Inspection of regions of interest using an electron beam system

Patent metadata

Field	Value
Publication number	US-9847209-B2
Application number	US-201615207024-A
Country	US
Kind code	B2
Filing date	Jul 11, 2016
Priority date	Jan 13, 2014
Publication date	Dec 19, 2017
Grant date	Dec 19, 2017

Abstract

A system for scanning a plurality of regions of interest of a substrate using one or more charged particle beams, the system comprises: an irradiation module having charged particle optics; a stage for introducing a relative movement between the substrate and the charged particle optics; an imaging module for collecting electrons emanating from the substrate in response to a scanning of the regions of interest by the one or more charged particle beams; and wherein the charged particle optics is arranged to perform countermovements of the charged particle beam during the scanning of the regions of interest thereby countering relative movements introduced between the substrate and the charged particle optics during the scanning of the regions of interest.

First claim

What is claimed is:

1. A system for scanning a plurality of regions of interest of a substrate using one or more charged particle beams, the system comprising:
an irradiation module having charged particle optics;
a stage for introducing a relative movement between the substrate and the charged particle optics;
an imaging module for collecting electrons emanating from the substrate in response to multiple scans of a same region of interest by the one or more charged particle beams, wherein at least two scans of the multiple scans differ from each other by at least one image acquisition condition; and
wherein the charged particle optics is arranged to perform countermovements of the charged particle beam during the scanning of the regions of interest thereby countering the relative movement introduced between the substrate and the charged particle optics during the scanning of the regions of interest, and wherein image acquisition occurs during introduction of the relative movement.

2. The system according to claim 1 wherein the charged particle optics is arranged to move the charged particle beam, during a scan of a region of interest, in a scan pattern along a first direction and along a second direction oriented with respect to the first direction, and wherein a performing of a countermovement of the charged particle beam comprises moving the charged particle beam along the first direction.

3. The system according to claim 1 wherein the stage is arranged to introduce the relative movement by moving the substrate at a constant speed; and wherein the charged particle optics is arranged to perform a countermovement of the charged particle beam under a control of a control signal having a saw tooth shape.

4. The system according to claim 1 comprising a controller that is arranged, for each combination of charged particle beam and a scan of a region of interest, to generate a control signal for adjusting a position of the charged particle beam in response to stage position information.

5. The system according to claim 1 wherein a length of the region of interest is between 0.25 micron to 2 microns and a length of a movement of stage during a scan of the region of interest is between 0.25 micron to 200 micron.

6. The system according to claim 1 wherein said charged particle optics is one of a group consisting of: a single charged particle column generating a single charged particle beam, a multi charged particle column structure wherein each charged particle column is generating a single beam, and a single charged particle column generating a plurality of charged particle beams.

7. The system according to claim 1 wherein the substrate is a wafer.

8. The system according to claim 1 wherein the substrate is a reticle.

9. The system according to claim 1 wherein the charged particle beam is an electron beam.

10. The system according to claim 1 wherein the charged particle beam is an ion beam.

11. The system according to claim 1 wherein the system is arranged to scan the one or more charged particle beams over an entire surface of the substrate.

12. The system according to claim 1 wherein an overall area of all the regions of interest is a fraction of an area of the wafer.

13. The system according to claim 1 wherein at least some regions of interest have an area that is less than one percent of the field of view.

14. The system according to claim 1 wherein at least two of the regions of interest differ from each other by at least one of shape or size.

15. A method for scanning a plurality of regions of interest of a substrate, the method comprising:
introducing a relative movement between the substrate and charged particle optics;
during the introducing of the relative movement, scanning the regions of interest by the one or more charged particle beams; wherein the scanning comprises performing countermovements of the charged particle beam during the scanning of the regions of interest thereby countering the relative movement introduced between the substrate and the charged particle optics; and
collecting electrons emanating from the substrate in response to multiple scans of a same region of interest by the one or more charged particle beams, wherein at least two scans of the multiple scans differ from each other by at least one image acquisition condition, and wherein image acquisition occurs during introduction of the relative movement.

16. The method according to claim 15 comprising moving the charged particle beam, during a scan of a region of interest, in a scan pattern along a first direction and along a second direction oriented with respect to the first direction, and wherein the performing of a countermovement of the charged particle beam comprises moving the charged particle beam along the first direction.

17. The method according to claim 15 comprising introducing the relative movement by moving the substrate at a constant speed; and performing the countermovement of the charged particle beam under a control of a control signal having a saw tooth shape.

18. The method according to claim 15 comprising generating, for each combination of charged particle beam and a scan of a region of interest, a control signal for adjusting a position of the charged particle beam in response to stage position information.

19. The method according to claim 15 wherein at least two of the regions of interest differ from each other by at least one of shape or size.

20. A system for scanning a plurality of regions of interest of a substrate using one or more charged particle beams, the system comprising:
an irradiation module having charged particle optics;
a stage for introducing a relative movement between the substrate and the charged particle optics;
an imaging module for collecting electrons emanating from the substrate in response to a scanning of the regions of interest by the one or more charged particle beams; and
wherein the charged particle optics is arranged to perform countermovements of the charged particle beam during the scanning of the regions of interest thereby countering the relative movement introduced between the substrate and the charged particle optics during the scanning of the regions of interest, wherein at least two of the regions of interest differ from each other by at least one of shape or size, and wherein image acquisition occurs during introduction of the relative movement.

Assignees

• Applied Materials Israel Ltd

Inventors

• Sender Benzion
• Litman Alon

Classifications

• H01J37/265 Primary

  Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination · CPC title

• H01J2237/202

  Movement · CPC title

• H01J2237/28

  Scanning microscopes · CPC title

• H01J2237/15

  Means for deflecting or directing discharge · CPC title

• H01J2237/20228

  Mechanical X-Y scanning · CPC title