1 , wherein the first outlet is installed to enable outflow of a component in the upper column region, the second outlet port is installed to enable outflow of a component in the main separation region and the third outlet port is installed to enable outflow of a component in the lower column region.

10. The trihalosilane refining device of claim 9 , wherein the first outlet port is installed so as to satisfy the following Expression 2:
0.0139 P 3 −0.6467 P 2 +12.692 P+ 27.716≦ Tt≦ 0.0139 P 3 −0.6467 P 2 +12.692 P+ 37.716  Expression 2

wherein Tt represents a temperature (° C.) of the first outlet port or the component flowing out through the first outlet port and P represents an operating pressure (Kg/sqcmG) of the upper column region of the divided wall distillation column.

11. The trihalosilane refining device of claim 9 , wherein the second outlet port is installed so as to satisfy the following Expression 1:
0.0132 P 3 −0.624 P 2 +12.673 P+ 41.371≦ Tm≦ 0.0132 P 3−0.624 P 2+12.673 P+ 51.371  Expression 1

wherein Tm represents a temperature (° C.) of the second outlet port or the component flowing out through the second outlet port, and P represents an operating pressure (Kg/sqcmG) of the upper column region of the divided wall distillation column.

12. The trihalosilane refining device of claim 9 , wherein the third outlet port is installed so as to satisfy the following Expression 3:
0.016 P 3 −0.7386 P 2 +14.3 P+ 78.759≦ Tb≦ 0.016 P 3 −0.7386 P 2 +14.3 P+ 88.759  Expression 3

wherein Tb represents a temperature (° C.) of the third outlet port or the component flowing out through the third outlet port and P represents an operating pressure (Kg/sqcmG) of the upper column region of the divided wall distillation column.

Assignees

• Lg Chemical Ltd

Inventors

• Lee Sung Kyu
• Shin Joon Ho
• Lee Jong Ku
• Kim Sung Kyun

Classifications

• C01B33/10778

  Purification · CPC title

• B01D3/141 Primary

  where at least one distillation column contains at least one dividing wall · CPC title

• B01D3/324

  Tray constructions · CPC title

• B01D3/143

  by two or more of a fractionation, separation or rectification step · CPC title

• Y10S203/20

  Power plant · CPC title