Trihalosilane refining method

Patent metadata

Field	Value
Publication number	US-8974642-B2
Application number	US-201314089528-A
Country	US
Kind code	B2
Filing date	Nov 25, 2013
Priority date	Nov 11, 2011
Publication date	Mar 10, 2015
Grant date	Mar 10, 2015

Abstract

A trihalosilane refining device and a trihalosilane refining method are provided. The trihalosilane refining device can be useful in obtaining high-purity trihalosilane from a feed containing a trihalosilane while consuming a small amount of energy.

First claim

What is claimed is:

1. A trihalosilane refining method, comprising:
introducing a feed containing a trihalosilane into a divided wall distillation column having a divided wall, which has a length of at least 30% with respect to a total theoretical plate number thereof, installed therein; and
introducing an effluent flowing out from the divided wall distillation column into a first distillation column,
wherein the divided wall distillation column comprises an upper column region, a preliminary separation region, a main separation region and a lower column region, and has an inlet port installed therein to introduce the feed containing a trihalosilane into the preliminary separation region, a first outlet port, a second outlet port and a third outlet port,
wherein the effluent flowing out through the second outlet port is introduced into the first distillation column,
wherein the second outlet port or the effluent flowing out through the second outlet port is maintained at a temperature of 86.4° C. to 116.4° C., and
wherein the first distillation column is maintained at an operating pressure of −0.6 Kg/sqcmG to 9.0 Kg/sqcmG and an operating temperature of 37° C. to 145° C.

2. The trihalosilane refining method of claim 1 , wherein the feed is introduced into the preliminary separation region through the inlet port installed at a 1/10to 9/10 section of the preliminary separation region.

3. The trihalosilane refining method of claim 1 , wherein the third outlet port is installed at the divided wall distillation column to enable outflow of a component in the lower column region, and the trihalosilane refining method further comprises introducing the component flowing out through the third outlet port into a second distillation column.

4. The trihalosilane refining method of claim 3 , wherein the third outlet port or the effluent flowing out through the third outlet port is maintained at a temperature of 129.9° C. to 159.9° C. under a pressure of 5.8 Kg/sqcmG.

5. The trihalosilane refining method of claim 3 , wherein the second distillation column is maintained at an operating pressure of 0.1 Kg/sqcmG to 52.5 Kg/sqcmG and an operating temperature of 37° C. to 223.5° C.

6. The trihalosilane refining method of claim 1 , further comprising:
introducing the effluent flowing out from a lower portion of the first distillation column into a third distillation column.

7. The trihalosilane refining method of claim 6 , wherein the third distillation column is maintained at an operating pressure of 0.1 Kg/sqcmG to 50.5 Kg/sqcmG and an operating temperature of 37° C. to 219.5° C.

Assignees

• Lg Chemical Ltd

Inventors

• Lee Sung Kyu
• Shin Joon Ho
• Lee Jong Ku
• Kim Sung Kyun

Classifications

• B01D3/14

  Fractional distillation {or use of a fractionation or rectification column} · CPC title

• C01B33/107

  Halogenated silanes · CPC title

• B01D53/00

  Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols, (recovery of volatile solvents by condensation B01D5/00; sublimation B01D7/00; cold traps, cold baffles B01D8/00; working-up undefined gaseous mixtures obtained by cracking hydrocarbon oils C10G70/00; cleaning coal gas C10K; working-up of natural gas, or synthetic natural gas, C10L3/10; separation of difficult-to-condense gases or air by liquefaction F25J; for investigating materials G01N30/00) · CPC title

• Y10S203/20

  Power plant · CPC title

• C01B33/10778 Primary

  Purification · CPC title